JPH06112377A - Ceramic package - Google Patents

Ceramic package

Info

Publication number
JPH06112377A
JPH06112377A JP25875192A JP25875192A JPH06112377A JP H06112377 A JPH06112377 A JP H06112377A JP 25875192 A JP25875192 A JP 25875192A JP 25875192 A JP25875192 A JP 25875192A JP H06112377 A JPH06112377 A JP H06112377A
Authority
JP
Japan
Prior art keywords
layer
heat sink
hole
package
convex portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25875192A
Other languages
Japanese (ja)
Inventor
Mitsunori Ueno
光則 上野
Satoshi Miyazawa
智 宮沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
Original Assignee
Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP25875192A priority Critical patent/JPH06112377A/en
Publication of JPH06112377A publication Critical patent/JPH06112377A/en
Pending legal-status Critical Current

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  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To avoid the occurrence of narrow gap easy for plating cleaning liquid, etc., to remain by arranging the gap between a hole, which passes through from obverse to reverse, piercing each layer of a package body, and a projection so that it may be not below the value equivalent to the difference between the area of the opening of one layer of a heat sink and the area of the other layer. CONSTITUTION:The area (the length of one side is Da) of the opening of a layer A, which is in contact with a heat sink 13, out of the body 10 is set to be smaller than that (the length of one side is Db or Dc) of the opening of other than the layer A. That is, they are in the relation of Da=Db-alpha=Dc-beta, and alpha is equivalent to the difference between Da and Db, and beta is equivalent to the difference between Da and Dc. Accordingly, in case that the heat sink 13 is biased to left side, the gap Lb between the projection 13a of the heat sink 13 and the second hole 11b is limited by alpha/2, so the occurrence of narrow gap easy for plating cleaning liquid to remain can be avoided, therefore it ceases to have adverse effect such as corrosion, etc., on the peripheral plated section.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半導体用気密容器の一
種であるセラミックパッケージに関し、特に、放熱性を
改善したセラミックパッケージに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic package which is a kind of airtight container for semiconductors, and more particularly to a ceramic package having improved heat dissipation.

【0002】[0002]

【従来の技術】図4(a)は、放熱性を改善した従来の
セラミックパッケージの構造図(但し、リードピン省
略)であり、セラミック材料からなるパッケージ本体1
に形成した穴1aに、金属性材料からなるヒートシンク
2の凸部2aを挿入し、その凸部2a(すなわちヒート
シンク2の一部)にICチップ3を取り付けるようにし
たものである。なお、4は配線パターン、5はボンディ
ングワイヤである。
2. Description of the Related Art FIG. 4A is a structural view (however, lead pins are omitted) of a conventional ceramic package with improved heat dissipation, in which a package body 1 made of a ceramic material is used.
The convex portion 2a of the heat sink 2 made of a metallic material is inserted into the hole 1a formed in the above, and the IC chip 3 is attached to the convex portion 2a (that is, a part of the heat sink 2). In addition, 4 is a wiring pattern and 5 is a bonding wire.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、かかる
従来のセラミックパッケージにあっては、パッケージ本
体1の穴1aにヒートシンク2の凸部2aを挿入する
際、凸部2aの水平方向位置(図面の左右方向位置)が
片寄ることがあり、例えば、図面の左側に寄った場合に
は、図4(b)に示すように、穴1aと凸部2aとの間
にきわめて狭い隙間Laが生じ、この隙間Laに残留す
る例えばめっき洗浄液等が徐々に染み出して、周辺のめ
っき部分に腐食等の悪影響を与えるといった品質管理上
の問題点があった。 [目的]そこで、本発明は、めっき洗浄液等が残留し易
い狭隘な隙間の発生を回避して、高品質のヒートシンク
付セラミックパッケージを提供することを目的とする。
However, in such a conventional ceramic package, when the convex portion 2a of the heat sink 2 is inserted into the hole 1a of the package body 1, the horizontal position of the convex portion 2a (left and right in the drawing). (Direction position) may deviate, and for example, when it deviates to the left side of the drawing, as shown in FIG. 4B, a very narrow gap La is created between the hole 1a and the convex portion 2a, and this gap La For example, there is a problem in quality control that, for example, a plating cleaning liquid remaining in La gradually exudes and adversely affects the surrounding plated portion such as corrosion. [Purpose] Therefore, an object of the present invention is to provide a high quality ceramic package with a heat sink by avoiding the occurrence of a narrow gap in which a plating cleaning liquid or the like is likely to remain.

【0004】[0004]

【課題を解決するための手段】本発明は、上記目的を達
成するために、グリーンシートを積層して焼き固めたパ
ッケージ本体と、該パッケージ本体の各層を貫通して表
裏を連通する穴と、前記パッケージ本体の表面層または
裏面層に当接すると共に凸部を前記穴の内部に挿入して
ICチップ用のステージを形成するヒートシンクとを具
備するセラミックパッケージにおいて、前記ヒートシン
クが当接する一つの層または該層を含むいくつかの連続
した層の開口面積を、他の層の開口面積よりも小さくし
て前記穴を形成したことを特徴とし、または、前記ヒー
トシンクが当接する一つの層または該層を含むいくつか
の連続した層に対向する前記凸部の断面積を、他の層に
対向する断面積よりも大きくしたことを特徴とする。
In order to achieve the above object, the present invention provides a package body in which green sheets are laminated and baked, and a hole penetrating each layer of the package body to communicate the front and back sides thereof. A ceramic package comprising a heat sink that abuts a front surface layer or a back surface layer of the package body and inserts a convex portion inside the hole to form a stage for an IC chip. The opening area of some continuous layers including the layer is made smaller than the opening area of another layer to form the hole, or one layer or the layer with which the heat sink abuts is formed. It is characterized in that a cross-sectional area of the convex portion facing the several continuous layers included therein is made larger than a cross-sectional area facing the other layers.

【0005】[0005]

【作用】本発明では、穴と凸部との間の隙間が、ヒート
シンクの一つの層の開口面積と他の層の開口面積との差
に相当する値、あるいは、これらの層に対向する凸部の
断面積の差に相当する値以下にならないように制限され
る。従って、各値を適正化することにより、めっき洗浄
液等が残留し易い狭隘な隙間の発生が回避される。
According to the present invention, the gap between the hole and the convex portion has a value corresponding to the difference between the opening area of one layer of the heat sink and the opening area of the other layer, or the convex area facing these layers. It is restricted so that it does not become less than or equal to the value corresponding to the difference in cross-sectional area of the parts. Therefore, by optimizing each value, it is possible to avoid the occurrence of a narrow gap in which the plating cleaning liquid or the like is likely to remain.

【0006】[0006]

【実施例】以下、本発明の実施例を図面に基づいて説明
する。図1〜図3は本発明に係るセラミックパッケージ
の一実施例を示す図である。図1(a)において、10
はセラミック材料からなるパッケージ本体(以下、本
体)であり、複数のグリーンシートを積層し高温で焼き
固めて作られる。本体10には、その表裏を貫通する穴
11が形成されており、この穴11は各層のグリーンシ
ートを所要形状に切り抜くことによって形成される。穴
11は、配線パターン12を露出させるための第1の穴
11aとキャビティ用の第2の穴11bとからなり、第
2の穴11bに、金属性材料からなるヒートシンク13
の凸部13aが挿入されている。凸部13の上面がIC
チップ14の搭載ステージになる。なお、15はボンデ
ィングワイヤである。
Embodiments of the present invention will be described below with reference to the drawings. 1 to 3 are views showing an embodiment of a ceramic package according to the present invention. In FIG. 1A, 10
Is a package body (hereinafter referred to as a body) made of a ceramic material, and is made by stacking a plurality of green sheets and baking at a high temperature. The main body 10 is formed with a hole 11 penetrating the front and back thereof, and the hole 11 is formed by cutting out the green sheet of each layer into a required shape. The hole 11 includes a first hole 11a for exposing the wiring pattern 12 and a second hole 11b for a cavity, and the second hole 11b has a heat sink 13 made of a metallic material.
The convex portion 13a is inserted. The upper surface of the convex portion 13 is an IC
It becomes the mounting stage of the chip 14. Reference numeral 15 is a bonding wire.

【0007】ここで、本体10の各層(焼成前のグリー
ンシートの各層)のうち、ヒートシンク13が接する
層、言い替えれば、第2の穴11bの開口部を形成する
一つの層Aまたは当該一つの層Aを含む連続した複数の
層(以下、一つの層Aで代表)の開口面積(便宜的に1
辺の長さDaで表す)は、当該一つの層A以外の開口面
積(同様に1辺の長さDb、Dcで表す)よりも小さく
なるように設定されている。すなわち、Da=Db−α
=Dc−βの関係にある。但し、αはDaとDbの差に
相当する値、βはDaとDcの差に相当する値である。
Here, among the layers of the main body 10 (the layers of the green sheet before firing), the layer in contact with the heat sink 13, that is, one layer A forming the opening of the second hole 11b or the one layer concerned. The opening area of a plurality of continuous layers including the layer A (hereinafter, represented by one layer A) (for convenience, 1
The side length Da is set to be smaller than the opening area other than the one layer A (similarly represented by one side length Db and Dc). That is, Da = Db-α
= Dc-β. However, α is a value corresponding to the difference between Da and Db, and β is a value corresponding to the difference between Da and Dc.

【0008】従って、ヒートシンク13が例えば、図1
(b)に示すように図中左側に片寄った場合には、シー
トシンク13の凸部13aと第2の穴11bの間の隙間
Lbが上記差値α/2で制限される(α/2以下になら
ない)から、めっき洗浄液等が残留し易い狭隘な隙間の
発生を回避でき、周辺のめっき部分に腐食等の悪影響を
与えない高品質のヒートシンク付セラミックパッケージ
を提供できる。
Therefore, the heat sink 13 is, for example, as shown in FIG.
As shown in (b), when the sheet is deviated to the left side in the drawing, the gap Lb between the convex portion 13a of the sheet sink 13 and the second hole 11b is limited by the difference value α / 2 (α / 2. Therefore, it is possible to provide a high quality ceramic package with a heat sink that can avoid the occurrence of a narrow gap in which a plating cleaning liquid or the like is likely to remain and which does not adversely affect the surrounding plated portion such as corrosion.

【0009】なお、上記の実施例では、第2の穴11b
の開口部面積だけを小さくしているが、これに限るもの
ではなく、例えば図2(a)に示すように、第2の穴1
1b’の開口部側から順次に開口面積を小さくしてもよ
い。すなわち、第2の穴11bの壁面に階段状の傾斜を
付けてもよい。また、図2(b)に要部の平面図を示す
ように、一つの層Aを凸部13aの各辺に平行させて開
口(破線X参照)してもよいし、凸部13aの各コーナ
ごとに傾斜させて開口(1点鎖線Y参照)してもよい。
In the above embodiment, the second hole 11b is used.
Although only the opening area of the second hole 1 is made smaller, the present invention is not limited to this. For example, as shown in FIG.
The opening area may be sequentially reduced from the opening side of 1b '. That is, the wall surface of the second hole 11b may be provided with a stepwise inclination. Further, as shown in the plan view of the main part in FIG. 2B, one layer A may be parallel to each side of the convex portion 13a and opened (see the broken line X), or each of the convex portions 13a may be opened. You may incline and open for every corner (refer to the dashed-dotted line Y).

【0010】または、図3に示すように、ヒートシンク
の凸部の断面積を変えるようにしてもよい。すなわち、
図3において、本体20の各層(焼成前のグリーンシー
トの各層)のうち、ヒートシンク21が接する層、言い
替えれば、穴22の開口部を形成する一つの層Bまたは
当該一つの層Bを含む連続した複数の層(以下、一つの
層Bで代表)に対向する凸部21aの断面積(便宜的に
1辺の長さDa’で表す)を、当該一つの層B以外の層
に対向する同凸部21aの断面積(同様に1辺の長さD
b’で表す)よりもαだけ大きくなるように設定しても
よい。
Alternatively, as shown in FIG. 3, the cross-sectional area of the convex portion of the heat sink may be changed. That is,
In FIG. 3, among the layers of the main body 20 (the layers of the green sheet before firing), the layer to which the heat sink 21 is in contact, in other words, one layer B forming the opening of the hole 22 or a continuous layer including the one layer B. The cross-sectional area (represented by the length Da ′ of one side for convenience) of the convex portion 21a facing the plurality of layers (hereinafter, represented by one layer B) faces the layers other than the one layer B. The cross-sectional area of the convex portion 21a (similarly to the length D of one side)
The value may be set to be larger by α than the value represented by b ′).

【0011】このようにしても、ヒートシンク21が例
えば図中左側に片寄った場合には、シートシンク21の
凸部21aと穴22bの間の隙間が上記差値α/2で制
限される(α/2以下にならない)から、前記実施例と
同様の効果を得ることができる。
Even in this case, when the heat sink 21 is displaced to the left side in the drawing, for example, the gap between the convex portion 21a of the sheet sink 21 and the hole 22b is limited by the difference value α / 2 (α Therefore, it is possible to obtain the same effect as the above-mentioned embodiment.

【0012】[0012]

【発明の効果】本発明によれば、以上のように構成した
ので、めっき洗浄液等が残留し易い狭隘な隙間の発生を
回避でき、高品質のヒートシンク付セラミックパッケー
ジを提供することができる。
EFFECTS OF THE INVENTION According to the present invention, since it is configured as described above, it is possible to avoid the generation of a narrow gap in which the plating cleaning liquid and the like tend to remain, and to provide a high quality ceramic package with a heat sink.

【図面の簡単な説明】[Brief description of drawings]

【図1】一実施例の構造図および要部詳細図である。FIG. 1 is a structural view and a detailed view of essential parts of an embodiment.

【図2】一実施例の変形例を示すその要部詳細図および
要部平面図である。
FIG. 2 is a detailed view and a plan view of relevant parts showing a modified example of the embodiment.

【図3】他の実施例の構造図である。FIG. 3 is a structural diagram of another embodiment.

【図4】従来例の構造図および要部詳細図である。4A and 4B are a structural view and a detailed view of a main part of a conventional example.

【符号の説明】[Explanation of symbols]

A、B:一つの層 10、20:パッケージ本体 11、22:穴 13、21:ヒートシンク 13a、21a:凸部 14:ICチップ A, B: One layer 10, 20: Package body 11, 22: Hole 13, 21: Heat sink 13a, 21a: Convex part 14: IC chip

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】グリーンシートを積層して焼き固めたパッ
ケージ本体と、 該パッケージ本体の各層を貫通して表裏を連通する穴
と、 前記パッケージ本体の表面層または裏面層に当接すると
共に凸部を前記穴の内部に挿入してICチップ用のステ
ージを形成するヒートシンクとを具備するセラミックパ
ッケージにおいて、 前記ヒートシンクが当接する一つの層または該層を含む
いくつかの連続した層の開口面積を、他の層の開口面積
よりも小さくして前記穴を形成したことを特徴とするセ
ラミックパッケージ。
1. A package body in which green sheets are laminated and baked, a hole penetrating each layer of the package body to communicate the front and back sides, and a convex portion which is in contact with a front surface layer or a back surface layer of the package body. In a ceramic package comprising a heat sink inserted into the hole to form a stage for an IC chip, the open area of one layer with which the heat sink abuts or several continuous layers including the layer is A ceramic package in which the hole is formed with a size smaller than the opening area of the layer.
【請求項2】グリーンシートを積層して焼き固めたパッ
ケージ本体と、 該パッケージ本体の各層を貫通して表裏を連通する穴
と、 前記パッケージ本体の表面層または裏面層に当接すると
共に凸部を前記穴の内部に挿入してICチップ用のステ
ージを形成するヒートシンクとを具備するセラミックパ
ッケージにおいて、 前記ヒートシンクが当接する一つの層または該層を含む
いくつかの連続した層に対向する前記凸部の断面積を、
他の層に対向する断面積よりも大きくしたことを特徴と
するセラミックパッケージ。
2. A package main body in which green sheets are laminated and baked, a hole penetrating each layer of the package main body to communicate the front and back sides, and a convex portion abutting on a front surface layer or a back surface layer of the package main body. A ceramic package comprising: a heat sink inserted into the hole to form a stage for an IC chip, wherein the convex portion faces one layer with which the heat sink abuts or several continuous layers including the layer. The cross-sectional area of
A ceramic package characterized by having a larger cross-sectional area facing the other layers.
JP25875192A 1992-09-29 1992-09-29 Ceramic package Pending JPH06112377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25875192A JPH06112377A (en) 1992-09-29 1992-09-29 Ceramic package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25875192A JPH06112377A (en) 1992-09-29 1992-09-29 Ceramic package

Publications (1)

Publication Number Publication Date
JPH06112377A true JPH06112377A (en) 1994-04-22

Family

ID=17324586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25875192A Pending JPH06112377A (en) 1992-09-29 1992-09-29 Ceramic package

Country Status (1)

Country Link
JP (1) JPH06112377A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990050133A (en) * 1997-12-16 1999-07-05 김영환 Ceramic package

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990050133A (en) * 1997-12-16 1999-07-05 김영환 Ceramic package

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