KR19990000830A - Wafer cassette sort conveying apparatus and method - Google Patents

Abstract

The present invention relates to a wafer cassette alignment transfer device and a method for improving the management of alignment and conveyance objects and positions by grasping the presence or absence of a cassette on the stage of each elevator and the like.

The present invention provides a wafer cassette conveying and sorting apparatus for conveying and sorting cassettes carrying wafers for each stage, comprising: a sensor for detecting the presence of a cassette on the stage, a sensor for detecting the presence of a wafer in the cassette, and a size of the wafer A controller including a sensor for sensing and outputting a sensing signal of each sensor, a controller for checking the type of a cassette, a check target cassette and a position of an empty cassette by determining an input sensing signal, and linking the stage and the controller And a link unit for transmitting a signal.

Therefore, the wafer conveyance and alignment operations are convenient and the utilization of the cassette is maximized.

Description

Wafer cassette sort conveying apparatus and method

The present invention relates to a wafer cassette alignment conveying apparatus and method, and more particularly, to a wafer cassette alignment conveying apparatus which improves to automatically manage alignment and conveying objects and positions by grasping the presence and type of cassettes on the stage of each elevator. And to a method.

In general, wafers processed to manufacture semiconductor devices have their own identification numbers coded on their surfaces, and devices that sort and transfer these wafers transfer wafers using cassettes and transfer wafers according to identification numbers. Are designed and operated.

These cassettes are usually changed in the program menu when their positions are predetermined in the alignment and conveying device or when the positions need to be registered.

However, the above-described method requires the operator to be aware of the positions of the cassettes to be worked and conveyed, and has been troublesome to check and correct the positions of empty cassettes for each cassette.

Therefore, there has been a problem that the efficiency of conveying and aligning the cassette is extremely poor.

SUMMARY OF THE INVENTION An object of the present invention is to provide a wafer cassette conveying alignment apparatus and method for simplifying conveying and sorting of cassettes through automation and minimizing the number of cassettes required for each operation.

1 is a block diagram showing an embodiment of a wafer cassette alignment transfer device according to the present invention.

2 is a flowchart showing an embodiment of a wafer cassette alignment transfer method according to the present invention.

※ Explanation of symbols for main parts of drawing

10, 12, 14: stage 16: link unit

18: controller 20: cassette presence sensor

22: 6 inch sensor 24: 8 inch sensor

26 wafer detection sensor 28 index portion

A wafer cassette conveyance and alignment apparatus according to the present invention for achieving the above object is a wafer cassette conveyance and alignment apparatus for conveying and aligning a cassette containing a wafer for each stage, the sensor for detecting the presence of a cassette on the stage, the cassette A stage for outputting sensing signals of each sensor, a stage for outputting sensing signals of each sensor, a type of cassette to be determined by determining an input sensing signal, and checking of an empty cassette; And a link unit configured to check a position and to transmit a signal by linking the stage and the controller.

In the wafer cassette conveyance and alignment method according to the present invention, the wafer cassette conveyance and alignment method of conveying and aligning a cassette carrying wafers for each stage comprises the steps of: detecting the presence or absence of a wafer loaded on a carrier, And confirming the position, performing a return and identification number, and checking an empty cassette.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1, the stages 10, 12, 14 are connected to a link unit 16, and the link unit 16 is connected to a controller 18.

Each stage 10, 12, 14 has the same configuration. Specifically, the cassette presence sensor 20, the 6-inch sensor 22, the 8-inch sensor 24, and the wafer detection sensor 26 are indexed ( 28, the index portion 28 is connected to the external link portion 16.

By the above-described configuration, various sensor signals including the cassette presence sensor 20 and the wafer detection sensor 26 are transmitted from the index unit 28 to the controller 18 through the link unit 16. Accordingly, the operation as shown in FIG. 2 is performed.

When an operator arbitrarily puts a work cassette and a conveying target cassette on each stage and then orders the work, scanning is first performed by the wafer detection sensor 26 in step S2 to detect the presence or absence of a wafer, and then in step S4. Through the stage arrangement process, the positioning of the work cassette and the cassette to be conveyed and the work routine are determined.

Then, at step S6, the position of the conveying object cassette is confirmed, and as a result, determination is made at step S8. If the cassette position check fails, step S2 is re-executed, and if successful, step S10 is performed to check the return and recognition number, and then check the empty cassette.

In the above-described process, the cassette presence sensor 20 checks whether the cassette is positioned on the stage 10, and the 6 inch or 8 inch sensors 22 and 24 discriminate the size of the wafer, and the wafer detection sensor 26. Detects the presence of a wafer in the cassette.

After the above-described process of FIG. 2 is performed, data thereof is stored in a memory (not shown) accessible to the controller 18, and the data stored in the memory is processed by the process of FIG. It is used to check the identification number.

Therefore, the number of cassettes that can be used in one operation is secured while the conveyance and alignment process of the wafer is automated.

Therefore, according to the present invention, the conveyance and alignment of the wafers becomes convenient, and the utilization of the cassette is maximized.

Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and such modifications and modifications are within the scope of the appended claims.

Claims (2)

In the wafer cassette conveyance and alignment apparatus for conveying and aligning a cassette carrying wafers for each stage, A stage for sensing the presence or absence of a cassette on the stage, a sensor for detecting the presence or absence of a wafer in the cassette, and a sensor for sensing the size of the wafer and outputting a sensing signal of each sensor; A controller for determining a type of a cassette, a confirmation of a cassette to be conveyed, and a position of an empty cassette by determining an input sensing signal; And A link unit linking the stage and the controller to perform signal transmission; Wafer cassette conveying and sorting apparatus comprising a. In the wafer cassette conveyance and alignment method for conveying and aligning a cassette carrying wafers for each stage, Detecting the presence of a wafer on a carrier; Recognizing the object to be conveyed to confirm the position; Performing a return and identification number confirmation; And Checking for empty cassettes; Wafer cassette conveyance and alignment method comprising the.