JPH0613453A - Identification of cassettes - Google Patents
Identification of cassettesInfo
- Publication number
- JPH0613453A JPH0613453A JP16968992A JP16968992A JPH0613453A JP H0613453 A JPH0613453 A JP H0613453A JP 16968992 A JP16968992 A JP 16968992A JP 16968992 A JP16968992 A JP 16968992A JP H0613453 A JPH0613453 A JP H0613453A
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- identification
- cassettes
- arm
- identifying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体ウェーハを収納
するカセットの識別方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of identifying a cassette for storing semiconductor wafers.
【０００２】[0002]
【従来の技術】半導体ウェーハ（以下、単にウェーハと
いう）に素子を形成する、いわゆるウェーハプロセスに
おいては、各ウェーハはたとえば25枚を１組としてカセ
ットに収納されて各種加工装置に搬送され、該加工装置
では各カセットに収納された状態で加工が行われる。そ
れゆえ、ウェーハのロット番号や加工条件などはカセッ
ト単位で付されている。2. Description of the Related Art In a so-called wafer process in which elements are formed on a semiconductor wafer (hereinafter, simply referred to as a wafer), each wafer is stored in a cassette, for example, 25 wafers as a set, and is transferred to various processing devices. In the device, processing is performed in a state of being stored in each cassette. Therefore, the lot number of the wafer and the processing conditions are attached in cassette units.
【０００３】従来のカセット識別方法としては、たとえ
ばバーコードマークを貼着してバーコードリーダで読み
取るとか、ＩＣカード埋め込みなどにより電子的に識別
する、あるいは特開昭61−128512号公報に開示されてい
るようなカセット脚部に突起を設けるとか穴を穿ってそ
の数で識別する方法などが実用化されている。As a conventional cassette identification method, for example, a bar code mark is attached and read by a bar code reader, or an electronic identification is made by embedding an IC card, or disclosed in Japanese Patent Laid-Open No. 61-128512. The method of providing a protrusion on the cassette leg portion or the method of making a hole and identifying the number has been put into practical use.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記し
た従来の識別方法において、バーコードの場合は、ウェ
ーハを薬液処理する場合に処理液へ印字インクが溶出し
てウェーハを汚染する危険があり、また高価なバーコー
ドリーダを備える必要があるなどの問題がある。また、
電子的識別の場合は高温処理をする場合にＩＣカードな
どの電子機器が損壊するなどの欠点があり、長時間の使
用に耐えられない恐れがある。However, in the conventional identification method described above, in the case of the bar code, there is a risk that the printing ink is eluted into the processing liquid when the wafer is chemically treated, and the wafer is contaminated. There is a problem that it is necessary to provide an expensive barcode reader. Also,
In the case of electronic identification, there is a defect that an electronic device such as an IC card is damaged when high temperature processing is performed, and there is a possibility that it cannot be used for a long time.
【０００５】さらに、特開昭61−128512号の場合は、突
起部や穴部の製作スペースの関係で識別桁数が制限され
（たとえば16突起の有無による16桁の２進法表示で65,0
00種が上限) ること、かつ、カセットを専用の識別装置
の設置位置まで移動させないと読み取ることができずタ
イムラグが生じること、などの欠点がある。本発明は、
上記のような従来技術の有する課題を解決したカセット
識別方法を提供することを目的とする。Furthermore, in the case of Japanese Patent Laid-Open No. 61-128512, the number of identification digits is limited due to the manufacturing space of the protrusions and holes (for example, a 16-digit binary display depending on the presence or absence of 16 protrusions is 65, 0
(00 type is the upper limit), and it is not possible to read unless the cassette is moved to the installation position of the dedicated identification device, which causes a time lag. The present invention is
It is an object of the present invention to provide a cassette identification method that solves the above-mentioned problems of the conventional technology.
【０００６】[0006]
【課題を解決するための手段】本発明は、工程間を搬送
される半導体ウェーハを収納したカセットを識別する方
法であって、前記カセットのフランジ部に２進化10進法
による識別コードを複数組穴明け加工して配列するとと
もに、前記カセットをハンドリングする搬送装置のアー
ムに埋め込んだ識別センサで前記フランジ部の識別コー
ドを読み取ることを特徴とするカセット識別方法であ
る。SUMMARY OF THE INVENTION The present invention is a method for identifying a cassette containing a semiconductor wafer that is transported between processes, wherein a plurality of sets of binary-coded decimal identification codes are provided on the flange of the cassette. The cassette identification method is characterized in that the identification code of the flange portion is read by an identification sensor embedded in an arm of a transfer device that handles the cassettes and arranged.
【０００７】[0007]
【作 用】本発明によれば、カセットのハンドリング時
における搬送装置の掴み位置であるカセットのフランジ
部に複数組の２進化10進法による識別コードを穴明け加
工することにより、多種類のカセットの識別を可能に
し、一方、搬送装置のアームに識別センサを埋め込むこ
とにより、カセットのハンドリング時に識別コードを迅
速に読み取ることが可能になる。[Operation] According to the present invention, a plurality of sets of binary-coded decimal identification codes are drilled on the flange portion of the cassette, which is the gripping position of the transporting device when the cassette is handled, to make many types of cassettes. By embedding the identification sensor in the arm of the transfer device, it becomes possible to quickly read the identification code when handling the cassette.
【０００８】[0008]
【実施例】以下に本発明の実施例について、図面を参照
して詳しく説明する。図１は、本発明に用いられるカセ
ットの実施例を示す斜視図である。図示のように、カセ
ット１の上フランジ部２，２に２進化10進法による４個
の識別コードすなわち８−４−２−１の４桁を１組にし
た穴群３が複数組穿孔して設けられる。図２は、穴群３
の配列の一例を示したものであるが、一方のフランジ部
２に４組の２進化10進法の識別コードの穴群３ａ，３
ｂ，３ｃ，３ｄを設けたもので、最初の３組３ａ，３
ｂ，３ｃを識別用に、最後の１組３ｄはチェックディジ
ット用とされる。この２進化10進コードの穴群３ａ，３
ｂ，３ｃ，３ｄを両方のフランジ部２，２に設けるよう
にすれば、全部で（２4 ）6 の識別桁数を確保すること
ができる。Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a perspective view showing an embodiment of a cassette used in the present invention. As shown in the drawing, the upper flange portions 2 and 2 of the cassette 1 are perforated with a plurality of sets of four identification codes by the binary coded decimal system, that is, a group of holes of 4 digits of 8-4-2-1. Is provided. FIG. 2 shows a group of holes 3.
FIG. 4 shows an example of the arrangement of, but four sets of binary coded decimal identification hole groups 3a, 3 on one flange 2
b, 3c, 3d are provided, and the first three sets 3a, 3
b and 3c are used for identification, and the last set 3d is used for check digit. This binary coded decimal code hole group 3a, 3
If b, 3c and 3d are provided on both flange portions 2 and 2, a total number of identification digits of (2 4 ) 6 can be secured.
【０００９】一方、このカセット１をハンドリングする
搬送装置４のコの字型のアーム部５，５には、穴群３を
検出する一対の投光部６ａと受光部６ｂとからなる識別
センサ６が埋め込まれており、この受光部６ｂで検出し
た識別信号は図示しない工程管理用の制御装置に入力さ
れる。このような構成にすることにより、カセット１を
ハンドリングするときは、搬送装置４のアーム部５とカ
セット１のフランジ部２は図３に示すような位置関係に
なって、識別センサ６の投光部６ａからの光が該当する
穴群３を介してその対応する受光部６ｂに到達する。こ
れによって、カセット１のコードを迅速に読み取ること
ができるから、ウェーハの処理に必要な情報を的確に制
御装置に伝送することができ、ハンドリングが適切に行
われることになる。On the other hand, in the U-shaped arms 5 and 5 of the carrying device 4 for handling the cassette 1, an identification sensor 6 composed of a pair of a light projecting part 6a for detecting the hole group 3 and a light receiving part 6b. Is embedded, and the identification signal detected by the light receiving section 6b is input to a process control device (not shown). With such a configuration, when handling the cassette 1, the arm portion 5 of the transport device 4 and the flange portion 2 of the cassette 1 have a positional relationship as shown in FIG. The light from the portion 6a reaches the corresponding light receiving portion 6b through the corresponding hole group 3. As a result, the code of the cassette 1 can be quickly read, so that the information necessary for processing the wafer can be accurately transmitted to the control device, and the handling can be performed appropriately.
【００１０】[0010]
【発明の効果】以上説明したように、本発明によれば、
簡易な手段によりハンドリング中にカセットの識別を行
うことができるから、従来例のようにタイムラグやウェ
ーハの薬液によう汚染，損壊を起こすことなく、カセッ
トの工程管理を円滑に行うことが可能である。As described above, according to the present invention,
Since the cassette can be identified during handling by a simple means, it is possible to smoothly perform the process control of the cassette without causing the time lag and the chemical solution of the wafer to be contaminated or damaged unlike the conventional example. .
【図１】本発明の実施例の構成を示す斜視図である。FIG. 1 is a perspective view showing a configuration of an exemplary embodiment of the present invention.
【図２】２進化10進コードを例示する部分平面図であ
る。FIG. 2 is a partial plan view illustrating a binary coded decimal code.
【図３】カセットのハンドリング時のアームとの位置関
係を示す説明図である。FIG. 3 is an explanatory diagram showing a positional relationship with an arm when handling a cassette.
１ カセット ２ フランジ部 ３ 穴群 ４ 搬送装置 ５ アーム部 ６ 識別センサ 1 cassette 2 flange part 3 hole group 4 carrier device 5 arm part 6 identification sensor
Claims (1)
収納したカセットを識別する方法であって、前記カセッ
トのフランジ部に２進化10進法による識別コードを複数
組穴明け加工して配列するとともに、前記カセットをハ
ンドリングする搬送装置のアームに埋め込んだ識別セン
サで前記フランジ部の識別コードを読み取ることを特徴
とするカセット識別方法。1. A method of identifying a cassette containing semiconductor wafers transferred between processes, wherein a plurality of sets of binary-coded decimal identification codes are drilled and arranged on a flange portion of the cassette. A cassette identification method, wherein the identification code of the flange portion is read by an identification sensor embedded in an arm of a transfer device that handles the cassette.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16968992A JPH0613453A (en) | 1992-06-26 | 1992-06-26 | Identification of cassettes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16968992A JPH0613453A (en) | 1992-06-26 | 1992-06-26 | Identification of cassettes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0613453A true JPH0613453A (en) | 1994-01-21 |
Family
ID=15891073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16968992A Pending JPH0613453A (en) | 1992-06-26 | 1992-06-26 | Identification of cassettes |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0613453A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1049137A2 (en) * | 1999-04-30 | 2000-11-02 | Shin-Etsu Polymer Co., Ltd. | Identification structure of a substrate storage container and method of identifying a substrate storage container |
| KR100377218B1 (en) * | 2000-07-14 | 2003-03-26 | 삼성전자주식회사 | Pick-up apparatus for cassette |
| US6632685B2 (en) * | 2001-02-09 | 2003-10-14 | Mosel Vitelic Inc. | Apparatus and method for determining various processes of wafer fabrication in a semiconductor device manufacturing technology |
| WO2003106310A1 (en) * | 2002-06-14 | 2003-12-24 | Fortrend Engineering Corporation | Universal reticle transfer system |
| WO2017015686A1 (en) * | 2015-07-24 | 2017-02-02 | Stiwa Holding Gmbh | Workpiece carrier with a code element for a production unit |
| US11945005B2 (en) | 2019-04-22 | 2024-04-02 | Marek Zreda | Smog removal by city-scale ventilation and circulation |
-
1992
- 1992-06-26 JP JP16968992A patent/JPH0613453A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1049137A2 (en) * | 1999-04-30 | 2000-11-02 | Shin-Etsu Polymer Co., Ltd. | Identification structure of a substrate storage container and method of identifying a substrate storage container |
| EP1049137A3 (en) * | 1999-04-30 | 2005-09-14 | Shin-Etsu Polymer Co., Ltd. | Identification structure of a substrate storage container and method of identifying a substrate storage container |
| KR100377218B1 (en) * | 2000-07-14 | 2003-03-26 | 삼성전자주식회사 | Pick-up apparatus for cassette |
| US6632685B2 (en) * | 2001-02-09 | 2003-10-14 | Mosel Vitelic Inc. | Apparatus and method for determining various processes of wafer fabrication in a semiconductor device manufacturing technology |
| WO2003106310A1 (en) * | 2002-06-14 | 2003-12-24 | Fortrend Engineering Corporation | Universal reticle transfer system |
| EP1534616A1 (en) * | 2002-06-14 | 2005-06-01 | Fortrend Engineering Corporation | Universal reticle transfer system |
| US7318697B2 (en) | 2002-06-14 | 2008-01-15 | Fortrend Engineering Corporation | Universal reticle transfer system |
| EP1534616A4 (en) * | 2002-06-14 | 2010-04-28 | Fortrend Engineering Corp | Universal reticle transfer system |
| WO2017015686A1 (en) * | 2015-07-24 | 2017-02-02 | Stiwa Holding Gmbh | Workpiece carrier with a code element for a production unit |
| CN107921598A (en) * | 2015-07-24 | 2018-04-17 | 斯蒂沃控股有限公司 | The work supporting block with encoder element for production equipment |
| US10365637B2 (en) | 2015-07-24 | 2019-07-30 | Stiwa Holding Gmbh | Workpiece carrier with a code element for a production unit |
| US11945005B2 (en) | 2019-04-22 | 2024-04-02 | Marek Zreda | Smog removal by city-scale ventilation and circulation |
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