JPH06168853A - Aluminum material for electrode of electrolytic capacitor and production thereof - Google Patents

Aluminum material for electrode of electrolytic capacitor and production thereof

Info

Publication number
JPH06168853A
JPH06168853A JP31985292A JP31985292A JPH06168853A JP H06168853 A JPH06168853 A JP H06168853A JP 31985292 A JP31985292 A JP 31985292A JP 31985292 A JP31985292 A JP 31985292A JP H06168853 A JPH06168853 A JP H06168853A
Authority
JP
Japan
Prior art keywords
temperature
foil
aluminum foil
electrolytic capacitor
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31985292A
Other languages
Japanese (ja)
Other versions
JP3320467B2 (en
Inventor
Kiyoshi Tada
清志 多田
Akira Hashimoto
明 橋本
Shinji Numao
臣二 沼尾
Eizo Isoyama
永三 礒山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Aluminum Can Corp
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP31985292A priority Critical patent/JP3320467B2/en
Publication of JPH06168853A publication Critical patent/JPH06168853A/en
Application granted granted Critical
Publication of JP3320467B2 publication Critical patent/JP3320467B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Metal Rolling (AREA)

Abstract

PURPOSE:To enhance etching aptitude of Al material for the electrode of electrolytic capacitor by specifying purity of basic material, i.e., Al foil, thickness of oxide formed on the surface, and area rate of crystal texture of Al foil. CONSTITUTION:A rolled Al foil is heated in preheat steep prior to cleaning step quickly at a rate of 50 to 0.2 deg.C/min upto a temperature of 150 to 400 deg.C which is sustained for 10min to 24 hours thus relaxing distorsion of crystal texture sufficiently. When oxide is formed in a short time by raising ambient temperature abruptly in oxidizing step following to cleaning step, crystal face conditioning effect is exhibited in high temperature heating step thus providing a high (100) area rate. This Al material for electrolytic capacitor has purity of 99.99% or above and the thickness of oxide is set in the range of 30 to 70Angstrom .

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電解コンデンサ電極用
アルミニウム材料およびその製造方法に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an aluminum material for electrolytic capacitor electrodes and a method for producing the same.

【0002】[0002]

【従来の技術】アルミニウム電解コンデンサ用電極材と
して一般に用いられるアルミニウム箔には、その実効面
積を拡大して単位面積当りの静電容量を増大するため、
一般に電気化学的あるいは化学的エッチング処理が施さ
れる。しかし、箔を単にエッチング処理するのみでは十
分な静電容量を得られないため、エッチング適性を高め
るために種々の処理が施される。
2. Description of the Related Art Aluminum foil, which is generally used as an electrode material for aluminum electrolytic capacitors, has a large effective area to increase the capacitance per unit area.
Generally, electrochemical or chemical etching treatment is performed. However, since sufficient capacitance cannot be obtained by simply etching the foil, various treatments are performed to enhance the etching suitability.

【0003】エッチング適性を高める方法の一例とし
て、アルミニウム箔の表面に付着した油分、圧延で形成
された不均質な酸化膜、圧延変質層等を洗浄除去した
後、アルミニウム箔の新たな表面にエッチング核を均一
に有する酸化皮膜を形成させるために酸化処理し、さら
にアルミニウム箔の(100)結晶方位を整えることを
主目的として高温加熱する方法がある。このような方法
において、アルミニウム箔の長さ方向はもとより幅方向
に均一な酸化皮膜を形成するために、前記酸化処理を、
コイル状のアルミニウム箔を巻き解きながら連続的に行
う場合がある。この場合、短時間で所定厚さの酸化皮膜
を形成させて処理時間を短縮するため、通常、昇温速度
を高めて速やかに所定の高温度にまで上昇させている。
As an example of a method for enhancing the etching suitability, after removing the oil content adhering to the surface of the aluminum foil, the heterogeneous oxide film formed by rolling, the altered layer of rolling, etc. by cleaning, the new surface of the aluminum foil is etched. There is a method in which oxidation treatment is performed to form an oxide film having uniform nuclei, and high temperature heating is performed mainly for the purpose of adjusting the (100) crystal orientation of the aluminum foil. In such a method, in order to form a uniform oxide film in the width direction as well as the length direction of the aluminum foil, the oxidation treatment is performed.
It may be continuously performed while unwinding the coiled aluminum foil. In this case, in order to form an oxide film having a predetermined thickness in a short time to shorten the processing time, the temperature rising rate is usually increased to quickly raise the temperature to a predetermined high temperature.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、前記方
法で連続酸化処理された電解コンデンサ電極用アルミニ
ウム材料は、酸化皮膜が所定厚さに形成されているにも
拘らず、必ずしもエッチング適性の良いものが得られな
い場合があり、エッチング処理後の拡面率、さらには静
電容量も満足できない場合があった。
However, the aluminum material for electrolytic capacitor electrodes, which has been continuously oxidized by the above-mentioned method, is not always suitable for etching despite the fact that the oxide film has a predetermined thickness. In some cases, it could not be obtained, and in some cases, the surface area ratio after the etching treatment, and further, the capacitance could not be satisfied.

【0005】本発明はこのような問題点を解決すること
を目的として、エッチング適性に優れた電解コンデンサ
電極用アルミニウム材料および、そのようなアルミニウ
ム材料を短時間で効率良く製造できる電解コンデンサ電
極用アルミニウム材料の製造方法を提供しようとするも
のである。
In order to solve the above problems, the present invention has an aluminum material for an electrolytic capacitor electrode excellent in etching suitability and an aluminum material for an electrolytic capacitor electrode which can efficiently produce such an aluminum material in a short time. It is intended to provide a method for manufacturing a material.

【0006】[0006]

【課題を解決するための手段】発明者らは、酸化処理に
おける温度条件と高温加熱工程後のアルミニウム箔の結
晶方位との関係に着目し、このような観点から研究を重
ねた。その結果、箔圧延によって生じた結晶構造の歪み
が酸化処理における急激な温度上昇によって緩和されな
いままに高温加熱工程に持ち越されるために、高温加熱
処理によっても結晶方位が十分に(100)方位に整え
られていないことを解明し、この(100)面積率の低
下がエッチング適性を向上を妨げているという結論に達
した。したがって、本発明の電解コンデンサ電極用アル
ミニウム材料は、純度99.99%以上のアルミニウム
箔の表面に厚さ30〜70オングストロームの酸化皮膜
が形成されているとともに、該アルミニウム箔の結晶組
織の(100)面積率が90%以上であることを特徴と
するものである。
The inventors have paid attention to the relationship between the temperature condition in the oxidation treatment and the crystal orientation of the aluminum foil after the high temperature heating step, and conducted research from such a viewpoint. As a result, the distortion of the crystal structure caused by the foil rolling is carried over to the high temperature heating step without being relaxed by the rapid temperature rise in the oxidation treatment, and therefore the crystal orientation is sufficiently adjusted to the (100) orientation by the high temperature heating treatment. It was clarified that this was not achieved, and it was concluded that this decrease in the (100) area ratio hinders improvement in etching suitability. Therefore, in the aluminum material for electrolytic capacitor electrodes of the present invention, an oxide film having a thickness of 30 to 70 angstroms is formed on the surface of an aluminum foil having a purity of 99.99% or more, and the (100) crystal structure of the aluminum foil is formed. ) The area ratio is 90% or more.

【0007】前記電解コンデンサ電極用アルミニウム材
料において、基材となるアルミニウム箔の純度を99.
99%以上としたのは、不純物の多いアルミニウム箔で
は(100)面積率の高い電極材料を製作するのが困難
であるためである。
In the aluminum material for electrolytic capacitor electrodes, the purity of the aluminum foil as the base material is 99.
The reason why it is 99% or more is that it is difficult to manufacture an electrode material having a high (100) area ratio with an aluminum foil containing a large amount of impurities.

【0008】前記酸化皮膜はエッチング処理時のエッチ
ングピットとなるエッチング核を多数有し、エッチング
適性を向上させる作用がある。このような酸化皮膜の厚
さを30〜70オングストロームに規定するのは、30
オングストローム未満ではエッチング核の生成数が不足
するために優れたエッチング適性が得られず、また70
オングストロームを超えると一旦生成されたエッチング
核が消去される危険があり、やはり優れたエッチング適
性が得られないからである。好ましくは、35〜50オ
ングストロームである。また、アルミニウム箔の結晶方
位はエッチングピットの形成方向と深さに関係し、(1
00)面積率を90%以上に規定したのは、90%未満
では箔の面と直交方向に形成されるエッチングピットの
深さが不十分で拡面率の向上が望めないからである。好
ましい(100)面積率は95%以上である。
The oxide film has a large number of etching nuclei which become etching pits during the etching process, and has an action of improving etching suitability. The thickness of such an oxide film is regulated to 30 to 70 Å by 30
If it is less than angstrom, the etching aptitude is not excellent because the number of etching nuclei is insufficient.
This is because if the thickness exceeds Å, there is a risk that the etching nuclei once generated are erased, and excellent etching suitability cannot be obtained. It is preferably 35 to 50 angstroms. Further, the crystal orientation of the aluminum foil is related to the formation direction and depth of the etching pit,
(00) The area ratio is defined to be 90% or more because if it is less than 90%, the depth of the etching pits formed in the direction orthogonal to the surface of the foil is insufficient and the expansion ratio cannot be expected to be improved. A preferable (100) area ratio is 95% or more.

【0009】また、このような特徴を有する電解コンデ
ンサ電極用アルミニウム材料は、箔圧延工程後に、純度
99.99%以上のアルミニウム箔を150〜400℃
になるまで50〜0.2℃/分で昇温するとともに、昇
温完了後該温度に10分〜24時間保持する前熱処理工
程を行い、次いで、該アルミニウム箔の表面層を除去す
る洗浄工程、加熱によりそのアルミニウム箔の新たな表
面に厚さ10〜60オングストロームの酸化皮膜を形成
させる酸化工程、さらに前記酸化皮膜の合計厚さが30
〜70オングストロームとなる範囲でそのアルミニウム
箔を高温で加熱する高温加熱工程を順次に行うことによ
って製造され得る。
In addition, the aluminum material for electrolytic capacitor electrodes having the above-mentioned characteristics is obtained by subjecting an aluminum foil having a purity of 99.99% or more to 150 to 400 ° C. after the foil rolling step.
And a heating step at a temperature of 50 to 0.2 ° C./min, and a pre-heat treatment step of holding the temperature for 10 minutes to 24 hours after completion of the heating, and then removing the surface layer of the aluminum foil. An oxidation step of forming an oxide film having a thickness of 10 to 60 angstrom on the new surface of the aluminum foil by heating, and the total thickness of the oxide film is 30.
It can be manufactured by sequentially performing a high temperature heating step of heating the aluminum foil at a high temperature in the range of about 70 Å.

【0010】前記電解コンデンサ電極用アルミニウム材
料の製造方法において、前熱処理工程は、前工程の箔圧
延により生じたアルミニウム箔の結晶組織の歪みを解消
することを目的として実施され、該アルミニウム箔を緩
やかに昇温し該温度に所定時間保持することにより、前
記歪みによって生じた内部応力を緩和して歪みを解消さ
せる。本工程においては、昇温速度が50℃/分を超え
て速くなると十分に歪みを解消することができず、(1
00)面積率が低下する。また、0.2℃/分未満の遅
い速度では所定温度まで上昇させるのに時間がかかり過
ぎて生産効率が低下する。また、保持温度が150℃未
満であれば歪み解消能力が不足し、400℃を超えると
歪み解消能力が飽和するため無益である。また、所定温
度での保持時間は、10分未満では歪みが十分解消され
ず、また24時間を超えて歪み解消能力が飽和して無益
である。したがって、本工程における昇温速度は50〜
0.2℃/分、保持温度は150〜400℃、保持時間
は10分〜24時間に規定される。特に好ましいこれら
の前熱処理条件は、それぞれ昇温速度は4〜0.3℃/
分、保持温度は250〜350℃、保持時間は2〜10
時間である。なお、前記保持温度は、最終的に(10
0)面積率を高くするために、後の工程で行う酸化工程
における温度よりも高いことが望ましい。また、前熱処
理を保持温度と保持時間を変えた2段階あるいはそれ以
上の複数段階に分けて行っても良い。この場合、保持時
間の合計を上記範囲となす必要がある。
In the method for producing an aluminum material for an electrolytic capacitor electrode, the pre-heat treatment step is carried out for the purpose of eliminating the distortion of the crystal structure of the aluminum foil caused by the foil rolling in the previous step. By raising the temperature to and holding the temperature for a predetermined time, the internal stress caused by the strain is relaxed and the strain is eliminated. In this step, if the rate of temperature rise exceeds 50 ° C./min, the strain cannot be sufficiently eliminated, and (1
00) Area ratio decreases. Further, at a slow rate of less than 0.2 ° C./minute, it takes too much time to raise the temperature to a predetermined temperature, and the production efficiency decreases. Further, if the holding temperature is lower than 150 ° C, the strain resolving ability is insufficient, and if it exceeds 400 ° C, the strain resolving ability is saturated, which is useless. Further, if the holding time at the predetermined temperature is less than 10 minutes, the strain is not sufficiently eliminated, and if it exceeds 24 hours, the strain eliminating ability is saturated, which is useless. Therefore, the temperature rising rate in this step is 50-
0.2 ° C./minute, the holding temperature is 150 to 400 ° C., and the holding time is 10 minutes to 24 hours. Particularly preferable pre-heat treatment conditions are that the temperature rising rate is 4 to 0.3 ° C. /
Min, holding temperature is 250 to 350 ° C, holding time is 2 to 10
It's time. The holding temperature is finally set to (10
0) In order to increase the area ratio, it is desirable that the temperature is higher than the temperature in the oxidation step performed in the subsequent step. In addition, the pre-heat treatment may be performed in two or more stages with different holding temperatures and holding times. In this case, the total holding time needs to be within the above range.

【0011】前記前熱処理工程に次いで行われる洗浄工
程は、アルミニウム箔表面の不均質層を除去することを
目的として実施される工程である。即ち、箔圧延後のア
ルミニウム箔表面には、油分、圧延で形成された不均質
な酸化膜が存在したり、またアルミニウム箔表面近傍に
は圧延変質層や圧延時のロールコーティング等による汚
染層が不均一に存在し、これらが酸化皮膜の不均一性を
もたらす原因となる。したがって、均一な酸化皮膜の形
成を促進すべく、前記不均質層の除去を行うものであ
る。しかし、必ずしもアルミニウム箔の表面を所定深さ
に除去しなければならないものではなく、脱脂レベル換
言すれば純水の接触角が30°以下程度のレベル(純粋
スプレーOKレベル)に油を除去するものであっても良
い。もちろん、不均一層を完全に除去した方が望ましい
が、この場合は、除去厚さを5オングストローム以上に
亘って行うのが良く、特に好ましくは40オングストロ
ーム以上とするのが良い。上限は特にないが500オン
グストローム程度で表面層除去の効果が飽和するため、
それを超える除去は無益である。このような表面層除去
処理の具体的手段は特に限定するものではない。所定深
さに亘って除去する場合には、アルカリエッチング、酸
エッチング等の湿式法によっても良いし、またエキシマ
レーザー(KrF、ArF、XeCl)等のレーザー加
工、電子ビーム加工、イオンビーム加工、反応性ガスエ
ッチング、プラズマエッチング等の乾式法によっても良
い。
The cleaning step performed after the pre-heat treatment step is a step performed for the purpose of removing the heterogeneous layer on the surface of the aluminum foil. That is, on the aluminum foil surface after foil rolling, oil content, a heterogeneous oxide film formed by rolling is present, and in the vicinity of the aluminum foil surface, a deterioration layer due to rolling or a contamination layer due to roll coating during rolling is present. They exist non-uniformly, and these cause the non-uniformity of the oxide film. Therefore, the heterogeneous layer is removed to promote the formation of a uniform oxide film. However, it is not always necessary to remove the surface of the aluminum foil to a predetermined depth, and the degreasing level, in other words, to remove oil to a level where the contact angle of pure water is 30 ° or less (pure spray OK level). May be Of course, it is desirable to completely remove the non-uniform layer, but in this case, the removal thickness is preferably 5 angstroms or more, and particularly preferably 40 angstroms or more. There is no upper limit, but at about 500 Å, the effect of removing the surface layer is saturated,
Further removal is useless. The specific means for such surface layer removal treatment is not particularly limited. When removing over a predetermined depth, a wet method such as alkali etching or acid etching may be used, or laser processing such as excimer laser (KrF, ArF, XeCl), electron beam processing, ion beam processing, reaction Alternatively, a dry method such as reactive gas etching or plasma etching may be used.

【0012】前記洗浄工程に次いで行われる酸化工程
は、アルミニウム箔の新たな表面に、所定厚さで、エッ
チング核を均一に有する酸化皮膜を形成させることを目
的として実施される工程である。酸化皮膜形成方法は特
に限定されるものではないが、酸化雰囲気下でコイル状
のアルミニウム箔を巻き解きながら連続的に雰囲気加熱
するのが良い。この場合、酸化雰囲気の温度を30〜4
00℃まで1000〜50℃/分の速度で急激に上昇さ
せ、0.5〜60分間そのままの温度で加熱することに
より、厚さ10〜60オングストロームの酸化皮膜を形
成できる。
The oxidation step, which is carried out after the cleaning step, is carried out for the purpose of forming an oxide film having a predetermined thickness and having uniform etching nuclei on a new surface of the aluminum foil. The method for forming the oxide film is not particularly limited, but it is preferable to continuously heat the atmosphere while unwinding the coiled aluminum foil in an oxidizing atmosphere. In this case, the temperature of the oxidizing atmosphere is 30 to 4
An oxide film having a thickness of 10 to 60 Å can be formed by rapidly increasing the temperature to 00 ° C. at a rate of 1000 to 50 ° C./minute and heating at the same temperature for 0.5 to 60 minutes.

【0013】前記酸化工程に次いで行われる高温加熱工
程は、アルミニウム箔の結晶組織の方位を(100)方
位に整えてエッチング特性を向上させることを主目的と
するものであり、前工程で形成された酸化皮膜の厚さを
この工程で増大させ過ぎてエッチング核を消去させない
ように、酸化皮膜の合計厚さが30〜70オングストロ
ームとなるようにしなければならない。この高温加熱工
程における処理条件は特に限定されるものではないが、
酸化皮膜の厚さを増大させ過ぎないように、水分、酸素
を可及的除去した雰囲気中で加熱するのが望ましい。具
体的には、Arガス等の不活性ガス中あるいは10-3
orr程度以下の真空中で加熱するのが良く、加熱温度
は300〜600℃、加熱時間は10分〜24時間程度
が望ましい。
The high temperature heating step performed after the oxidation step has the main purpose of adjusting the crystal structure of the aluminum foil to the (100) orientation to improve the etching characteristics, and is formed in the previous step. The total thickness of the oxide film should be 30 to 70 angstroms so that the thickness of the oxide film is not excessively increased in this step and the etching nuclei are not erased. The treatment conditions in this high temperature heating step are not particularly limited,
It is desirable to heat in an atmosphere in which water and oxygen are removed as much as possible so as not to increase the thickness of the oxide film too much. Specifically, in an inert gas such as Ar gas or 10 -3 T
It is preferable to heat in a vacuum of about or less, and it is desirable that the heating temperature is 300 to 600 ° C. and the heating time is about 10 minutes to 24 hours.

【0014】[0014]

【作用】箔圧延されたアルミニウム箔は、洗浄工程前の
前熱処理工程において、150〜400℃になるまで5
0〜0.2℃/分の速度で緩やかに昇温するとともに、
昇温完了後該温度に10分〜24時間保持することによ
って、圧延時に生じた結晶構造の歪みが十分に緩和され
る。したがって、この前熱処理がなされたアルミニウム
箔は既に歪みが解消されているため、洗浄工程後の酸化
工程において急激に酸化雰囲気温度を上昇させて短時間
で酸化皮膜を形成させても、高温加熱工程における結晶
面の調整効果が十分に作用し、高い(100)面積率が
得られる。このようにして製造された電解コンデンサ電
極用アルミニウム材料は、(100)面積率が90%以
上となり、基材となるアルミニウム箔の純度が99.9
9%以上と高いことおよび、表面に形成された酸化皮膜
の最終的な厚さが30〜70オングストロームであるこ
とと相俟って、エッチング適性が優れたものとなる。
The foil-rolled aluminum foil is heated to 150 to 400 ° C. in the pre-heat treatment step before the washing step.
While gradually increasing the temperature at a rate of 0 to 0.2 ° C / min,
By holding the temperature for 10 minutes to 24 hours after completion of the temperature rise, the strain of the crystal structure generated during rolling is sufficiently relaxed. Therefore, since the aluminum foil that has been subjected to this pre-heat treatment has already been free from distortion, even if the oxidizing atmosphere temperature is rapidly raised in the oxidation step after the cleaning step to form an oxide film in a short time, the high temperature heating step The effect of adjusting the crystal plane in (3) sufficiently acts, and a high (100) area ratio is obtained. The aluminum material for electrolytic capacitor electrodes manufactured in this manner has a (100) area ratio of 90% or more, and the purity of the aluminum foil as the base material is 99.9.
Combined with the high value of 9% or more and the final thickness of the oxide film formed on the surface of 30 to 70 angstroms, the etching suitability becomes excellent.

【0015】[0015]

【実施例】次に、本発明の電解コンデンサ電極用アルミ
ニウム材料の製造方法の具体的一実施例について説明す
る。
EXAMPLES Next, a specific example of the method for producing the aluminum material for electrolytic capacitor electrodes of the present invention will be described.

【0016】(実施例)先ず、純度99.99%のアル
ミニウムを常法により冷間にて厚さ100μmに箔圧延
し、コイル状に巻き取った。次に、このコイル状のアル
ミニウム箔を、前熱処理として、バッチ式加熱炉内で1
0℃/分の速度で300℃まで緩やかに昇温しそのまま
8時間加熱した。次に、このコイル状のアルミニウム箔
を、30℃の0.1%苛性ソーダ浴に1分間浸漬して表
面層を深さ300オングストロームまで溶解させて除去
する洗浄処理を行った。次に、このコイル状のアルミニ
ウム箔を連続酸化処理炉内で巻き解きながら、200℃
まで1000℃/分の速度で急激に昇温させそのままの
温度で10分間加熱することにより、厚さ25μmの酸
化皮膜を形成させた。さらに、このコイル状のアルミニ
ウム箔を、10-5Torrの真空中で400℃×5時間
の高温加熱を行い、電解コンデンサ電極用アルミニウム
材料とした。なお、前記酸化皮膜は高温加熱処理により
最終的に厚さ35μmとなった。
(Example) First, aluminum having a purity of 99.99% was foil-rolled in a cold manner to a thickness of 100 μm by a conventional method and wound into a coil. Next, this coiled aluminum foil was preheated in a batch type heating furnace for 1 hour.
The temperature was slowly raised to 300 ° C. at a rate of 0 ° C./minute, and heating was continued for 8 hours. Next, this coiled aluminum foil was immersed in a 0.1% caustic soda bath at 30 ° C. for 1 minute to dissolve and remove the surface layer to a depth of 300 Å. Next, while unwinding this coiled aluminum foil in a continuous oxidation treatment furnace,
By rapidly raising the temperature up to 1000 ° C./min for 10 minutes, the oxide film having a thickness of 25 μm was formed. Further, this coiled aluminum foil was heated at a high temperature of 400 ° C. for 5 hours in a vacuum of 10 −5 Torr to obtain an aluminum material for electrolytic capacitor electrodes. The oxide film finally had a thickness of 35 μm by the high temperature heat treatment.

【0017】(比較例)前熱処理を行わなかった以外は
前記実施例と同じ方法により、箔圧延、洗浄、連続酸
化、高温加熱の各処理を行った。その結果、得られた電
解コンデンサ電極用アルミニウム材料の酸化皮膜は、連
続酸化処理後、高温加熱処理後ともに実施例と同程度の
厚さであった。
(Comparative Example) Each of foil rolling, washing, continuous oxidation, and high temperature heating was carried out in the same manner as in the above-mentioned example except that the pre-heat treatment was not carried out. As a result, the obtained oxide film of the aluminum material for electrolytic capacitor electrodes had the same thickness as that of the example both after the continuous oxidation treatment and after the high temperature heat treatment.

【0018】次いで、前述の方法により製作した実施例
および比較例の電解コンデンサ電極用アルミニウム材料
の(100)面積率を調べたところ、表1に示すとおり
であった。さらに、これらの電解コンデンサ電極用アル
ミニウム材料を、3%塩酸(85℃)中で電流密度を直
流10A/dm2 とし、3分間電解エッチング処理した
のち、さらに同じ液で10分間化学エッチング処理し
た。そして、その後5%硼酸浴中で350Vに化成処理
したのち、各材料の静電容量を測定した。その結果を、
比較例の静電容量を100とした相対比較にて併せて表
1に示す。
Then, the (100) area ratios of the aluminum materials for electrolytic capacitor electrodes of Examples and Comparative Examples manufactured by the above-mentioned method were examined and the results are shown in Table 1. Further, these aluminum materials for electrolytic capacitor electrodes were subjected to electrolytic etching treatment in 3% hydrochloric acid (85 ° C.) with a current density of 10 A / dm 2 for 3 minutes, and then chemically etched with the same solution for 10 minutes. Then, after performing chemical conversion treatment at 350 V in a 5% boric acid bath, the capacitance of each material was measured. The result is
The results are shown in Table 1 by relative comparison with the electrostatic capacity of the comparative example being 100.

【0019】[0019]

【表1】 表1の結果から明らかなように、酸化工程における急激
な加熱以前に、アルミニウム箔を前熱処理において緩や
かに加熱することにより、高温加熱工程を経て製作され
る電解コンデンサ電極用アルミニウム材料の(100)
面積率の低下を防ぐことができ、優れたエッチング適性
を付与することができる。その結果、短時間で所定厚さ
の酸化皮膜を形成するために、酸化工程における処理温
度を高い温度まで急激に上昇させても高い静電容量を維
持できることがわかった。
[Table 1] As is clear from the results shown in Table 1, the aluminum foil for electrolytic capacitor electrodes (100) manufactured through the high temperature heating step is manufactured by gently heating the aluminum foil in the preheat treatment before the rapid heating in the oxidation step.
It is possible to prevent a decrease in the area ratio and to impart excellent etching suitability. As a result, it was found that a high capacitance can be maintained even if the treatment temperature in the oxidation step is rapidly increased to a high temperature in order to form an oxide film having a predetermined thickness in a short time.

【0020】[0020]

【発明の効果】以上のように、本発明の方法によれば、
箔圧延されたアルミニウム箔を洗浄および酸化皮膜形成
処理を行う前に、150〜400℃になるまで50〜
0.2℃/分の速度で緩やかに昇温するとともに、昇温
完了後該温度に10分〜24時間保持する前熱処理工程
を行うことにより、圧延時に生じた結晶構造の歪みを解
消できる。その結果、この前熱処理がなされたアルミニ
ウム箔は既に歪みが解消されているため、洗浄工程後の
酸化工程において急激に酸化雰囲気温度を上昇させて短
時間で酸化皮膜を形成させても、高温加熱工程を経て
(100)面積率の低下が起こらない。また、このよう
にして製造された本発明の電解コンデンサ電極用アルミ
ニウム材料は、(100)面積率が90%以上となり、
基材となるアルミニウム箔の純度が99.99%以上と
高いことおよび、表面に形成された最終的な酸化皮膜の
厚さが30〜70オングストロームであることも相俟っ
て、エッチング適性が優れたものとなる。したがって、
本発明によれば、エッチング適性に優れ、ひいては静電
容量の大きい電解コンデンサ電極用アルミニウム材料
を、効率良く製造できる。
As described above, according to the method of the present invention,
Before cleaning the foil-rolled aluminum foil and performing the oxide film formation treatment, the temperature should be 50 to 50 ° C until the temperature reaches 150 to 400 ° C.
By performing the pre-heat treatment step of gradually increasing the temperature at a rate of 0.2 ° C./minute and maintaining the temperature for 10 minutes to 24 hours after the completion of the temperature increase, the distortion of the crystal structure generated during rolling can be eliminated. As a result, since the aluminum foil that has been subjected to this pre-heat treatment has already been distorted, even if the oxidation atmosphere temperature is rapidly raised in the oxidation step after the cleaning step to form an oxide film in a short time, high-temperature heating is performed. The (100) area ratio does not decrease through the process. Further, the aluminum material for electrolytic capacitor electrodes of the present invention produced in this manner has a (100) area ratio of 90% or more,
Combined with the fact that the purity of the aluminum foil as the base material is as high as 99.99% or more, and the thickness of the final oxide film formed on the surface is 30 to 70 angstroms, the etching suitability is excellent. It becomes a thing. Therefore,
ADVANTAGE OF THE INVENTION According to this invention, the aluminum material for electrolytic capacitor electrodes which is excellent in etching suitability and has large electrostatic capacitance can be manufactured efficiently.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 礒山 永三 大阪府堺市海山町6丁224番地 昭和アル ミニウム株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Eizo Isoyama 6-224 Kaiyamacho, Sakai City, Osaka Prefecture Showa Aluminum Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 純度99.99%以上のアルミニウム箔
の表面に厚さ30〜70オングストロームの酸化皮膜が
形成されているとともに、該アルミニウム箔の結晶組織
の(100)面積率が90%以上であることを特徴とす
る電解コンデンサ電極用アルミニウム材料。
1. An aluminum foil having a purity of 99.99% or more has an oxide film with a thickness of 30 to 70 angstroms formed thereon, and the (100) area ratio of the crystal structure of the aluminum foil is 90% or more. An aluminum material for electrolytic capacitor electrodes, which is characterized by being present.
【請求項2】 箔圧延工程後に、純度99.99%以上
のアルミニウム箔を150〜400℃になるまで50〜
0.2℃/分で昇温するとともに、昇温完了後該温度に
10分〜24時間保持する前熱処理工程を行い、次い
で、該アルミニウム箔の表面層を除去する洗浄工程、加
熱によりそのアルミニウム箔の新たな表面に厚さ10〜
60オングストロームの酸化皮膜を形成させる酸化工
程、さらに前記酸化皮膜の合計厚さが30〜70オング
ストロームとなる範囲でそのアルミニウム箔を高温で加
熱する高温加熱工程を順次に行うことを特徴とする電解
コンデンサ電極用アルミニウム材料の製造方法。
2. After the foil rolling step, aluminum foil having a purity of 99.99% or more is heated to 150 to 400 ° C. for 50 to 400 ° C.
A pre-heat treatment step of increasing the temperature at 0.2 ° C./minute and holding the temperature at the temperature for 10 minutes to 24 hours after completion of the temperature increase is performed, and then a cleaning step of removing the surface layer of the aluminum foil, and heating the aluminum. 10-thick on the new surface of the foil
An electrolytic capacitor characterized by sequentially performing an oxidation step of forming an oxide film of 60 angstrom and a high temperature heating step of heating the aluminum foil at a high temperature within a range of the total thickness of the oxide film of 30 to 70 angstroms. Manufacturing method of aluminum material for electrodes.
JP31985292A 1992-11-30 1992-11-30 Aluminum material for electrolytic capacitor electrode and method for producing the same Expired - Lifetime JP3320467B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31985292A JP3320467B2 (en) 1992-11-30 1992-11-30 Aluminum material for electrolytic capacitor electrode and method for producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31985292A JP3320467B2 (en) 1992-11-30 1992-11-30 Aluminum material for electrolytic capacitor electrode and method for producing the same

Publications (2)

Publication Number Publication Date
JPH06168853A true JPH06168853A (en) 1994-06-14
JP3320467B2 JP3320467B2 (en) 2002-09-03

Family

ID=18114951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31985292A Expired - Lifetime JP3320467B2 (en) 1992-11-30 1992-11-30 Aluminum material for electrolytic capacitor electrode and method for producing the same

Country Status (1)

Country Link
JP (1) JP3320467B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008166602A (en) * 2006-12-28 2008-07-17 Sachiko Ono Aluminum material for electrolytic capacitor electrode, its manufacturing method, electrode material for aluminum electrolytic capacitor and aluminum electrolytic capacitor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008166602A (en) * 2006-12-28 2008-07-17 Sachiko Ono Aluminum material for electrolytic capacitor electrode, its manufacturing method, electrode material for aluminum electrolytic capacitor and aluminum electrolytic capacitor

Also Published As

Publication number Publication date
JP3320467B2 (en) 2002-09-03

Similar Documents

Publication Publication Date Title
JP3320467B2 (en) Aluminum material for electrolytic capacitor electrode and method for producing the same
JPH1081945A (en) Aluminum foil for electrolytic capacitor electrode and its production
JP3002233B2 (en) Method for producing aluminum foil for electrolytic capacitor electrode
JPH03122260A (en) Production of alumnum material for electrolytic capacitor electrode
JP3186160B2 (en) Manufacturing method of aluminum foil for electrolytic capacitor
JP3337506B2 (en) Method for producing aluminum material for electrolytic capacitor electrode
JPH07180006A (en) Production of aluminum foil for electrolytic capacitor electrode
JP2735970B2 (en) Manufacturing method of aluminum foil for electrolytic capacitor
JPH07201673A (en) Manufacture of aluminum material for electrolytic capacitor electrode
JP4732892B2 (en) Method for producing aluminum material for electrolytic capacitor electrode, aluminum material for electrolytic capacitor electrode, anode material for aluminum electrolytic capacitor, and aluminum electrolytic capacitor
JP4874596B2 (en) Method for manufacturing aluminum material for electrolytic capacitor electrode, aluminum material for electrolytic capacitor electrode, method for manufacturing electrode material for electrolytic capacitor, anode material for aluminum electrolytic capacitor, and aluminum electrolytic capacitor
JP2005015916A (en) Method of producing aluminum material for electrolytic capacitor electrode, aluminum material for electrolytic capacitor electrode, method of producing electrode material for electrolytic capacitor and aluminum electrolytic capacitor
JP3685820B2 (en) Aluminum foil for electrolytic capacitors
JP2000228333A (en) Manufacture of aluminum foil for electrolytic capacitor electrode
JP3352798B2 (en) Aluminum electrolytic capacitor anode foil
JP3450083B2 (en) Aluminum foil for electrode of electrolytic capacitor and method for producing the same
JP2000144352A (en) Production of aluminum foil for electrode of electrolytic capacitor
JP2635357B2 (en) Manufacturing method of aluminum material for electrolytic capacitor
JP2000204456A (en) Production of aluminum foil for electrolytic capacitor electrode
JP4308556B2 (en) Aluminum material for electrolytic capacitor electrode, method for producing electrolytic capacitor electrode material, and electrolytic capacitor
JP4629312B2 (en) Method for producing aluminum material for electrolytic capacitor electrode and method for producing electrode material for electrolytic capacitor
JP3297840B2 (en) Aluminum foil for electrode of electrolytic capacitor
JP4874600B2 (en) Method for manufacturing aluminum material for electrolytic capacitor electrode, aluminum material for electrolytic capacitor electrode, method for manufacturing electrode material for electrolytic capacitor, anode material for aluminum electrolytic capacitor, and aluminum electrolytic capacitor
JPH10152763A (en) Production of aluminum foil coil for electrolytic capacitor
JPH0788557B2 (en) Method for manufacturing aluminum foil for electrolytic capacitor electrode

Legal Events

Date Code Title Description
FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080621

Year of fee payment: 6

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110621

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110621

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120621

Year of fee payment: 10

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 10

Free format text: PAYMENT UNTIL: 20120621

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130621

Year of fee payment: 11

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130621

Year of fee payment: 11