JPH06140497A - Pickup device - Google Patents

Abstract

PURPOSE:To obtain a pickup device which can automatically detect the abnormality of needles, such as the breakage, etc., by proving needle shape inspecting devices which inspect the needles for shape. CONSTITUTION:In this pickup device 10 provided with a table 11 which holds an adhesive sheet 3 to which numerous pieces of small articles 2 are stuck and needles 13 which release the articles 2 from the sheet 3 by pushing the articles 2 from the rear side of the sheet 3, needle shape inspecting devices 16 and 17 which inspects the needles 13 for shape are provided. For example, reflection type photosensors 16 are provided on the upper-side with retreating position of a needle unit 12 as front shape inspecting devices for inspecting the front ends of the needles 13 for their shapes. In addition, sensors 17 respectively composed of a plurality of reflection type photosensors 18 are also provided as whole shape inspecting devices for inspecting almost whole bodies of the needles 13 protruded from the needle unit 12 for their shapes and states.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pickup device, and more particularly to a technique for picking up a large number of small articles stuck to a sticking sheet from the sticking sheet. For example, dicing in a semiconductor device manufacturing process. The present invention relates to a technique which is effectively used for picking up a semiconductor pellet (hereinafter, simply referred to as a pellet) produced from an adhesive sheet.

[0002]

2. Description of the Related Art In a semiconductor device manufacturing process, a pick-up device for picking up diced pellets from a sticking sheet is one in which one or a plurality of needles, such as tungsten needles, are attached to the sticking sheet. By pushing up from above, the pellets are peeled off from the adhesive sheet, and the pellets pushed up by the needles are vacuum sucked and held from above by the conveying collet arranged above the needles.

Incidentally, as an example in which a technique for picking up pellets from a sticking sheet is described, "Realize Co., Ltd., published on September 5, 1986," Latest Technology Collection of Ultra LSI Factory (Vol. 2, Latest Process and Automation) " Pp.252-
Page 254 and "Electronic Materials", published by the Industrial Research Institute, Inc. 1
There are pages 94 to 98 of the October 990 separate volume (VLSI manufacturing / testing equipment guidebook).

[0004]

In the above pickup device, when the needle pierces the adhesive sheet and pushes up the pellet to separate it from the adhesive sheet, if the tip of the needle is damaged or bent, When pushing up the pellets of the
When the back surface of the pellet is tilted and pushed up, collet pellet mis-adhesion may occur. When the pellet suction error of the collet occurs, the pellet bonding device may stop, or in the case of the jig filling device, the pellet storage error or misalignment may occur. Therefore, it is necessary to constantly check the presence or absence of abnormality such as breakage or bending of the needle.

However, the conventional pickup device is not equipped with a device for inspecting the shape of the needle. Therefore, conventionally, an operator visually confirms whether the needle is damaged or bent, and when the needle is damaged, the needle replacement work is performed.

An object of the present invention is to provide a pickup device capable of automatically detecting an abnormality such as breakage of a needle.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0008]

The typical ones of the inventions disclosed in the present application will be outlined below.

That is, a table holding an adhesive sheet on which a large number of small articles are adhered, and the adhesive sheet held on this table are pierced from the back side to separate the small articles from the adhesive sheet. A pickup device provided with a needle is characterized by comprising a needle shape inspection device for inspecting the shape of the needle.

Instead of the device for inspecting the shape of the needle, an adhesive sheet surface inspection device for inspecting the state of the adhesive sheet surface projected by the needle may be provided.

Further, a small article back surface inspection device for inspecting the state of the back surface of the small article detached from the adhesive sheet may be provided.

[0012]

According to the above-mentioned means, it is automatically inspected whether or not the needle has an abnormality such as breakage or bending. Then, as a result of the inspection, if an abnormality such as breakage of the needle is detected, the needle can be quickly replaced. By this replacement work, when pushing up the needle pellets,
It is possible to prevent the back surface of the pellet from being scratched or tilted and pushed up.

[0013]

1 is a front sectional view showing a pickup device according to an embodiment of the present invention, FIG. 2 is an enlarged bottom sectional view taken along the line II--II of FIG. 1, and FIG. FIG. 7 is a front cross-sectional view showing a state in which the needle is protruding from the needle unit and the pellets are peeled off from the adhesive sheet in a state where the unit is raised and the adhesive sheet pressing surface presses the adhesive sheet.

In this embodiment, the pick-up device 10 according to the present invention is configured to pick up one diced pellet from an adhesive sheet in the manufacturing process of a semiconductor device. The pellet-attached sticking sheet (hereinafter, sometimes referred to as a work) 1 as a work in the pickup device 10 is configured as follows.

In a so-called pre-process in the manufacturing process of a semiconductor device, a wafer (not shown) in which a transistor, a diode, a semiconductor integrated circuit device, an optical semiconductor device and the like are formed for each pellet 2 is electrically processed in the wafer inspection process. The product is sorted into non-defective pellets and defective pellets by a static characteristic test or visual inspection. At this time, the defective pellets are marked.

In the sheet sticking step, the sticking sheet 3 is stuck to the back surface of the wafer thus inspected. The adhesive sheet 3 includes a sheet base material 4 which is made of a material having elasticity such as resin and is formed in a thin film shape having a diameter larger than that of a wafer. A suitable adhesive material is applied to the surface to form the adhesive material layer 5.

Subsequently, in the dicing process, the wafer is divided into pellets 2 as small articles. At this time, since the sticking sheet 3 stuck to the back surface of the wafer is not cut by dicing, the pellet 2 group is not separated but is in a group.

Next, in the jig mounting step, the ring 6 is mounted on the outer peripheral portion of the adhesive sheet 3. The ring 6 is made of a rigid material such as stainless steel and is formed in a circular ring shape having a diameter larger than that of the wafer. The adhesive sheet 3 is arranged so as to face the inside of the frame of the ring 6, and then is stretched outward in the radial direction, and its outer peripheral portion is fixed to the ring 6. At this time, the adjacent pellets 2 are separated from each other as the adhesive sheet 3 stretches.

The pick-up device 10 is provided with a table 11 for holding the work 1 on which the ring 6 is mounted. The table 11 is constructed so that the held work 1 can be moved in the XYZθ directions by a driving device (not shown). Has been done.

A needle unit 12 is arranged below the table 11. The needle unit 12 accommodates four needles 13 as detaching means. Further, the upper surface of the needle unit 12 is formed into a convex spherical surface to form the adhesive sheet pressing surface 14. The needles 13 are arranged vertically, and the needles 13 are dispersed in four directions at appropriate intervals so that the pellets 2 can be evenly pierced. It is vertically movably inserted into each of the guide holes 15 formed in.

Each needle 13 is vertically driven in the needle unit 12 by a driving device (not shown), and the needle unit 12 is at its lower limit position.
It is housed inside, but at the upper limit position, it projects upward from the adhesive sheet pressing surface 14. Further, the needle unit 12 is configured to be vertically movable by a drive device (not shown) to a lower limit retracted position and an upper limit position for pushing up the work 1.

At the lowermost retracted position of the needle unit 12, a reflective photosensor 16 as a needle tip shape inspection device for inspecting the shape of the tip of the needle 13 is installed at a lateral position above the needle unit 12. The reflection type photosensor 16 includes a light projecting portion and a light receiving portion, and the light is projected from the light projecting portion to the tip of the needle 13, and the reflected light from the tip of the needle 13 is received by the light receiving portion. It is configured to detect the presence or absence of the tip of 13.

In this embodiment, one needle 13
Corresponding to the above, one reflection type photo sensor 16 is installed. Therefore, four reflective photosensors 16 are installed in total. These reflective photosensors 16 are arranged at a lateral position near the tip of the needle 13 protruding upward from the sticking sheet pressing surface 14 of the needle unit 12, and are connected to an alarm device (not shown). Then, for example, when the tip of the needle 13 is broken, when the reflection type photo sensor 16 does not receive the reflected light from the needle 13, the alarm device is activated to issue an alarm.

Further, at the lowermost retracted position of the needle unit 12, a sensor as an overall shape inspection device for inspecting the substantially entire shape state of the needle 13 protruding from the needle unit 12 is provided at a lateral position above the needle unit 12. (Hereinafter, referred to as a full length inspection sensor.) 17 is installed.
The full length inspection sensor 17 is configured by arranging a plurality of reflection type photosensors 18 having the same structure as the reflection type photosensor 16 in a straight line in the vertical direction.

Although not shown in FIG. 1 hidden by the reflective photosensor 16 for inspecting the abnormality of the tip of the needle 13, the full length inspection sensor 17 for inspecting the entire condition of the protruding portion of the needle 13 is not shown. The reflective photosensors 18 are arranged from the tip of the protruding portion of the needle 13 to the lower end of the protruding portion.

In the present embodiment, one needle 13
Corresponding to the above, one full length inspection sensor 17 is installed. Therefore, four total length inspection sensors 17 are installed in total. These full length inspection sensors 17 are arranged at a lateral position of the needle 13 protruding upward from the sticking sheet pressing surface 14 of the needle unit 12, and are connected to an alarm device (not shown). Then, for example, when the needle 13 is bent or the like, and at least one of the reflection type photosensors 18 of the full length inspection sensor 17 does not receive the reflected light from the needle 13, the alarm device is activated to issue an alarm. Is configured.

On the other hand, just above the needle 13, the collet 1
9 is provided, and this collet 19 has a needle 13
It is configured so that the pellet 2 pushed up by the above can be held by vacuum suction from above. Further, the collet 19 is configured to be moved from a position directly above the needle 13 to a position where the pellets should be transferred by an appropriate moving device (not shown).

Next, the operation will be described. First, before the pickup work is performed, the reflection type photo sensor 16 and the full length inspection sensor 17 as the tip shape inspection device described above.
Thus, the needle 13 is inspected for any abnormality such as breakage or bending. The inspection work will be described below.

Needle unit 1 in the lowermost retracted position
The needle 13 is projected upward from the pressure-sensitive adhesive sheet pressing surface 14 of No. 2, and the tip of the needle 13 is arranged at the height position of the reflective photosensor 16 for inspecting the state of the tip of the needle 13. In this state, light is projected from the reflective photosensor 16 toward the needle 13. When the reflected light of the projected light from the needle 13 is received by the light receiving portion of the reflection type photo sensor 16, the tip of the needle 13 is not bent or bent, so that no alarm is issued.

In the unlikely event that the tip of the needle 13 is bent or bent, the light emitted from the reflective photosensor 16 does not pass through the needle 13 and is not reflected. The reflected light is not received. If no light is received, the alarm device issues an alarm. When the alarm is issued, the needle 13
Since there is an abnormality such as damage at the tip of the needle, the needle 13
Will be replaced with a new needle 13.

In the full length inspection sensor 17 for inspecting the overall condition of the protruding portion of the needle 13, the overall condition of the needle 13 is similarly inspected. That is, from the reflective photosensors 18 of the full length inspection sensor 17 to the needles 13
The reflected light is projected toward each of the reflection type photosensors 1
When 8 receives light, the needle 13 is not bent or broken, so that no alarm is issued.

In the event that the needle 13 has an abnormality such as a bend or a bend, the light emitted from the reflective photosensor 18 at the bent or bent portion of the needle 13 passes through the needle 13. The reflected light is not received because it is not reflected. When even one light is not received, an alarm is issued by the alarm device. When the alarm is issued, the needle 13 has an abnormality such as a bend, so that the needle 13 is replaced with a new needle 13.

As described above, since the two sensors 16 and 17 automatically inspect the tip portion of the needle 13 and the substantially entire state of the protruding portion of the needle 13, when the needle 13 is defective, It can be replaced with a new needle 13. As a result, it is possible to prevent the malfunction of the pellet 2 due to the needle 13 from occurring in the later-described pickup operation of the pellet 2.

When the inspection work for the abnormality of the needle 13 is completed, the needle 13 is moved to the needle unit 1.
It is stored in 2.

When the work 1 on which the ring 6 is mounted is held on the table 11 with the pellet 2 on the upper side and properly aligned, as shown in FIG. 3, the needle 13 is not damaged or damaged. The needle unit 12 that has undergone inspection work such as bending is lifted, and the adhesive sheet pressing surface 14 on the upper surface pushes up the adhesive sheet 3 of the work 1. Since the adhesive sheet pressing surface 14 is formed into a convex spherical surface, the adhesive sheet 3 is curved upward along the convex spherical surface.

Subsequently, the four needles 13 are lifted from the needle unit 12 and project upward from the adhesive sheet pressing surface 14. As a result, the portion of the adhesive sheet 3 that is pierced by the needle 13 is pierced by the needle 13, and the pellets 2 adhered to the pierced upper surface of the adhesive sheet 3 are adhered to the adhesive sheet 3 by the needle 13. Stripped from.

At this time, since the needle 13 has no abnormality such as bending or bending, the pellet 2 can be picked up well and the back surface of the pellet 2 is not damaged. Further, since the adhesive sheet pressing surface 14 is formed into a convex spherical surface, the pellet 2 pushed up by the needle 13 is located at the uppermost position, so that the surrounding pellet 2 group does not rise.

The pellets 2 pushed up by the needles 13 and peeled off from the adhesive sheet 3 as described above.
Is vacuum-sucked and held by the collet 19 that is standing by thereabove, and is handed over to the collet 19 as the needle 13 descends.

The collet 19 which has delivered the pellet 2 is moved from a position directly above the needle 13 to a predetermined position such as a tray or a tab of a lead frame by an appropriate moving device, and the pellet is delivered to the tray or the tab there. . The collet 19 which has delivered the pellet is returned to a position directly above the needle 13 and stands by for the next pick-up operation.

On the other hand, when the needle 13 is lowered and retracted into the needle unit 12, and when the needle unit 12 is lowered, the table 11 is appropriately moved in the XYZ directions, and the pellet 2 to be picked up next time is needled. Directly above 13 is arranged. Then, before the next pick-up operation of the pellet 2, the inspection work for whether or not the needle 13 has an abnormality such as a bend or a bend is performed in advance as described above.

Thereafter, by repeating the above operation, one pellet 2 is picked up from the adhesive sheet 3.

According to the above-mentioned embodiment, the following effects can be obtained. By installing the reflection type photo sensor 16 for inspecting the state of the tip of the needle 13, it is possible to inspect whether the tip of the needle 13 has an abnormality such as a bend or a bend. When it is detected that the tip of the needle 13 has an abnormality such as a bend or a bend, the needle 13 can be replaced with a new needle 13. As a result, when picking up the pellet 2, it is possible to prevent the back surface of the pellet 2 from being scratched by the needle 13 and to prevent the pellet 2 from tilting and pushing up to cause a mistake in pellet adsorption of the collet 19.

By installing the full length inspection sensor 17 for inspecting the substantially entire state of the protruding portion of the needle 13, it is possible to inspect whether the needle 13 has an abnormality such as a bend or a bend. When it is detected that the needle 13 has an abnormality such as a bend or a bend, the needle 13 can be replaced with a new needle 13. As a result, when picking up the pellet 2, it is possible to prevent the back surface of the pellet 2 from being scratched by the needle 13 and to prevent the pellet 2 from tilting and pushing up to cause a mistake in pellet adsorption of the collet 19.

Since the work for inspecting the needle 13 for abnormality such as breakage or bending is automatically performed as described above, it is necessary for the operator to perform an operation for inspecting the needle 13 for abnormality such as damage or bending. Disappears. As a result, labor saving can be promoted, and at the same time, occurrence of human error or forgetting to do work can be prevented.

4A and 4B are views showing a pickup device according to a second embodiment of the present invention. FIG. 4A is a front sectional view and FIG. 4B is a television screen view for explaining the operation.

The point that the pickup device 10A according to the second embodiment is different from the first embodiment is that an adhesive sheet for inspecting the state of the adhesive sheet 3 surface after the pellets 2 are picked up from the adhesive sheet 3 by the needle 13. Surface inspection device 30
And is configured to inspect the state of the surface of the adhesive sheet 3 for abnormality such as breakage or bending of the needle 13.

That is, the adhesive sheet surface inspection device 30 for inspecting the state of the surface of the adhesive sheet 3 is provided with the optical fiber 31, and the optical fiber 31 is embedded in the central portion of the needle unit 12. An objective lens 32 is fixed to the tip of the optical fiber 31, and the objective lens 32 is fixed to the opening of the sticking sheet pressing surface 14 of the needle unit 12 and is exposed at the upper end surface. An eyepiece lens 33 is fixed to the lower end of the optical fiber 31, and the eyepiece lens 33 is fixed to the opening of the lower end portion of the needle unit 12 and exposed on the lower end surface. A television camera 34 is installed below the eyepiece lens 33.

An image recognition device (not shown) is connected to the television camera 34, and the image recognition device is connected to an alarm device via a controller. Then, when the image on the back surface of the sticking sheet 3 taken by the television camera 34 is recognized by the recognition device and there is an abnormality on the surface of the sticking sheet 3 which will be described later, an alarm is issued from the alarm device by the controller. It is configured to be.

Next, an abnormal inspection work such as breakage or bending of the needle 13 according to the second embodiment will be described.

After the pellet is picked up, the needle 13 is lowered and retracted into the needle unit 12, and when the needle unit 12 is lowered,
The state of the back surface of the adhesive sheet 3 is the television camera 34 through the objective lens 32, the optical fiber 31 and the eyepiece 33.
Taken by. Pattern recognition is executed by the image recognition device based on the image pickup signal. According to the recognition result, when there is an abnormality on the surface of the adhesive sheet 3, the controller issues an alarm from the alarm device.

For example, after picking up, four needle holes 13 are supposed to be formed by passing through four needles 13 in the adhesive sheet 3, but as shown in FIG. 4 (b). In addition, when only three needle holes are recognized in the adhesive sheet 3, it can be determined that one of the four needles 13 has a broken tip. Further, when the size of the needle hole is larger than the predetermined size, it can be determined that the tip of the needle 13 has a chip. Further, when the position of the needle hole is displaced from the predetermined position, it can be determined that the needle 13 is bent.

In this way, by inspecting the state of the surface of the adhesive sheet 3 after picking up, it is possible to detect an abnormality such as bending or bending of the needle 13. And
When the alarm indicating that the abnormality of the needle 13 is detected is issued, the needle 13 is replaced with a new needle 13.

As described above, by inspecting the state of the adhesive sheet 3 surface after picking up, it is possible to inspect whether or not the needle 13 has an abnormality such as bending or bending. When an abnormality such as bending or bending of the needle 13 is detected, the needle 13 is replaced with a new needle 13 so that the back surface of the pellet 2 may be damaged by the needle 13 or the pellet 2 may be removed when the pellet 2 is picked up. By tilting and pushing up, it is possible to prevent occurrence of a mistake in pellet adsorption of the collet 19.

5A and 5B are views showing a pickup device according to a third embodiment of the present invention. FIG. 5A is a front sectional view and FIG. 5B is a television screen view for explaining the operation.

Pickup device 10B according to the third embodiment
Is different from Example 1 described above in that a pellet back surface inspection device 40 that inspects the state of the back surface of the pellet 2 after the pellet 2 is picked up from the adhesive sheet 3 by the needle 13 is provided. It is configured to inspect the needle 13 for abnormality such as breakage or bending by inspecting the state.

That is, the pellet back surface inspection device 40 for inspecting the state of the back surface of the pellet 2 is provided with a television camera 41, and the television camera 41 is arranged on one side of the pickup stage. That is, the picked-up pellet 2 is vacuum-sucked by the collet 19, and the collet 19 sucking the pellet 2 is moved to the pellet back surface inspection position. A television camera 41 for photographing the back surface of the pellet 2 is installed at this inspection position.

An image recognition device (not shown) is connected to the television camera 41, and the image recognition device is connected to an alarm device via a controller. Then, when the image on the back surface of the pellet 2 taken by the television camera 41 is recognized by the recognition device and there is an abnormality on the back surface of the pellet 2 which will be described later, the controller issues an alarm from the alarm device. It is configured.

Next, the abnormality inspection work for the breakage and bending of the needle 13 according to the third embodiment will be described.

After the pellets have been picked up, when the collet 19 vacuum-sucking the pellets 2 is moved to the inspection position, the state of the back surface of the pellets 2 is photographed by the television camera 41. Pattern recognition is executed by the image recognition device based on the image pickup signal. According to the recognition result, when there is an abnormality on the back surface of the pellet 2, the alarm is issued from the alarm device by the controller.

For example, after picking up, four needles 13 should be pushed up on the back surface of the pellet 2 to form four indentations. However, as shown in FIG. When only three indentations are recognized on the back surface of No. 2, it can be determined that one of the four needles 13 has a broken tip. If the size of the indentation is larger than the predetermined size, it can be determined that the tip of the needle 13 has a chip. Further, when the position of the indentation is at a position displaced from the predetermined position, it can be determined that the needle 13 is bent.

In this way, by inspecting the state of the back surface of the pellet 2, it is possible to detect an abnormality such as bending or bending of the needle 13. When an alarm indicating that the needle 13 is abnormal is issued, the needle 1
3 will be replaced by a new needle 13.

As described above, by inspecting the state of the back surface of the pellet 2 after picking up, it is possible to inspect whether or not the needle 13 has an abnormality such as bending or bending. When an abnormality such as bending or bending of the needle 13 is detected, the needle 13 is replaced with a new needle 13 so that the back surface of the pellet 2 is scratched by the needle 13 or the pellet 2 is tilted when the pellet 2 is picked up. By pushing up the collet 19, it is possible to prevent the mistaken adsorption of the pellet of the collet 19 from occurring.

Although the invention made by the present inventor has been specifically described based on the embodiment, the invention is not limited to the embodiment, and various modifications can be made without departing from the scope of the invention. Needless to say.

For example, in the first embodiment, a reflection type photosensor 16 as a tip shape inspection device for inspecting the tip portion of the needle 13, and a full length inspection sensor 17 for inspecting the entire state of the protruding portion of the needle 13 are provided. Was set up,
Only the reflective photosensor 16 for inspecting the condition of the tip portion of the needle 13 may be provided.

Further, the photo sensor 16 and the full length inspection sensor 17 for inspecting the tip portion and the whole of the needle 13 are
The inspection work is not limited to be performed by stopping the needle 13, and the inspection work may be performed while moving the needle 13.

Equipped with an auxiliary needle unit,
If the inspection device detects that the needle is defective, it may be configured to be automatically replaced with an auxiliary needle unit.

In the above description, the case where the invention made by the present inventor is mainly applied to the pickup technology of semiconductor pellets which is the field of application which is the background of the invention has been described, but the present invention is not limited to this, and a minute electronic The present invention can be applied to general pickup technology for sticking sheets of small articles such as parts and electronic devices.

[0068]

The effects obtained by the typical ones of the inventions disclosed in the present application will be briefly described as follows.

Since the inspection device for inspecting the needle for breaking or bending is provided, it is possible to automatically inspect the needle for damage or bending, so that the needle is detected. In this case, the needle can be replaced quickly. As a result, it is possible to prevent the back surface of the pellet from being scratched or the pellet to be tilted and pushed up when the needle is pushed up.

[Brief description of drawings]

FIG. 1 is a front sectional view showing a pickup device according to an embodiment of the present invention.

2 is an enlarged bottom cross-sectional view taken along the line II-II of FIG.

FIG. 3 is a front view showing a state in which a needle unit is lifted from the state of FIG. 1 and a sticking sheet pressing surface presses the sticking sheet, and a needle projects from the needle unit and the pellet is peeled from the sticking sheet. FIG.

4A and 4B are diagrams showing a pickup device which is Embodiment 2 of the present invention, in which FIG. 4A is a front sectional view and FIG. 4B is a television screen diagram for explaining the operation thereof.

5A and 5B are views showing a pickup device which is Embodiment 3 of the present invention, in which FIG. 5A is a front sectional view and FIG.

[Explanation of symbols]

1 ... Work (adhesive sheet with pellets), 2 ... Pellet,
3 ... Adhesive sheet, 4 ... Sheet base material, 5 ... Adhesive layer, 6 ...
Ring, 10, 10A, 10B ... Pickup device, 1
DESCRIPTION OF SYMBOLS 1 ... Table, 12 ... Needle unit, 13 ... Needle, 14 ... Adhesive sheet pressing surface, 15 ... Guide hole, 16
... Reflective photo sensor (needle tip shape inspection device),
17 ... Full length inspection sensor (overall needle shape inspection device) 1
8 ... Reflective photosensor, 19 ... Collet, 30 ... Adhesive sheet surface inspection device, 31 ... Optical fiber, 32 ... Objective lens, 33 ... Eyepiece lens, 34 ... Television camera, 40 ... Pellet back surface inspection device, 41 ... Television camera .

Claims (3)

[Claims] 1. A table for holding a sticking sheet on which a large number of small articles are stuck, and a sticking sheet held on this table is projected from the back side to separate the small articles from the sticking sheet. A pick-up device provided with a needle, comprising a needle shape inspection device for inspecting the shape of the needle. 2. A table holding an adhesive sheet to which a large number of small articles are adhered, and an adhesive sheet held on this table is projected from the back side to separate the small articles from the adhesive sheet. A pick-up device provided with a needle, comprising a sticking sheet surface inspection device for inspecting a state of a sticking sheet surface projected by the needle. 3. A table for holding an adhesive sheet on which a large number of small articles are adhered, and an adhesive sheet held on this table is projected from the back side to separate the small articles from the adhesive sheet. A pickup device provided with a needle, comprising a small article back surface inspection device for inspecting the state of the back surface of the small article detached from the adhesive sheet.