JPH0615391Y2 - 荷電粒子減速管 - Google Patents
荷電粒子減速管Info
- Publication number
- JPH0615391Y2 JPH0615391Y2 JP10748787U JP10748787U JPH0615391Y2 JP H0615391 Y2 JPH0615391 Y2 JP H0615391Y2 JP 10748787 U JP10748787 U JP 10748787U JP 10748787 U JP10748787 U JP 10748787U JP H0615391 Y2 JPH0615391 Y2 JP H0615391Y2
- Authority
- JP
- Japan
- Prior art keywords
- proton
- electrode
- energy
- electrodes
- divergence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 title claims description 8
- 238000005211 surface analysis Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 16
- 230000001133 acceleration Effects 0.000 description 15
- 239000003638 chemical reducing agent Substances 0.000 description 15
- 230000000694 effects Effects 0.000 description 10
- 150000002500 ions Chemical class 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 240000008042 Zea mays Species 0.000 description 3
- 235000005824 Zea mays ssp. parviglumis Nutrition 0.000 description 3
- 235000002017 Zea mays subsp mays Nutrition 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 235000005822 corn Nutrition 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000005381 potential energy Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000009194 climbing Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000005685 electric field effect Effects 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000003389 potentiating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10748787U JPH0615391Y2 (ja) | 1987-07-13 | 1987-07-13 | 荷電粒子減速管 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10748787U JPH0615391Y2 (ja) | 1987-07-13 | 1987-07-13 | 荷電粒子減速管 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6412369U JPS6412369U (enrdf_load_stackoverflow) | 1989-01-23 |
| JPH0615391Y2 true JPH0615391Y2 (ja) | 1994-04-20 |
Family
ID=31341946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10748787U Expired - Lifetime JPH0615391Y2 (ja) | 1987-07-13 | 1987-07-13 | 荷電粒子減速管 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0615391Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2615300B2 (ja) * | 1992-02-24 | 1997-05-28 | 株式会社東京精密 | 加速管 |
| JP2945952B2 (ja) * | 1995-03-06 | 1999-09-06 | 科学技術庁金属材料技術研究所長 | 減速集束イオンビーム堆積装置 |
-
1987
- 1987-07-13 JP JP10748787U patent/JPH0615391Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6412369U (enrdf_load_stackoverflow) | 1989-01-23 |
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