JPH0615392Y2 - 高周波誘導結合プラズマ質量分析計 - Google Patents
高周波誘導結合プラズマ質量分析計Info
- Publication number
- JPH0615392Y2 JPH0615392Y2 JP11797787U JP11797787U JPH0615392Y2 JP H0615392 Y2 JPH0615392 Y2 JP H0615392Y2 JP 11797787 U JP11797787 U JP 11797787U JP 11797787 U JP11797787 U JP 11797787U JP H0615392 Y2 JPH0615392 Y2 JP H0615392Y2
- Authority
- JP
- Japan
- Prior art keywords
- inductively coupled
- high frequency
- coupled plasma
- frequency inductively
- argon gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009616 inductively coupled plasma Methods 0.000 title claims description 16
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 64
- 239000007789 gas Substances 0.000 claims description 33
- 229910052786 argon Inorganic materials 0.000 claims description 32
- 239000012530 fluid Substances 0.000 claims description 13
- 150000002500 ions Chemical class 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000006698 induction Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000002354 inductively-coupled plasma atomic emission spectroscopy Methods 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000006199 nebulizer Substances 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11797787U JPH0615392Y2 (ja) | 1987-07-31 | 1987-07-31 | 高周波誘導結合プラズマ質量分析計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11797787U JPH0615392Y2 (ja) | 1987-07-31 | 1987-07-31 | 高周波誘導結合プラズマ質量分析計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6423867U JPS6423867U (enrdf_load_stackoverflow) | 1989-02-08 |
| JPH0615392Y2 true JPH0615392Y2 (ja) | 1994-04-20 |
Family
ID=31361922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11797787U Expired - Lifetime JPH0615392Y2 (ja) | 1987-07-31 | 1987-07-31 | 高周波誘導結合プラズマ質量分析計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0615392Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-07-31 JP JP11797787U patent/JPH0615392Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6423867U (enrdf_load_stackoverflow) | 1989-02-08 |
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