JPH06111747A - Specimen device for electron microscope, etc. - Google Patents

Abstract

PURPOSE:To simplify the structure of a specimen chamber and enable minute movement in the vertical direction by mounting an X-motion lever and an X-feeding mechanism on a pipe-form frame, and thereby omitting horizontal drive using any separate mechanism. CONSTITUTION:An X-driving mechanism consisting of X-driving motor 80, lever 85, etc., is mounted on a pipe-form frame 51, and a ring is installed on a pipe-form basic frame 50. As a result, the frame 50 moves in the axial direction to generate an axial movement. That is, X-motion lever and X-feeding mechanism are installed on the frame 51 which is driven eucentrically while borne spherically by a cylindrical supporting member 40, and thereby it is possible to make the four-axis eucentric goniometer with the X, Y, Z movement and X-axis tilting. Accordingly the four-axis eucentric can be moved by the single body of a goniometer, which allows omitting horizontal drive made by any separate mechanism, and the structure of a specimen chamber 34 can be simplified, and minute movement in X-direction be achieved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample device such as an electron microscope.

[0002]

2. Description of the Related Art A conventional side entry type goniometer will be described with reference to FIG.

FIG. 7 is a view showing a cross section perpendicular to the electron beam optical axis of the electron microscope, and FIG. 8 is a view showing a cross section parallel to the electron beam optical axis.

The direction of the electron beam optical axis is the Z axis, the axis direction of the sample device is the X axis, and the direction perpendicular to the axis of the sample device is the Y axis. The Y-axis and Z
A shaft drive unit is provided, and the entire shaft is supported by the frame by a spherical bearing 22. The Y-axis drive unit drives the Y-axis drive lever 12 shown in FIG. 7 in the Y-axis direction by a drive motor (not shown) to move the shaft 11 in the Y-direction against the spring 13a, and the tip of the shaft 11 is moved. The sample operating rod 15 connected to the section is displaced to displace the sample in the sample chamber 14 in the Y direction. To move in the Z-axis direction, as shown in FIG. 8, the Z-axis drive unit 16 rotates the Z-axis drive lever 17 around the fulcrum 18 to move the shaft 11 in the Z direction against the spring 13b. ing. This Y movement,
The Z movement is performed by the spherical bearing 22.

Tilt (tilt) about the X axis is performed by an X axis tilt unit 19. As shown in FIG. 8, the worm gear 20 is rotationally driven by the X-axis tilting unit 19, the rotary gear 21 engaged with the worm gear 20 is rotated, and the shaft 11 is rotationally driven. As a result, the sample is rotated around the X-axis. Incline.

The movement in the X-axis direction is carried out by an X-axis drive unit (not shown) by means of an X-axis drive lever 26 which rotates about a fulcrum (FIG. 7). In this case, the movement from the holder side to the sample chamber side is performed. The lever 26 moves from the sample chamber side to the holder side by the pressure difference between the sample chamber and the atmospheric pressure. The X, Y, Z movements and the X-axis tilt are performed in a four-axis eucentric manner, and the vacuum side of the sample chamber and the atmosphere side of the sample apparatus are vacuum-sealed by Viton O-rings 23, 24, 25.

[0007]

In the conventional side end re-type goniometer, the X movement (axial direction) is caused by another mechanism not incorporated in the goniometer, so that a separate horizontal driving mechanism is required. The structure of the room was complicated. Further, it is extremely difficult to make a minute horizontal movement by a mechanical deceleration mechanism different from the goniometer.

The present invention is intended to solve the above problems. By incorporating an axial movement mechanism in a goniometer, another axial drive mechanism is not required, the structure of the sample chamber is simplified, and the horizontal direction is maintained. It is an object of the present invention to provide a sample device such as an electron microscope capable of performing a minute movement of.

[0009]

SUMMARY OF THE INVENTION The present invention is a side entry goniometer mounted through a wall of a sample chamber, supported by a spherical bearing formed on the inner surface of a cylindrical body, and at least by the Y-axis driving means and the Z-axis driving means. A first hollow pipe swinging about the center of the first hollow pipe, and a second hollow pipe coaxially provided in the first hollow pipe,
It is characterized in that X-axis drive means for driving the second hollow pipe in the axial direction is mounted on the first hollow pipe.

[0010]

According to the present invention, by mounting the X-motion lever and the X-motion feed mechanism on the shaft of a goniometer that performs the Y-motion, Z-motion and X-tilt eucentrically, the goniometer can be used as a single unit.
It can be axial eucentric, does not require an axial drive mechanism separate from the goniometer, and allows the structure of the sample chamber to be simplified.

[0011]

Embodiments Embodiments will be described below with reference to the drawings. 1 is a cross-sectional view of the sample device of the present invention perpendicular to the electron beam optical axis, FIG. 2 is a cross-sectional view of the sample device in the electron beam optical axis direction, FIG. 3 is a diagram for explaining X movement, and FIG. 4 is Z. 5 is a diagram for explaining the Z motion, FIG. 5 is a diagram for explaining the Z motion, and FIG. 6 is a diagram for explaining the Y motion. In the figure, 31 is a sample holder, 32 is a sample holder cradle, 33 is a sample chamber wall, 34 is a sample chamber, 40
Is a cylindrical support, 41 is a spherical bearing, 42 is a metal bellows, 43 is a metal O-ring, 44 is a bearing, 45 is a block, 46 is a bearing, 50 is a pipe-shaped basic frame, 51 is a pipe-shaped frame, and 52 is a spherical surface. Bulge,
54 is a magnet, 55 is an X-axis tilt pipe, 56 is a magnet, 57 is an X-axis tilt gear, 58 is an X-axis tilt unit, 60 is a Y-axis drive lever, 61 is a spring, 6
2 is a Y-axis drive motor, 63 and 64 are gears, 65 is a screw, 66 is a slider, 70 is a Z-axis drive motor, 71,
72 is a gear, 73 is a feed screw, 74 is a slider, 75 is a lever, 76 is a fulcrum, 77 is a spring, 80 is an X-axis drive motor, 81 and 82 are gears, 83 is a screw, 84 is a slider, and 85 is a lever. , 86 is a spindle, 87 is a fulcrum, 88 is a shaft, 89 is a ring, 90 is a Y-axis tilting motor, 91, 9
2 is a gear, 93 is a screw, 94 is a shaft, and 95 is a metal bellows.

1 and 2, a sample holder 31 is attached to a sample holder pedestal 32 at the tip of the sample device,
It is inserted into the sample chamber 36 through the sample chamber wall 33. In the sample device, a pipe-shaped basic frame 50 having an axis perpendicular to the electron beam optical axis is provided in a cylindrical support 40 having a spherical bearing 41 on the inner surface of the tip portion, and a pipe-shaped frame provided around the pipe-shaped basic frame 50. The spherical bulging portion 52 of 51 is the spherical bearing 41.
It is swingably supported by. Pipe-shaped basic frame 5
An X-axis tilting pipe 55 having a magnet 56 magnetically coupled with a magnet 54 attached to the pipe-shaped frame 51 is provided inside the pipe 0.
It follows the rotation of 1 and rotates. Further, a Y-axis sample tilting shaft 94 is provided in the pipe 55. The pipe-shaped basic frame 50 is attached to one end of a metal bellows 42 that allows movements such as X, Y, and Z movements, and the other end of the bellows 42 is fixed to a cylindrical support body 40 so that the sample chamber and the sample device can be operated. A vacuum seal is made with the atmosphere side.

Further, the bearing portion for the pipe-shaped frame 51 of the cylindrical support 40 is the center of Y, Z movement,
Atmospheric pressure applied to the bellows 42 is applied to the bearing surface, and the spherical surface of the pipe-shaped frame 51 is pressed against it. A pipe-shaped frame 51 is provided on the outer peripheral portion of the pipe-shaped basic frame 50.
Is provided, and a Y motion is obtained by pushing the pipe-shaped frame 51 in the Y direction with a lever for driving the Y axis.

That is, FIG. 6 which is a sectional view taken along line CC of FIG.
With reference to FIG.
64 is driven to rotate, and the screw 65 rotates to slide the slider 66. As a result, the lever 60 moves to the fulcrum 60.
A spring 61 which is rotated around a and is provided on the opposite side
To move the pipe-shaped frame 51 in the Y-axis direction,
The movement to the opposite side is performed by the spring 61, and thus the sample is moved in the Y-axis direction.

The Z movement is shown in FIG. 4 seen from the direction of arrow D in FIG.
And as shown in FIG. 5, which is a sectional view taken along line AA of FIG.
The gears 71, 72 are rotationally driven by the shaft driving motor 70, the feed screw 73 is rotated and slid, and the Z-axis lever 75 is rotated about a fulcrum 76, so that the pipe-shaped frame 51 is displaced in the Z-axis direction. It has become. At this time, the movement to the opposite side is performed by the spring 77, and thus the sample can be moved in the Z-axis direction.

A bearing 45 is attached to the block 45 in FIG. 1 to form a bearing for tilting the X-axis, and the block 45 is slightly moved by a means (not shown) to adjust the axis of the entire goniometer ( Eucentric matching) is possible.

As for the X-axis tilt, the worm gear 59 and the tilt gear 57 are rotationally driven by the X-axis tilt drive unit 58, and as a result, the pipe-shaped frame 51 is rotationally driven and the magnet 54 is rotated. By rotating the magnet 56 to be coupled, the X-axis tilting pipe 55 to which the magnet 56 is attached rotates to tilt the sample about the X-axis. At this time, the bearing 46 serves as a rotary bearing for the pipe 55.

Next, the X movement will be described. As shown in FIGS. 1 and 3A, the X axis drive motor 80 rotationally drives the gears 81 and 82, and as a result, the screw 83 rotates, the slider 84 moves. Moves axially, lever 85
Is swung around the support shaft 86. As shown in FIG. 3B, which is a cross-sectional view taken along the line BB of FIG. 1, a lever 85 swinging around a support shaft 86 is provided with support points 87 made of bearings on the left and right, and the pipe-shaped basic frame 51 The attached ring 89 is adapted to be pushed in the axial direction.

The X-axis drive mechanism including the X-axis drive motor 80 and the lever 85 is attached to the pipe-shaped frame 51, and the ring 89 is attached to the pipe-shaped basic frame 50. As a result, the pipe-shaped basic frame 50 moves in the axial direction, and the axial movement is obtained. The movement at this time is allowed by the bellows 42 while maintaining a vacuum. The fulcrum 87 serves as a bearing, and as shown in FIG. 2, the fulcrum 87 rotates about a shaft 88 and rotatably engages with a ring 89.

In this way, the pipe-shaped frame 5 which is spherically supported by the cylindrical support member 40 and is eucentrically driven.
By attaching the X motion lever and the X motion feed mechanism to 1,
A 4-axis eucentric goniometer with X, Y, Z movement and X-axis tilt is possible.

A shaft 94, one end of which is connected to the metal bellows 95, is provided in the pipe 55. As shown in FIG. 2, when the gear 92 is rotated by the Y-axis tilt drive motor 91 via the gear 91, the screw 93 moves back and forth, which causes the shaft 94 to move back and forth. The back and forth movement of the shaft 94 is allowed by the metal bellows 95, and the vacuum sealing of this portion is performed. As a result, the sample holder 31 is rotated around the Y axis by a mechanism (not shown).

Explaining the method of operating the sample holder, the axial alignment of the entire goniometer, that is, the eucentric alignment, is performed by finely moving the block 45 by a mechanism (not shown). In the X movement, the motors 80 are driven to rotate the gears 81 and 82 and the screw 83, and as a result, the slider 83 is moved to swing the lever 85 around the support shaft 86, and the pipe-shaped basic frame is supported at the support point 87. Fifty
The sample is moved in the X-axis direction by pressing the ring 89 attached to the. Regarding the Y movement, the Y-axis drive motor 62 is rotated, the slider 66 is moved through the gears 63 and 64, and the screw 65, and the lever 60 moves in the Y-axis direction against the spring 61 on the opposite side. To do. For the Z movement, the lever 70 is rotated by the motor 70 about the fulcrum 76 via the gear to move the pipe-shaped frame 51 in the Z-axis direction against the force of the spring 77.

The inclination about the X-axis can be achieved by rotating the X-axis inclination drive unit 58 to rotate the pipe-shaped frame 51 via the worm gear 59 and the gear 57 to rotate the magnet attached to the pipe-shaped frame 51. This is done by rotating the pipe 55. The tilt of the sample about the Y-axis is adjusted by the motor 90 with the knob 9.
2 is rotated to move the screw 93 back and forth, and the shaft 94 provided in the pipe 55 is moved back and forth.

[0024]

As described above, according to the present invention, by mounting the X-moving lever and the X-moving feed mechanism on the spherical shaft of the conventional goniometer, a 4-axis eucentric goniometer becomes possible, and the conventional 4-axis can be used. In order to make it eucentric, three axes of Y movement, Z movement, and X axis inclination were moved by a goniometer by a single axis (X movement) horizontal drive. However, according to the present invention, it is possible to move a four axis eucentric by a goniometer alone. Therefore, horizontal driving by a separate mechanism is not required, the structure of the sample chamber can be simplified, and minute movement in the X direction can be realized.

[Brief description of drawings]

FIG. 1 is a sectional view perpendicular to an electron beam optical axis of a sample device of the present invention.

FIG. 2 is a cross-sectional view of the sample apparatus in the electron beam optical axis direction.

FIG. 3 is a diagram for explaining an X movement.

FIG. 4 is a diagram for explaining a Z movement.

FIG. 5 is a diagram for explaining Z movement.

FIG. 6 is a diagram for explaining a Y movement.

FIG. 7 is a diagram illustrating a conventional side entry type goniometer.

FIG. 8 is a diagram illustrating a conventional side entry type goniometer.

[Explanation of symbols]

31 ... Sample holder, 32 ... Sample holder cradle, 33 ... Sample chamber wall, 34 ... Sample chamber, 40 ... Cylindrical support, 41 ... Spherical bearing, 42 ... Metal bellows, 50 ... Pipe-shaped basic frame, 51 ... Frame , 52 ... Spherical bulge, 54 ... Magnet, 55 ... X-axis tilting pipe, 56 ... Magnet, 57 ... X-axis tilting gear, 58 ... X tilting unit,
60 ... Y-axis drive lever, 61 ... Spring, 62 ... Motor, 70 ... Z-axis drive motor, 75 ... Lever, 76 ... Support point, 77 ... Spring, 80 ... X-axis drive motor, 85
… Lever, 86… Support shaft, 87… Support point, 89… Ring, 90
... Y-axis tilting motor, 94 ... Shaft, 85 ... Metal bellows.

Claims (1)

[Claims] 1. A side-entry goniometer mounted through a sample chamber wall, which is supported by a spherical bearing formed on the inner surface of a tubular body and swings about the bearing by at least a Y-axis driving means and a Z-axis driving means. 1
And a second hollow pipe coaxially provided in the first hollow pipe, and X-axis driving means for axially driving the second hollow pipe is mounted on the first hollow pipe. A sample device such as an electron microscope.