JPH0613445Y2 - 密封容器の真空度検査装置 - Google Patents

密封容器の真空度検査装置

Info

Publication number
JPH0613445Y2
JPH0613445Y2 JP12144487U JP12144487U JPH0613445Y2 JP H0613445 Y2 JPH0613445 Y2 JP H0613445Y2 JP 12144487 U JP12144487 U JP 12144487U JP 12144487 U JP12144487 U JP 12144487U JP H0613445 Y2 JPH0613445 Y2 JP H0613445Y2
Authority
JP
Japan
Prior art keywords
light
sealed container
beam splitter
container
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12144487U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6427637U (enrdf_load_html_response
Inventor
芳宏 大和
忠 五味渕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Glass Co Ltd
Original Assignee
Toyo Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Glass Co Ltd filed Critical Toyo Glass Co Ltd
Priority to JP12144487U priority Critical patent/JPH0613445Y2/ja
Priority to US07/171,083 priority patent/US4850696A/en
Priority to EP88302503A priority patent/EP0284347B1/en
Priority to DE8888302503T priority patent/DE3872906T2/de
Priority to AU13782/88A priority patent/AU606927B2/en
Publication of JPS6427637U publication Critical patent/JPS6427637U/ja
Application granted granted Critical
Publication of JPH0613445Y2 publication Critical patent/JPH0613445Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP12144487U 1987-03-27 1987-08-10 密封容器の真空度検査装置 Expired - Lifetime JPH0613445Y2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP12144487U JPH0613445Y2 (ja) 1987-08-10 1987-08-10 密封容器の真空度検査装置
US07/171,083 US4850696A (en) 1987-03-27 1988-03-21 Vacuum degree inspecting device for sealed up vessel
EP88302503A EP0284347B1 (en) 1987-03-27 1988-03-22 A device for inspecting the degree of vacuum in a sealed vessel
DE8888302503T DE3872906T2 (de) 1987-03-27 1988-03-22 Einrichtung zum ueberpruefen der groesse des vakuums in einem geschlossenen behaelter.
AU13782/88A AU606927B2 (en) 1987-03-27 1988-03-28 Vacuum degree inspecting device for sealed up vessel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12144487U JPH0613445Y2 (ja) 1987-08-10 1987-08-10 密封容器の真空度検査装置

Publications (2)

Publication Number Publication Date
JPS6427637U JPS6427637U (enrdf_load_html_response) 1989-02-17
JPH0613445Y2 true JPH0613445Y2 (ja) 1994-04-06

Family

ID=31368454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12144487U Expired - Lifetime JPH0613445Y2 (ja) 1987-03-27 1987-08-10 密封容器の真空度検査装置

Country Status (1)

Country Link
JP (1) JPH0613445Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS6427637U (enrdf_load_html_response) 1989-02-17

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