JPH0614477Y2 - ダミーウェハ - Google Patents
ダミーウェハInfo
- Publication number
- JPH0614477Y2 JPH0614477Y2 JP1988060788U JP6078888U JPH0614477Y2 JP H0614477 Y2 JPH0614477 Y2 JP H0614477Y2 JP 1988060788 U JP1988060788 U JP 1988060788U JP 6078888 U JP6078888 U JP 6078888U JP H0614477 Y2 JPH0614477 Y2 JP H0614477Y2
- Authority
- JP
- Japan
- Prior art keywords
- dummy wafer
- susceptor
- shape
- wafer
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988060788U JPH0614477Y2 (ja) | 1988-05-09 | 1988-05-09 | ダミーウェハ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988060788U JPH0614477Y2 (ja) | 1988-05-09 | 1988-05-09 | ダミーウェハ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01163331U JPH01163331U (US20020051482A1-20020502-M00012.png) | 1989-11-14 |
JPH0614477Y2 true JPH0614477Y2 (ja) | 1994-04-13 |
Family
ID=31286485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988060788U Expired - Lifetime JPH0614477Y2 (ja) | 1988-05-09 | 1988-05-09 | ダミーウェハ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0614477Y2 (US20020051482A1-20020502-M00012.png) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60117736A (ja) * | 1983-11-30 | 1985-06-25 | Nec Corp | ベ−パ−エッチング方法 |
-
1988
- 1988-05-09 JP JP1988060788U patent/JPH0614477Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01163331U (US20020051482A1-20020502-M00012.png) | 1989-11-14 |
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