JPH08469Y2 - Sealing structure of processing chamber - Google Patents

Description

[Detailed description of the device]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sealing structure for a processing chamber. That is, the present invention relates to a hermetically sealed structure such as a window or a lid of an opening used in a chemical processing apparatus that sprays a chemical solution onto a processing target in a processing chamber.

[0002]

2. Description of the Related Art In a chemical processing apparatus, for example, a chemical processing apparatus for an etching line during the manufacturing process of a printed wiring board,
Processing is performed by spraying a chemical solution through a pump from a large number of nozzles of a spray pipe onto a printed wiring board to be processed in the processing chamber. At that time, gas or mist is generated from the scattered chemical solution. By the way, in such a chemical processing apparatus, maintenance, inspection, and
It is provided with an emergency opening and the like, and an opening / closing part such as a window or a lid attached to the opening with a bolt or a lock member.

[0003]

By the way, the following problems have been pointed out in such a conventional example. First
In addition, it has been pointed out that the sprayed chemical liquid, its gas or mist leaks out from the gap between the opening and the opening / closing part such as the window or the lid. That is, in this type of chemical processing apparatus, first, the opening of the processing chamber is used for maintenance, inspection, emergency, etc. Therefore, even a window, lid, etc., which is always closed, is conventionally used. More generally, it has a simple structure, and since it was attached to the opening with a bolt, a lock member, etc. so that it could be opened and closed,
There was always a gap between the two. In the processing chamber, the chemical solution is sprayed at a high pressure, and the interior is in a spray state that is scattered to the extent that it cannot be seen through the window.Therefore, even from such a small gap between the opening and the window or lid, Had leaked to.

Secondly, as a cause of leakage of the sprayed chemical liquid, its gas or mist to the outside, the fact that the main member of the processing chamber is made of a hard resin such as hard vinyl chloride is also mentioned. To be That is, in this type of chemical processing apparatus, since the main member of the processing chamber is generally made of hard vinyl chloride, etc., it is highly stretchable due to temperature changes, and its dimensions are likely to change, making it possible to perform work with high dimensional accuracy. It is not easy, and the thermal deformation is large. For example, the temperature inside the processing chamber is about 55 degrees, which is relatively high, while the outside temperature is 2 ° C.
When the temperature is about 0 degrees, the temperature difference reaches 35 degrees and thermal deformation becomes remarkable. Therefore, for such opening of the processing chamber,
It is obvious that the windows and lids to be fitted cannot be fitted exactly, and they are loose, cramped, too large, too small, offset, or rattling, so there are gaps from these points as well. It is liable to occur, and as a result, it has been a cause of leakage of the chemical liquid, its gas, and mist to the outside.

Thirdly, in order to prevent such chemical liquid, its gas or mist from leaking to the outside, a sealing structure as shown in the side sectional view of FIG. 5 has been conventionally adopted, but the effect is obtained. It was not the target. That is, the window 1 and the lid are attached to the frame 3 on the side of the opening 2 of the processing chamber with a rubber packing 4 having a substantially sheet shape, a flat plate shape, a substantially string shape, or a belt shape, and fixed to one side with an adhesive. After that, a sealing structure for attaching the window 1 and the lid with the bolt 5 has been attempted.

However, in the conventional sealing structure shown in FIG. 5, the processing chamber side, that is, the frame 3 of the opening 2 thereof is made of hard resin such as hard vinyl chloride as described above. However, since the work is performed by a welding method, distortion or warpage occurs, it is difficult to form a smooth surface, and a gap is likely to occur. Also, the rubber packing 4 is
For example, even if tightening pressure is applied with the bolt 5, there is insufficient flexibility to fill and seal such distortion or warpage, the gap is not filled, and the frame 3 is made of hard vinyl chloride or the like, Even if the bolt 5 is forcibly tightened, it is difficult to press the rubber packing 4 with the surface pressure to seal the gap. Further, since the rubber packing 4 is fixed by an adhesive with an adhesive, there is a problem that the adhesive is corroded by the sprayed chemical liquid, and the rubber packing 4 is peeled off. Due to these, etc., even in the conventional example shown in FIG. 5, there is a problem that the gap between the opening 2 and the window 1 or the lid cannot be sealed, and the chemical solution or its gas or mist leaks to the outside. It was pointed out.

Fourthly, by these first, second and third,
If the chemical solution, its gas, or mist leaks out of the processing chamber, that is, outside of the chemical processing apparatus, the working environment is deteriorated and the human body and machine are seriously adversely affected. That is, for example, in each manufacturing process of a printed wiring board, as in the semiconductor field and the like, it is said that the working environment is a battle with dust in the air, and thus a strictly clean working environment is required. Thus, the leakage of the chemical liquid, its gas, or mist of one chemical processing device into the factory becomes a serious fatal defect. Furthermore, the leaked chemical liquid, its gas, and mist are harmful to the health of workers in the factory, and corrode high-precision electronic devices, machine tools, and other various machines and instruments in the factory.
The function will be deteriorated.

Fifthly, conventionally, it is also possible to connect exhaust ducts to the front and rear / entrances and the like of the processing chamber of such a chemical processing apparatus to forcibly discharge the gas or mist concerned by an exhaust fan to the outside. It was done. However, in such a conventional example, the deterioration of the working environment described above is further promoted, and an environmental problem of air pollution occurs. Furthermore, for example, in an etching line of a printed wiring board, chlorine-based gas, ammonia gas, etc., which are effective components in the chemical liquid, are forcibly discharged, and the temperature of the chemical liquid is lowered by the forced exhaust. In addition, there has been a problem that the processing capacity of the chemical processing apparatus is lowered and the chemical solution is lost, resulting in a large loss.

The present invention has been made as a result of earnest research efforts by the inventor in order to solve the problems of the above-mentioned conventional examples in view of the above-mentioned circumstances.
First, by using a packing having a hollow structure and fixedly interposed by fitting, and in claim 3, a packing having a bent structure is used instead of the hollow structure. The gaps between the parts and the opening and closing parts such as windows and lids can be reliably sealed, and secondly, this is achieved regardless of expansion and contraction and thermal deformation due to temperature changes, and thirdly, sufficient distortion and warpage are achieved. It is fixedly realized without embedding in the inside and peeling off, and fourthly, these completely prevent leakage of the chemical solution, its gas or mist to the outside,
Fifthly, it is an object of the present invention to propose a sealed structure of a processing chamber which does not cause deterioration of processing capacity and loss of chemicals.

[0010]

The technical means of the present invention for achieving this object are as follows. First, claim 1
About: That is, this sealed structure of the processing chamber is used in a chemical processing apparatus that sprays a chemical solution onto a processing target in the processing chamber. Then, an opening formed in the processing chamber, an opening / closing part such as a window or a lid attached to the opening, a packing interposed between the opening and the opening / closing part,
To have. Here, the packing has a hollow structure and is fixedly interposed by fitting.

The second aspect of the present invention is as follows. That is, the sealed structure of the processing chamber is such that the chemical solution is sprayed from a large number of nozzles of the spray pipe onto the printed wiring board through a pump to perform processing, and at that time, gas or mist is generated from the scattered chemical solution. It is used in a chemical treatment device of an etching line in a printed wiring board manufacturing process. Then, an opening formed in the processing chamber for maintenance, inspection, emergency, etc., an opening / closing part such as a window or lid attached to the opening so as to be openable / closable by a bolt or a lock member, and the opening. And a packing interposed between the opening and the closing part such as a window or a lid. Here, the packing has a hollow structure having a hollow portion, a fitting fixing portion for fitting or embedding, and is fixedly interposed between the two by fitting to one side.

Further, the third aspect is as follows. That is, the sealing structure of the processing chamber is the same as the above-described sealing structure of the processing chamber according to claim 1 and claim 2, wherein the packing has a bent structure instead of a hollow structure having a hollow part. Consists of.

[0013]

The present invention has the above-mentioned means, and therefore operates as follows. In the processing chamber of this chemical processing apparatus, a chemical solution is sprayed onto a processing object such as a printed wiring board, and thus processing in an etching line or the like is performed. Gas and mist are generated from the chemical solution. Now, in this chemical processing apparatus, an opening with an opening / closing part such as a window or a lid is formed in the processing chamber. In the sealed structure of the present invention, a hollow space is provided between this opening and the opening / closing part such as the window or the lid. It has a structure and a bent structure and is excellent in flexibility, flexibility, and followability, and the packing fixed by fitting is interposed.

Therefore, first, the opening of the processing chamber is
It is used for inspection and emergency, and the openings such as windows and lids are also
Since it has a simple structure and is attached so that it can be opened and closed, a gap is likely to occur between the opening and the opening and closing parts such as windows and lids, but this gap can be secured by the freely deformable packing described above. It is sealed to. Secondly, since the main member of such a processing chamber is made of a hard resin such as hard vinyl chloride, it has a high elasticity due to temperature change, its dimensions are likely to change, and work with high dimensional accuracy is difficult. In addition, the thermal deformation is large, and a gap is apt to be formed between them from each of these points, but the gap is surely sealed by the above-mentioned freely deformable packing.

Thirdly, the frame frame of the opening on the processing chamber side and the frame frame of the opening / closing part such as windows and lids are made of a hard resin such as hard vinyl chloride, and the work is made by a welding method. As a result, distortion or warpage is likely to occur and it is difficult to form a smooth surface. Therefore, from this point as well, a gap is apt to occur between the two, but a slight tightening pressure due to a bolt, a lock member, etc. Distortion and warpage are embedded by the interposition, and such a gap is reliably sealed. Further, this packing is fixedly interposed by fitting. Fourth, in the sealed structure of the present invention,
The first, second, and third points act synergistically to reliably seal the gap and reliably prevent the chemical solution, its gas, and mist from leaking to the outside. Fifth, and yet it does not reduce the throughput of the chemical processor,
Further, it is realized without the loss of the chemical liquid.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to its embodiments shown in the drawings. FIG. 1 shows a first embodiment of the present invention, (1) is a side sectional view, and (2) is a front view. FIG. 2 is a rear view of the main part of the second embodiment. 3A and 3B are side sectional views of the packing 6, wherein FIG. 1A shows the first embodiment, FIG. 2B shows the second embodiment, and FIG. 3C shows other various examples. Show. FIG. 6 shows a chemical processing apparatus 7 of an etching line in the manufacturing process of the printed wiring board P,
(1) is a schematic front view, and (2) is a schematic side view.

The hermetically sealed structure of the processing chamber 8 according to the present invention is used in the chemical processing apparatus 7 for spraying the chemical liquid H to the processing target such as the printed wiring board P in the processing chamber 8. First, the printed wiring board P will be described. Printed wiring board P
There are various types of OA double-sided substrates, multi-layered substrates for computers, flexible substrates for computers, etc., and their manufacturing processes are also various. In recent years, the printed wiring board P has been remarkably increased in circuit density and miniaturization, and its miniaturization, miniaturization and weight reduction, ultrathinning, multi-layering, quality improvement, and the like have been progressing. Now, such a printed wiring board P is manufactured as follows, for example. That is, the printed wiring board P is formed by cutting the material, drilling,
Polishing, through-hole plating, polishing, resist pasting, exposure,
It is manufactured by following each process such as development, etching, resist stripping, and so on.

First, a double-sided copper foil-clad laminate in which copper foil is laminated on both sides of a material, that is, an insulating material, is cut into a short work size, and then a through hole is drilled, followed by cleaning and After the double-side polishing process is performed, the through-hole plating is performed. That is, plating is applied to the inner wall of the through hole so as to conduct the electric circuit on the front surface and the electric circuit on the back surface. After that, washing, double-sided polishing treatment, washing, and drying are performed again, and then a process of sticking a photosensitive resist, which is a dry film, into a film shape is performed. Then, a circuit photograph, which is a negative film of the circuit, is taken. The resist is exposed by exposure, and in the post-development machine, the resist leaves the exposed and cured circuit portion, and the other portion is dissolved and removed by spraying the developing solution. After that, after washing and drying,
In the etching machine, the copper foil in the circuit portion where the resist is hardened in this way is left, and the copper foil in the portion where the resist is dissolved and removed as described above is dissolved and removed by spraying a corrosive liquid as an etching liquid. Then, the remaining resist of the above-mentioned cured circuit portion is dissolved and removed by spraying a stripping solution with a stripping machine, washed and dried, and thus,
A printed wiring board P on which a predetermined circuit is formed is obtained.

The sealed structure of the processing chamber 8 is used, for example, in each chemical processing apparatus 7 of the etching line during the manufacturing process of the printed wiring board P.
The manufacturing process of the printed wiring board P is roughly classified into a wet process and a dry process. In the etching line which is the wet process, the chemical processing devices 7 such as a developing machine, an etching machine, and a peeling machine are shown in FIG. As shown, an acidic or alkaline chemical liquid H is jetted onto the surface of the printed wiring board P, which is the object to be processed, conveyed by the conveyor 9. That is, in this chemical processing device 7,
By spraying the chemical liquid H onto the surface of the printed wiring board P from a large number of nozzles 12 of the upper and lower spray pipes 11 via a pump 10 in a processing chamber 8 whose main member is made of a hard resin such as hard vinyl chloride. , Surface treatment is applied,
At that time, it is known that gas or mist is generated from the scattered chemical liquid H.

In the developing machine which is the chemical processing apparatus 7, for example, the chemical solution H which is a weak alkaline developing solution is sprayed onto the printed wiring board P in the processing chamber 8 which is the developing chamber. Then, the resist (photosensitive film) is developed, and the resist (photosensitive film) leaves the exposed and cured circuit portion and dissolves and removes the other unexposed portion, thereby forming an etching pattern on the printed wiring board P. It The developer H, which is the developer, is used at about room temperature.

Next, in the etching machine as the chemical processing apparatus 7, the chemical solution H using a strongly acidic etching solution or the chemical solution H using a strongly alkaline etching solution is stored in the processing chamber 8 as an etching chamber as described above. It is jetted onto the printed wiring board P on which the etching pattern is formed. Then, the copper foil of the circuit portion to which the resist (photosensitive film) is cured and adhered is left, and the copper foil of the other portion is dissolved and removed by corrosion, so that a predetermined circuit is formed on the printed wiring board P. The chemical solution H, which is this etching solution, is 50
It is used at relatively high temperatures of about 55 to 55 degrees.

Next, a peeling machine (film peeling machine) which is a chemical treatment device
Then, the chemical solution H that is an alkaline stripping solution is sprayed onto the printed wiring board P in the processing chamber 8 that is a stripping chamber. Then, the resist (photosensitive film) remaining on the surface of the circuit formed by the etching machine is peeled off, dissolved and removed, and the printed wiring board P is completed. The chemical solution H, which is the stripping solution, is used at a relatively high temperature of about 50 to 65 degrees. Incidentally, a water washing / washing step is attached to the outlet side of each processing chamber 8 of the developing machine, the etching machine, the peeling machine, etc. which are the chemical processing devices 7 of such an etching line. Further, in the pump 10 of each of these chemical treatment devices 7, the chemical liquid H is jetted from each nozzle 12 at a pressure of about 2 kg / cm ² . Further, in FIG. 6, 13 is a chemical liquid tank, 14 is a pipe, and the above-described pump 10 functions as a circulation liquid for the chemical liquid H and for generating a spray pressure.

In the chemical processing apparatus 7 such as the developing machine, the etching machine, and the peeling machine, as shown in FIG. 6 and FIG. 1, maintenance, maintenance, inspection, emergency use formed in the processing chamber 8 are performed. And the like, and an opening / closing part such as a window 1 and a lid attached to the opening 2 so as to be openable / closable by a bolt 5, a lock member, a hinge, or the like. That is, first, the opening 2 on the side of the processing chamber 8 is formed on the side surface of the processing chamber 8.
It is configured by integrally forming a frame frame 3 having a concave inner flange shape and a rectangular opening in the center. Further, the opening / closing part, for example, the window 1 is provided in a frame frame 15 having a flat frame shape such as a substantially rectangular shape having a size corresponding to the frame frame 3 on the side of the opening part 2 and an opening formed in the center of the frame frame 15. And a window body 16 such as a transparent window glass which is assembled and fixed. And such a window 1
Is attached so as to be openable and closable by fastening the frame frame 15 to the peripheral edge of the opening 2 side and the peripheral edge of the frame frame 3 with a large number of bolts 5 in the illustrated example. Of course, instead of the bolt 5, a lock member or the like may be used to hold down and tighten. A in the figure
Is a bolt hole.

A packing 6 is interposed between the opening 2 and the opening / closing part such as the window 1 and the lid.
The packing 6 has a hollow structure having a hollow portion 17 at one end and a fitting fixing portion 18 for fitting or embedding at the other end, and is fixed to the opening portion 2 by fitting to one side. And the opening and closing parts such as the window 1 and the lid.

That is, the packing 6 has a ring shape such as a rectangular shape, a square shape, a circular shape, an elliptical shape, etc., and an outer peripheral portion of the frame frame 3 of the opening 2 or the frame frame 15 of the window 1 or the like. It has a size and dimensions that match.
As the material of the packing 6, a material having excellent chemical liquid H resistance is selected and used. The shape of the elongated hole-shaped hollow portion 17 formed at one end portion of the packing 6, that is, at the upper portion thereof, as shown in each drawing of FIG. Various cross-sectional shapes, such as triangular shapes, are conceivable.

Further, the fitting and fixing portion 18 formed at the other end of the packing 6, that is, at the lower portion, is formed in a concave groove shape in the first embodiment shown in FIG. 1 and FIG. Then opening 2
The peripheral ribs 19 having a convex shape formed on the frame frame 15 such as the frame frame 3 and the window 1 are fitted by fitting.
Moreover, in the example shown in FIG. 2 and FIG.
The fitting and fixing portion 18 of is formed in a convex shape, and the opening 2 is correspondingly formed.
It is fitted into the concave circumferential groove 20 formed in the frame frame 15 such as the frame frame 3 or the window 1 by embedding.
Further, in the packing 6 as described above, in the first embodiment shown in FIGS. 1 and 3 (1), the fitting and fixing portion 18 is fitted to the frame 3 on the side of the opening 2 so that the packing 6 is hollow. The one end where the portion 17 exists is brought into contact with the frame 15 on the side of the window 1 to be interposed between the opening 2 and the window 1. On the contrary, Fig. 2
In the second embodiment shown in FIG. 3 (2) and FIG.
The fitting fixing portion 18 is fitted to the frame 15 on the window 1 side, and the one end where the hollow portion 17 is present abuts on the frame 3 on the opening 2 side, so that the opening 2 and the window 1 Intervened in between. In this way, the packing 6 is appropriately fitted to the opening portion 2 side and the opening / closing portion side such as the window 1.

The sealing structure of the processing chamber 8 according to the present invention is constructed as described above. Then it becomes as follows.

In the processing chamber 8 of the chemical processing apparatus 7, the chemical solution H is applied to the surface to be processed such as the printed wiring board P.
Is sprayed from a large number of nozzles 12 of the spray pipe 11 via the pump 10 and thus subjected to a predetermined surface treatment in an etching line or the like. At that time, gas or mist is generated from the chemical liquid H which is sprayed at a high pressure and is sprayed in the processing chamber 8 and reaches a level where the inside cannot be seen from the outside through the window 1. ing. Now, in such a chemical processing device 7, the maintenance,
An opening 2 having a frame 3 is formed in the processing chamber 8 for inspection, emergency, etc. The opening 2 is always provided with an opening / closing part such as a window 1 having a frame 15 and a lid. It has been closed by. A packing 6 having a hollow structure and fixed by fitting is interposed between the opening 2 and the opening / closing parts such as the window 1 and the lid. And
The inserted packing 6 is attached to the hollow portion 1 by the tightening pressure of the bolt 5 for mounting the window 1 or the like, the lock member or the like.
Since 7 can be freely pressed and deformed, it has excellent flexibility, flexibility, and followability. Therefore, the sealing structure of the present invention has the following first, second, third, fourth and fifth aspects.

First, in such a chemical processing apparatus 7, the opening 2 of the processing chamber 8 is used for maintenance, inspection, emergency, etc., and the window 1 which is normally closed. The opening and closing parts such as the lid and the lid are also configured in a simple manner, and are attached to the opening 2 so as to be openably and closably fitted with the bolt 5 and the lock member. Therefore, the opening 2 and the window 1 are inevitable. A gap is likely to occur between the opening and closing parts such as the lid and the lid.
Therefore, in the sealed structure of the present invention, the packing 6 having a hollow structure in which the hollow portion 17 exists between the opening 2 and the opening / closing portion such as the window 1 and the lid.
The gap is surely sealed by the flexibility, flexibility, and followability based on the hollow structure of the packing 6, and the injected chemical liquid H and the generated gas and mist are It is reliably contained in the processing chamber 8 and prevented from leaking outside the processing chamber 8.

Secondly, in such a chemical processing apparatus 7, since the main member of the processing chamber 8 is generally made of a hard resin such as hard vinyl chloride, the elasticity of the processing chamber 8 due to temperature changes. Is high, the dimensions are easily changed, it is difficult to machine with high dimensional accuracy, and thermal deformation is large. For example, while the inside of the processing chamber 8 is relatively high at about 55 degrees, when the outside is about 20 degrees at room temperature, the temperature difference is 35 degrees.
Degree of heat distortion is remarkable. Therefore, the opening and closing parts such as the window 1 and the lid which are attached to the opening 2 of the processing chamber 8 so as to be openable and closable do not exactly fit, and are loose, cramped, too large or too small, It tends to be biased or rattle, and a gap is likely to be formed between both of these points. Therefore, in the hermetically sealed structure of the present invention, a packing 6 having excellent flexibility, flexibility, and followability due to the hollow structure is interposed between the opening 2 and the opening / closing parts such as the window 1 and the lid. Such a gap is surely sealed.

Thirdly, particularly, the frame frame 3 of the opening 2 on the processing chamber 8 side and the frame frame 15 of the opening / closing part such as the window 1 and the lid are
Since it is made of hard resin such as hard vinyl chloride, and its work is made by the welding method, it is likely to be distorted or warped, and it is difficult to form a smooth surface. Therefore, between the opening 2 and the opening / closing part such as the window 1 or the lid. It was easy to get gaps. Therefore, in the hermetically sealed structure of the present invention, a slight tightening pressure between the opening 2 and the opening / closing parts such as the window 1 and the lid by the bolt 5 and the lock member, and the hollow structure provides flexibility, flexibility and followability. Such distortion and warpage are embedded by the excellent interposition of the packing 6, and such a gap is reliably sealed. Further, the packing 6 is fixedly attached by fitting to the opening 2 side and the opening / closing side such as the window 1 and the lid, and as in the conventional example of this kind shown in FIG. The adhesive is fixedly interposed between the two without being eroded by the chemical liquid H and peeling off.

Fourthly, in the hermetically sealed structure of the present invention, these first, second and third points act synergistically to reliably seal the gap, so that the acidic or alkaline chemical liquid H or its gas or The mist is surely prevented from leaking outside.

Fifthly, this is realized without lowering the processing capacity of the chemical processing apparatus 7 and without the loss of the chemical liquid H. That is, unlike the conventional example of this type, exhaust ducts are not connected to the front and rear of the processing chamber 8 at the inlet / outlet, and the exhaust fan does not force the exhaust. Therefore, for example, in the etching line of the printed wiring board P, the chlorine-based gas, the ammonia gas, etc., which are the effective components in the chemical liquid H, are not forcibly discharged, and the temperature of the chemical liquid H is not lowered. In this way, the processing capacity of the chemical processing device 7 is not deteriorated and the chemical liquid H is not lost.

FIG. 4 is a side sectional view of an essential part of the third embodiment of the present invention. (1) FIG.
(2) shows one having a concave bent portion 22 in the middle thereof, and (3) shows one having a convex bent portion 23 as a whole. In the sealing structure of the processing chamber 8 of the third embodiment shown in FIG. 4, the packing 6 has a hollow portion 17 in the sealing structure of the processing chamber 8 of FIGS. 1, 2 and 3 described above. Instead of the hollow structure having the above-mentioned structure, it has a folding structure having bendable bending portions 21, 22, and 23. That is, in the example shown in FIG. 4 (1), one end portion of the packing 6, that is, the upper portion, is provided with a bent portion 21 which is entirely bent inward or outward in the middle. In addition, (2) of FIG.
In the illustrated example, one end portion of the packing 6, that is, an upper portion thereof, is provided with a thin bent portion 22 formed in a concave shape having a V-shaped cross section. Further, in the example of FIG. 4 (3), one end portion, that is, the upper portion of the packing 6 is formed as a bent portion 23 having a convex shape by forming the upper end as a whole in a V-shaped cross section. There is.

From the state shown in each figure of FIG.
When the opening / closing part such as the window 1 is tightened to the opening 2 side by tightening the mounting bolt 5 or the lock member and the like, the packing 6 having the bent parts 21, 22, and 23 is tightened by the tightening pressure. Since the bent portions 21, 22, and 23 are bent by compression and freely deformed by pressing, they are excellent in flexibility, flexibility, and followability. That is, the bent portions 21, 22, and 23 in each example of FIG.
The function is similar to that of the hollow portion 17 in the example of FIG. First, the structure of the bent portions 21, 22, and 23 forming such a bent structure is not limited to the illustrated example, and various other bendable shapes are considered. To be Secondly, the peripheral rib 19 shown in each drawing of FIG. 4 has a double structure in which a concave groove space is present in the center, and the fitting fixing portion 18 on the lower side of the packing 6 is inserted and fitted therein. It is designed to be fitted. Thirdly, in the third embodiment shown in FIG. 4, the configurations, functions, actions, etc. of the other members are the same as those of the first embodiment and the second embodiment of FIGS. 1, 2 and 3 described above. Since this is similar to the example, the same reference numerals are given and the description thereof is omitted.

[0036]

As described above, the processing chamber sealing structure according to the present invention uses the packing having the hollow structure and fixedly interposed by the fitting. According to the third aspect of the invention, the sealing structure of the processing chamber according to the third aspect exhibits the following effects by using the packing having the bent structure instead of the hollow structure.

First, the predetermined packing surely seals the gap between the opening and the opening / closing part such as a window or a lid, and the chemical solution, its gas or mist is contained in the processing chamber and leaks to the outside. Is certainly prevented. Secondly, this is achieved despite expansion and contraction due to temperature change of the opening on the processing chamber side, poor dimensional accuracy, thermal deformation, etc., and looseness and cramping between the opening and closing parts such as windows and lids. However, the gap is sealed by the predetermined packing despite the fact that the size is not suitable, the deviation, the backlash, etc. Thirdly, this is achieved in a fixed manner while the distortion or warpage of the frame is sufficiently filled with a predetermined packing to seal the gap and the packing does not fall off.

Fourthly, by these first, second and third,
Since the chemical liquid, its gas, and mist are surely prevented from leaking outside, the working environment is improved and the adverse effect on the human body and machine is avoided. For example, in each manufacturing process of printed wiring boards, it is said that the work environment is a battle with dust in the air, as in the semiconductor field, etc. Will be reliably prevented from leaking into the outside factory, thus providing a strictly clean working environment. Furthermore, since the chemical solution, its gas, and mist do not leak out, it is good for the health of workers in the factory, and also prevents corrosion of high-precision electronic devices, machine tools, and other various machine tools in the factory. , Its degradation is avoided.

Fifthly, this is realized without any loss, for example, without lowering the processing capacity of the chemical processing apparatus, and without the loss of the chemical solution. Thus, the effects of the present invention are remarkable, such as the problems existing in this type of conventional example are eliminated.

[Brief description of drawings]

1 shows a first embodiment of a sealing structure for a processing chamber according to the present invention, wherein (1) is a side sectional view and (2) is a front view.

FIG. 2 is a rear view of the main part of the second embodiment.

3A and 3B are side sectional views of the packing, wherein FIG. 1A is the one of the first embodiment, and FIG. 2B is the one of the second embodiment.
(3) The figure shows various other examples.

FIG. 4 is a side sectional view of an essential part of the third embodiment, (1)
The figure shows the one with an overall bent part in the middle, (2) the one with a concave bent part in the middle, and (3) the one with a generally bent part We show each one.

FIG. 5 is a side sectional view of an essential part showing a conventional sealing structure.

6A and 6B show a chemical processing apparatus of an etching line in a printed wiring board manufacturing process, (1) is a schematic front view, and (2) is a schematic view.
The figure is a schematic side view.

[Explanation of symbols]

 1 Window (Opening / Closing) 2 Opening 3 Frame Frame 4 Rubber Packing 5 Bolt 6 Packing 7 Chemical Treatment Device 8 Processing Room 9 Conveyor 10 Pump 11 Spray Pipe 12 Nozzle 13 Chemical Solution Tank 14 Piping 15 Frame Frame 16 Window Body 17 Hollow 18 Fitting / fixing part 19 Circular rib 20 Circumferential groove 21 Bending part 22 Bending part 23 Bending part A Bolt hole H Chemical liquid P Printed wiring board (processing target)

Claims (3)

[Scope of utility model registration request] 1. A chemical processing apparatus for injecting a chemical liquid to a processing object in a processing chamber, the opening formed in the processing chamber, an opening / closing part such as a window or a lid attached to the opening, and A packing interposed between the opening and the opening / closing part,
The sealing structure for a processing chamber is characterized in that the packing has a hollow structure and is fixedly interposed by fitting. 2. A printed wiring board in which a chemical solution is sprayed from a large number of nozzles of a spray pipe to a printed wiring board through a pump in a processing chamber to perform processing, and gas or mist is generated from the scattered chemical solution. It is used in a chemical processing apparatus of an etching line in a manufacturing process, and has an opening formed in the processing chamber for maintenance, inspection, emergency, etc., and a window attached to the opening so as to be openable and closable by a bolt or a lock member. An opening / closing part such as a lid, and a packing interposed between the opening and the opening / closing part such as a window or a lid. The packing has a hollow structure having a hollow part, and A sealing structure for a processing chamber, comprising a fitting fixing portion for fitting or embedding, and being fixedly interposed between the two by fitting to one side. 3. The process chamber sealing structure according to claim 1 or 2, wherein the packing is a bent structure having a bent portion instead of a hollow structure having a hollow portion. A sealed structure of the processing chamber.