JPH06112625A - Sealing structure of treatment chamber - Google Patents

Abstract

PURPOSE:To realize a sealing structure of a treatment chamber wherein (1) odor, gas, etc., of sprayed chemical do not leak to the outside, and contamination inside a factory can be prevented, (2) a lid part, a window part, etc., can be easily opened and closed and operativity is improved, and (3) air pollution and a loss of air-conditioning energy are not generated, a cost is relatively low and lowering of treatment capacity and a loss of chemical are eliminated. CONSTITUTION:An opening part 15 of a treatment chamber 1 is usually closed by a lid part 9 or a window part. A space 20 is formed of a brim part 8, the lid part 9 or the window part, a first projecting wall 10, a first elastic part 11, a second projecting wall 12, a second elastic part 13, etc., in the inside of the opening part 15. Suction, pressure reduction and vacuum processing are performed for the space 20 by a suction device and a vacuum introduction tube 14. Thereby, the lid part 9 or the window part and the brim part 8 are sealed with an interval therebetween, and the treatment chamber 1 is shut off from the outside and closed. Meanwhile, when air is supplied to the space 20 by using the vacuum introduction tube 14 by switching the suction device, the lid part 9 or the window part are readily opened.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a closed structure of a processing chamber. That is, the present invention relates to a sealed structure of each processing chamber in the process of manufacturing a printed wiring board.

[0002]

2. Description of the Related Art In a process of manufacturing a printed wiring board, a chemical solution is sprayed by a large number of spray nozzles onto a printed wiring board being conveyed in each processing chamber. For example, in each of the developing, etching, and peeling processes, a predetermined acidic or alkaline chemical solution such as a developing solution, a corrosive solution, or peeling is applied to a printed wiring board conveyed in each processing chamber by a large number of spray nozzles. Liquid or the like is jetted, and a predetermined process is performed accordingly. Now, the chemicals sprayed from a large number of spray nozzles are naturally in a spray state, and odors, gases, etc. can be discharged from a slight gap such as a lid part or a window part where the opening provided in the processing chamber is closed. Leaked out and flowed out, causing various problems. Such opening and closing lids and windows of the opening are provided for adjusting the operation of machines in the processing chamber, for maintenance, for emergency measures, etc. For example, only a processing chamber for etching is large or small. About 40 pieces, which are converted into an area, reach several square meters in total, and the total number of printed wiring board manufacturing processes reaches several hundreds.

Therefore, in order to prevent the leakage of odors, gases, etc. from the lid, window, etc. of the opening, conventionally, the lid, window, etc. are first sealed with packing and screws. It was being appreciated. That is, a rubber packing or the like is provided between the opening of such a processing chamber and its lid, window, etc., and a large number of screws are used to press and fix the lid, window, etc. to the opening without gaps. This prevents the leakage of such odors and gases to the outside. On the other hand, odor,
It has been conventionally practiced to forcibly release and diffuse gas and the like. That is, an exhaust duct is provided in each of these processing chambers, and odors, gases, etc. related to the exhaust fan are attached.
Forced discharge into the atmosphere outside the factory through an external deodorization tower,
It was also done to release and diffuse.

[0004]

By the way, the following problems have been pointed out in such conventional examples. First of all, if the odor, gas, etc. of the chemical liquid leaks to the outside of the processing chamber and flows out into the factory, the following occurs. That is, the odor caused by contamination of the factory, such as electronic devices, machine tools, and other various machines and equipment installed in the factory, products such as printed wiring boards installed in the factory, and building structures. However, it was corroded by gas, etc., and its function deteriorated, which was a problem. Further, it has been pointed out that the odor, gas, etc. as harmful substances deteriorate the working environment of the factory and adversely affect the health of workers.

Secondly, the conventional example in which the lid and the window are sealed by using the packing and the screw as described above is as follows. That is, in this conventional example, since the lid portion, the window portion, and the like are pressure-contacted and fixed to the opening portion with no gaps by using an extremely large number of screws, the opening / closing operation is not easy and the work is very troublesome, and the workability is high. A big problem was pointed out. In other words, it is difficult to take emergency measures when a trouble occurs in the automatic line of the machine in the processing chamber, depending on the lid portion, the window portion, etc. that require many screwing to be removed when opening.
In addition, it is not easy to adjust the operation of the machine in the processing chamber and maintain it. In the end, the work is being performed with the lid, window, etc. being closed, and it is pointed out that the workability is very difficult. Was there.

Thirdly, on the other hand, as described above, the exhaust duct,
The following is a conventional example in which odors, gases, etc. are forcibly discharged into the atmosphere outside the factory by the exhaust fan, deodorization tower, etc., and then released and diffused. That is, in this conventional example, first, a large amount of harmful substances such as odor and gas are released and diffused into the atmosphere, which causes an environmental problem of air pollution. Next, a large amount of air that is air-conditioned in each processing chamber and factory is forcibly discharged together with odors, gases, etc., so that the cooling and heating effect, etc. is significantly reduced, and the loss of air conditioning energy such as cooling and heating is large. . In order to reduce such loss, if the exhaust volume of the exhaust fan is reduced, then odors, gases, etc. flow out into the factory, and as described in the above-mentioned item 1, the inside of the factory is contaminated and various problems occur. Will occur. In addition, the cost of installing the exhaust duct, the exhaust fan, the deodorizing tower, and the like is high, and there is a drawback that the deodorizing tower becomes large in size. Further, for example, in the etching step, the acid, which is the oxidizing component of the corrosive liquid for dissolving and removing the copper foil, is forcibly discharged as odor, gas, etc., so that the dissolving ability of the copper foil, that is, the etching treatment ability is reduced. It also increases the supply of acid for replenishment.
As described above, problems such as a decrease in processing capacity in the processing chamber and loss of the chemical solution have been pointed out.

The present invention has been made as a result of earnest research efforts by the inventor in order to solve the above-mentioned problems of the conventional example in view of the above-mentioned circumstances, and includes a collar portion, a lid portion or a window portion, a predetermined portion. A space is formed by the first projecting wall, the first elastic portion, the second projecting wall, the second elastic portion, etc., and this space can be evacuated by the vacuum introducing pipe, so that the first injection is performed. Odor of chemical liquid, gas, etc. do not leak to the outside, secondly, it is easy to open and close the lid, window, etc. Third, there is no other air pollution, and no loss of air conditioning energy occurs. Claims 1, 2 and 3, which are relatively inexpensive and do not cause deterioration of processing capacity and loss of chemicals.
The purpose of the present invention is to propose a closed structure of the processing chamber of No.

[0008]

The technical means of the present invention for achieving this object are as follows. First, claim 1
About: That is, the closed structure of the processing chamber is in the manufacturing process of the printed wiring board. Then, a processing chamber in which a chemical solution is sprayed to the conveyed printed wiring board by a large number of spray nozzles, a collar portion fixed inside an opening provided in the processing chamber, and a gap between the collar portion. A lid portion that is located outside and is capable of opening and closing the opening, a first protruding wall that is circumferentially provided from the lid portion toward the collar portion, a tip portion of the first protruding wall, and the collar portion. A second elastic wall interposed between the first elastic portion and the first projecting wall, the second projecting wall being circumferentially provided from the brim section toward the lid section;
The second elastic portion interposed between the tip portion of the protruding wall and the lid portion, and the collar portion, the lid portion, the first protruding wall, the first elastic portion, the second protruding wall, the second elastic portion, and the like. It has a vacuum introducing pipe which opens to the space formed and an intake device connected to the vacuum introducing pipe. Further, the claim 2 is as follows. That is, the processing chamber sealing structure is the processing chamber sealing structure according to claim 1, wherein the first projecting wall is not circumferentially provided from the lid portion to the collar portion but from the collar portion. The first elastic portion is provided around the lid portion, and the first elastic portion is not interposed between the tip end portion of the first projecting wall and the brim portion but the first elastic portion.
It is interposed between the tip portion of the projecting wall and the lid portion. Furthermore,
Claim 3 is as follows. That is, in this closed structure of the processing chamber, in the closed structure of the processing chamber according to claim 1 or 2, an opening / closing window is used instead of the lid.

[0009]

Since the present invention comprises such means, it operates as follows. First, the opening of the processing chamber is normally closed by a lid or a window. And inside the opening,
A space is formed by the brim portion, the lid portion or the window portion, the first protruding wall, the first elastic portion, the second protruding wall, the second elastic portion, and the like, and this space is decompressed by the intake device and the vacuum introduction pipe. ， It is evacuated. Therefore, the lid portion or the window portion is slightly sucked toward the brim portion side, and the first elastic portion and the second elastic portion are compressed and crushed, so that there is a space between the lid portion or the window portion and the brim portion. While being sealed without any gaps. In this way, the processing chamber is securely shielded from the outside. On the other hand, by temporarily switching the intake device as needed, air is supplied to the space by using the vacuum introducing pipe, and the decompression and the vacuuming of the space are released. Then, by opening the lid part or the window part, operation adjustment of machines in the processing chamber, maintenance, emergency measures, etc. are carried out from the opening part.

Therefore, first, the processing chamber is always evacuated, so that the processing chamber is securely shielded from the outside. Therefore, in the processing chamber, although a chemical solution is sprayed from a large number of spray nozzles onto the conveyed printed wiring board and is in a spray state, it is reliably prevented from leaking to the outside. Secondly, opening and closing of the lid portion or the window portion can be performed easily and easily through the vacuum introduction tube without any hassle by switching the intake device. Thirdly, the prevention of leakage of odors, gases, etc. is realized without air pollution and without forcibly discharging the air conditioned in the processing chamber and the factory to the outside. Further, by providing the first projecting wall, the first elastic part, the second projecting wall, the second elastic part, the vacuum introducing pipe, the intake device, etc., it is realized at relatively low cost. Furthermore, the components of the chemical solution are not forcibly discharged from the processing chamber to the outside.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below based on the embodiments shown in the drawings. FIG. 1 is a front sectional view of an embodiment of the present invention, and FIG. 2 is an enlarged view of the main part.

The closed structure of the processing chamber 1 is used in the manufacturing process of the printed wiring board P. First, the printed wiring board P will be described. The printed wiring board P is a single-sided board for consumer use, a double-sided board for OA, a multilayer board for computers, other flexible boards for computers, etc.
There are various types depending on the application, and the manufacturing process thereof is also various. For example, it is manufactured by following steps such as material cutting, polishing / electrolytic treatment, resist attachment, exposure, development, etching, resist stripping, and the like. That is, first, a copper-clad laminate in which a copper foil is stretched over an insulating material is cut into a work-sized short material, and polishing or electrolytic treatment is performed as surface treatment.
Then, after the process of sticking the photosensitive resist in a film shape, it was exposed by exposing a circuit photograph, and after that, the resist left the exposed and cured circuit part, and the other part was dissolved and removed by spraying a developing solution. It Then, in the etching machine, the copper foil in the circuit portion where the resist is hardened in this way is left, and the copper foil in the portion where the resist is dissolved and removed as described above is dissolved and removed by the jetting of the corrosive liquid. After that, the remaining resist of the above-mentioned hardened circuit portion is dissolved and removed by spraying a stripping solution, whereby an electric circuit is formed and a printed wiring board P is manufactured.

As described above, in the wet process during the manufacturing process of the printed wiring board P, various different chemicals H such as a developing solution, a corrosive solution, a stripping solution, etc., that is, an acidic, alkaline, organic, inorganic chemical solution H, The printed wiring board P conveyed by the conveyor 2 in the processing chamber 1 is jetted by a large number of upper and lower spray nozzles 3. For example, in the etching process, the chemical liquid H, which is a corrosive liquid for dissolving and removing the copper foil, is sprayed onto the printed wiring board P in the processing chamber 1 of the etching machine. In the figure, 4 is a liquid tank for the chemical liquid H in the processing chamber 1, 5 is a pump for circulating the chemical liquid H and generating a spray pressure, 6 is a pipe, and 7 is a spray pipe. Now,
In the closed structure of the processing chamber 1, the following brim portion 8, lid portion 9,
It is provided with a first projecting wall 10, a first elastic portion 11, a second projecting wall 12, a second elastic portion 13, a vacuum introducing pipe 14, and others.

To describe these, first, the brim portion 8
Are fixed inside the opening 15 provided in the processing chamber 1. In the illustrated example, the upper surface of the processing chamber 1 is largely opened to form an opening portion 15, and a flange portion 8 is fixed in an inner flange shape slightly below the opening edge of the opening portion 15. The lid portion 9 is arranged on the outer edge, that is, on the upper edge of the opening with a gap from the collar portion 8, and can open and close the opening portion 15. In the illustrated example, the first projecting wall 10 is the lid 9
The lid 9 is provided around the collar 8 in a ring shape and supports the lid 9 on the collar 8. The first elastic portion 11 has a ring shape and is interposed between the tip portion of the first projecting wall 10 and the collar portion 8. In the illustrated example, the first elastic portion 11 has a packing fixed to the tip portion of the first projecting wall 10. Therefore, it comes into close contact with the brim portion 8 side. Reference numeral 16 is a core material of the first elastic portion 11.

Next, the second projecting wall 12 is spaced apart from the first projecting wall 10 and, in the illustrated example, at a position near the side wall of the processing chamber 1, it is provided in a ring shape from the flange 8 to the lid 9. The first protruding wall 1
The lid 9 is supported on the brim 8 together with 0. The second elastic portion 13 is interposed between the tip portion of the second protruding wall 12 and the lid portion 9, and in the illustrated example, is made of a rubber pad fixed to the tip portion of the second protruding wall 12 in a brim shape. The lid 9 is in close contact with the side. Further, in the illustrated example, a collar-shaped rubber pad elastic receiving portion 17 facing the second elastic portion 13 is fixed to the collar-shaped receiving portion 18 on the side of the lid portion 9 as well.
The receiving portion 18 is attached to the lid portion 9 with an adjusting screw 19. Therefore, by adjusting the positions of the receiving portion 18 and the elastic receiving portion 17 with the adjusting screw 19, the second elastic portion 13
However, they are accurately pressed against the elastic receiving portion 17 without any clearance, and thus come into close contact with the lid portion 9 side.

Now, in such an opening 15,
When the lid 9 is always closed, the lower lateral rib portion 8, the upper lateral lid portion 9, and the vertical ring-shaped first projecting wall 10, first elastic portion 11, second Wall 12,
A space 20 is formed by the brim-shaped second elastic portion 13, the elastic receiving portion 17, the receiving portion 18, and the like. And this space 20
Are separated from the inside and outside of the processing chamber 1. The vacuum introducing pipe 14 is opened in such a space 20, and in the illustrated example, the second projecting wall 12 formed thickly.
It is formed inside, and one end side is open toward the space 20.
The other end of the vacuum introduction pipe 14 is connected to an intake device (not shown) attached to the processing chamber 1 and provided with a vacuum pump and the like via a flange 8 and the like by a pipe (not shown).

The present invention is constructed as described above. Then it becomes as follows. First, the opening 15 of the processing chamber 1 is always closed by the lid 9. Inside the opening 15, the lateral rib portion 8, the lid portion 9, the vertical first protruding wall 10, the first elastic portion 11, the second protruding wall 12,
A space 20 is formed by the second elastic portion 13, the elastic receiving portion 17, the receiving portion 18, and the like, and the space 20 is formed by temporarily driving the vacuum pump of the intake device.
At, intake, decompression, and vacuum. Therefore, in the opening 15, the lid 9 is slightly sucked toward the brim 8 side,
First elastic portion 11, second elastic portion 13, elastic receiving portion 17
Are the first projecting wall 10, the second projecting wall 12, and the receiving portion 18, respectively.
It is compressed and crushed through such as, and thus, the lid portion 9 and the collar portion 8 are tightly sealed with a gap. In this way, first the first protruding wall 10 and the first elastic portion 11, then the evacuated space 20, and further the second protruding wall 12 and the second elastic portion 1.
3, the inside of the processing chamber 1 and the outside are reliably shut off by the elastic receiving portion 17, the receiving portion 18, etc., and the processing chamber 1 is completely sealed. On the other hand, if necessary, by temporarily switching the switch of the intake device, for example, by opening to the outside air, air is supplied into the space 20 using the vacuum introducing pipe 14, and the space 20 is supplied. The decompression and evacuation of are released. The first elastic portion 1 attracts the lid portion 9 to the brim portion 8 side.
The compression and crushing of the first and second elastic portions 13, the elastic receiving portion 17 and the like are also released. Then, by opening the lid portion 9,
From the opening 15, operation adjustment of machines in the processing chamber 1, maintenance, emergency measures, etc. are carried out.

Therefore, the hermetically sealed structure in the processing chamber 1 has the following first, second and third structures. First, the space 20 is always evacuated, so that the inside of the processing chamber 1 and the outside are reliably shut off, and the processing chamber 1 is completely sealed. Therefore, in the processing chamber 1, the chemical liquid H is jetted from the large number of spray nozzles 3 to the printed wiring board P being transported,
Although the sprayed chemical liquid H drifts in a spray state, it is reliably prevented from leaking to the outside. Second
In addition, the opening and closing of the lid 9 of the opening 15 can be easily and easily performed by switching the intake device, that is, by suctioning, depressurizing, or evacuating the space 20 in the vacuum introducing pipe 14, or by releasing it. It is done without any hassle. Thirdly, the prevention of leakage of odors, gases, etc. is not accompanied by air pollution,
It is realized without forcibly discharging the air that has conditioned the processing chamber 1 and the inside of the factory to the outside. Also, the first protruding wall 1
0, the first elastic portion 11, the second protruding wall 12, the second elastic portion 13,
By providing the vacuum introduction pipe 14, the intake device, etc., it can be realized at relatively low cost and without increasing the size. Further, the components of the chemical liquid H are not forcibly discharged from the processing chamber 1 to the outside. For example, the acid, which is the oxidizing component of the chemical liquid H that is a corrosive liquid for dissolving and removing the copper foil of the printed wiring board P, is not discharged from the processing chamber 1 for etching to the outside as an odor, a gas, or the like. .

First, the closed structure of the processing chamber 1 is as follows.
The following configuration may be used regardless of the illustrated example. That is,
The first projecting wall 10 is not provided circumferentially from the lid portion 9 to the collar portion 8 as in the illustrated example, but conversely, from the collar portion 8 to the lid portion 9.
And the first elastic portion 11 is not disposed between the tip portion of the first projecting wall 10 and the brim portion 8 as in the illustrated example, but rather the tip portion of the first projecting wall 10. You may make it intervene between the lid part 9 and the lid part 9. Secondly, the closed structure of the processing chamber 1 may be configured as follows regardless of the illustrated example. That is, although the opening 15 is opened and closed by the lid 9 in the illustrated example, an openable window may be used instead of the lid 9. Even in the case of the first and second configurations,
The action and the like are exactly the same as in the case of the illustrated example described above.

[0020]

As described above, the sealing structure of the processing chamber according to the first, second, and third aspects of the present invention has a collar portion, a lid portion or a window portion, a predetermined first protruding wall, a first elastic portion, A space is formed by the second projecting wall, the second elastic portion, and the like, and the space can be evacuated by the vacuum introducing pipe, so that the following effects are exhibited. First of all, the odor, gas, etc. of the injected chemical liquid will not leak outside and will not flow out into the factory. Therefore, pollution in the factory is prevented, and electronic devices, machine tools, and other various machines and equipment installed in the factory, products such as printed wiring boards installed in the factory, and building structures are Corrosion due to such odors, gases, etc. is surely avoided, and its function deterioration is prevented. In addition, the odor, gas, etc. do not deteriorate the working environment of the factory as harmful substances, the working environment is made clean, and adverse effects on the health of the worker are avoided.

Secondly, it is easy to open and close the lid, window, etc., and the workability is improved. Therefore, unlike this type of conventional example that uses packing and screws, the lid, window, etc. can be opened easily as needed, so troubles occur in the automatic machine line in the processing chamber through the opening. In this case, it is easy to take emergency measures, and the workability is excellent because the operation and maintenance of machines in the processing chamber can be easily performed.

Third, air pollution and air conditioning energy loss do not occur, the cost is relatively low, the processing capacity is not reduced, and the chemical liquid is not lost. That is, unlike this conventional example using an exhaust duct, an exhaust fan, and a deodorizing tower, first, the environmental problem of air pollution does not occur, and the air conditioning the processing chambers and factories is forcibly discharged. The air-conditioning effect is maintained without being
There is no loss of air conditioning energy such as heating and cooling. Further, the cost is relatively low compared to the case where the exhaust duct, the exhaust fan, the deodorizing tower, etc. are attached, and the equipment does not become large. Further, the components of the chemical liquid are not forcibly discharged from the processing chamber, the deterioration of the processing capacity in the processing chamber is prevented, and the loss of the chemical liquid is also avoided. As described above, all the problems existing in this type of conventional example are eliminated, and the effects of the present invention are remarkable and significant.

[Brief description of drawings]

FIG. 1 is a front sectional view showing an embodiment of a closed structure of a processing chamber according to the present invention.

FIG. 2 is an enlarged view of the main part.

[Explanation of symbols]

 1 Processing Room 2 Conveyor 3 Spray Nozzle 4 Liquid Tank 5 Pump 6 Piping 7 Spray Pipe 8 Collar 9 Lid 10 First Projection Wall 11 First Elastic Section 12 Second Projection Wall 13 Second Elastic Section 14 Vacuum Introducing Tube 15 Opening Part 16 Core material 17 Resilient part 18 Receiving part 19 Adjusting screw 20 Space H Chemical liquid P Printed wiring board

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Office reference number FI technical display location // H05K 3/06 Q 6921-4E C 6921-4E G 6921-4E

Claims (3)

[Claims] 1. A sealed structure of a processing chamber in a manufacturing process of a printed wiring board, the processing chamber in which a chemical solution is sprayed onto a conveyed printed wiring board by a large number of spray nozzles, and the processing chamber is provided in the processing chamber. And a lid portion fixed inside the opening, a lid portion that is spaced apart from the collar portion and is arranged outside and that can open and close the opening portion, and is provided around the lid portion toward the collar portion. The first projecting wall, the first elastic portion interposed between the tip of the first projecting wall and the collar, and the first projecting wall is spaced from the collar to the lid. A second projecting wall provided around the second projecting wall, a second elastic part interposed between the tip of the second projecting wall and the lid part, the collar part, the lid part, the first projecting wall, the first elastic part Department,
A vacuum introducing pipe opening into a space formed by the second projecting wall, the second elastic portion, etc .; and an air intake device connected to the vacuum introducing pipe,
A sealed structure of a processing chamber, characterized by comprising: 2. The closed structure for a processing chamber according to claim 1, wherein the first projecting wall is not circumferentially provided from the lid portion to the collar portion, but is circumferentially oriented from the collar portion to the lid portion. And the first elastic portion is not interposed between the tip portion of the first protruding wall and the brim portion, but is interposed between the tip portion of the first protruding wall and the lid portion. The sealed structure of the processing chamber, which is characterized by being used. 3. The hermetically sealed structure for a processing chamber according to claim 1 or 2, wherein an openable window is used instead of the lid.