JPH0612604Y2 - 電子ビ−ム加工装置 - Google Patents

電子ビ−ム加工装置

Info

Publication number
JPH0612604Y2
JPH0612604Y2 JP1986057656U JP5765686U JPH0612604Y2 JP H0612604 Y2 JPH0612604 Y2 JP H0612604Y2 JP 1986057656 U JP1986057656 U JP 1986057656U JP 5765686 U JP5765686 U JP 5765686U JP H0612604 Y2 JPH0612604 Y2 JP H0612604Y2
Authority
JP
Japan
Prior art keywords
electron beam
valve
opening
electron
sealing material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986057656U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62169463U (enrdf_load_stackoverflow
Inventor
敏之 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1986057656U priority Critical patent/JPH0612604Y2/ja
Publication of JPS62169463U publication Critical patent/JPS62169463U/ja
Application granted granted Critical
Publication of JPH0612604Y2 publication Critical patent/JPH0612604Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP1986057656U 1986-04-18 1986-04-18 電子ビ−ム加工装置 Expired - Lifetime JPH0612604Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986057656U JPH0612604Y2 (ja) 1986-04-18 1986-04-18 電子ビ−ム加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986057656U JPH0612604Y2 (ja) 1986-04-18 1986-04-18 電子ビ−ム加工装置

Publications (2)

Publication Number Publication Date
JPS62169463U JPS62169463U (enrdf_load_stackoverflow) 1987-10-27
JPH0612604Y2 true JPH0612604Y2 (ja) 1994-03-30

Family

ID=30887565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986057656U Expired - Lifetime JPH0612604Y2 (ja) 1986-04-18 1986-04-18 電子ビ−ム加工装置

Country Status (1)

Country Link
JP (1) JPH0612604Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5548545Y2 (enrdf_load_stackoverflow) * 1973-12-29 1980-11-13

Also Published As

Publication number Publication date
JPS62169463U (enrdf_load_stackoverflow) 1987-10-27

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