JP2895673B2 - Sample equipment such as electron microscope - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample apparatus such as an electron microscope, and more particularly to a sample apparatus which can rotate a sample mounting table by linearly moving a shaft of a sample receiving table.

[0002]

2. Description of the Related Art A conventional side entry type goniometer is provided with a driving device for driving a sample operation shaft in the direction of the electron beam optical axis and in the direction perpendicular to the electron beam optical axis on the outer periphery of the sample operation shaft having a spherical bearing. At the same time, a structure in which the sample operation shaft is movable in the axial direction and the sample holder is mounted from the goniometer side is used.

When such a goniometer is used in an ultra-high vacuum apparatus, an O-ring must be used for sealing the vacuum of the goniometer and the sample holder, and gas release from the O-ring is large. The maximum temperature was 100 to 120 ° C., and it was difficult to achieve an ultra-high vacuum due to gas permeation and the like.

Accordingly, the present applicant has already filed an application for a sample apparatus in which all pieces are metal-sealed as a goniometer for ultra-high vacuum (Japanese Patent Application No. 2-292633). This sample device with a metal seal will be described with reference to FIGS.

FIG. 3 is a sectional view of the sample device perpendicular to the electron beam optical axis, and FIG. 4 is a sectional view of the sample device in the electron beam optical axis direction. In FIG. 3, the tip of the sample apparatus is inserted into a sample chamber 36 through a sample chamber wall 35, and a magnet 12 is inserted into a hollow pipe-shaped frame 31 having an axis perpendicular to the electron beam optical axis.
, An X-axis tilting pipe 26 that is driven to rotate is provided, and a Y-axis sample tilting shaft 2 is further provided in the pipe 26.
5 are provided. The frame 31 is a basic frame attached to one end of a metal bellows 2 that allows movements such as X, Y, and Z movements. The other end of the bellows 2 is fixed to a sample device, and the sample room and the atmosphere side of the sample device are fixed. And vacuum sealing. Further, the frame 8 provided integrally with the frame 31 around the frame 31 is provided with a spherical bulge,
Rolled by a spherical bearing 27. This bearing part is the center of the Y and Z movements, and the bearing part is always provided with the atmospheric pressure applied to the bellows 2 and the spring 28.
The spherical surface of the frame 8 is pressed against 7.

[0006] A frame 8 is attached to the outside of the outer peripheral member of the frame 31 so that the frames 8 and 31 can be simultaneously moved in the same direction. Yields a Y motion.

As for the Z movement, as shown in FIG. 4, a gear 42 is driven to rotate by a Z-axis driving motor (not shown), and as a result, a screw 43 is driven and a slider 44 slides, and The lever 44 rotates around the fulcrum to displace the frame 8 in the Z-axis direction. The movement to the opposite side is performed by the spring 22, and the sample is moved to Z
It can be moved in the axial direction.

A bearing 3 is attached to the block 5 (FIG. 3) to provide a bearing for tilting the X-axis. The block 5 is pushed by a screw 4 so that the entire goniometer can be aligned (eucentric alignment). ) Can be done.

Regarding the X-axis tilt, the X-axis tilt guide 9
The worm gear 61 and the tilting gear 6 are driven to rotate by the X-axis tilting motor 60. As a result, the guide 9 is guided by the guide 10 via the frame 62, and rotates. Cover 11 is driven to rotate. A magnet 12 is attached to the tilting cover 11, and a magnet 12 magnetically coupled to the magnet is provided in a frame 31, and the rotation of the guide 9 causes the magnet 12 to rotate. Can be tilted around the X axis.
At this time, the bearing 13 includes the magnet 12 and the pipe 26.
Bearing.

Further, the guide 10 is removed and the cover 1 for tilting is removed.
By rotating the pipe 1, the pipe 26 can be rotated 360 ° endlessly. Therefore, if the stopper called the guide 10 is removed, the sample holder can be arbitrarily rotated with respect to the X axis.

For the X movement, a gear 18 is attached to the frame 8, and the inner surface of the gear 18 is screw-coupled to the frame 8.
By rotating the frame 8, the frame 8 and the tilt cover 11 can be moved in the X-axis direction by screw driving, and the frame 31 moves integrally with the frame 8 to move the sample in the X-axis direction. it can.

The frame 31 is provided with a shaft 25 having one end connected to the metal bellows 14 inside a pipe 26 in order to incline the sample around the Y axis. When the knob 16 is turned by a motor (not shown), the screw 15 moves forward and backward, and thereby the shaft 25 moves forward and backward. Shaft 2
The forward and backward movement of 5 is allowed by the metal bellows 14, and a vacuum seal of this portion is performed. Shaft 2
5, the operating rod 20 provided at the tip of the shaft 25 moves back and forth, and the operating rod 20 moves the lever 21 to the shaft 21a.
The sample holder 23 is rotated about the Y axis by rotating the sample holder 23 around the center. The return of the sample holder 23 around the Y axis is performed by a spring 38.

The sample holder 23 is supported on the opposite side by a sample holder receiving table 29 supported by a receiving table support 24, and is supported so as to be movable as the sample holder moves. Then, by cooling the sample holder receiving side, the sample holder can be cooled.

Next, an operation method for moving the sample stage holder will be described. Alignment of the entire goniometer, that is, eucentric alignment, is performed by adjusting the screw 4 and pushing the block 5. In the X movement, when the gear 18 is rotated by driving the motor 19, the frame 8 is screwed to the gear, so that the frame 31 integrated with the frame 8 moves in the X-axis direction. As for the Y movement, the movement in the Y axis direction can be performed against the force of the spring 22 on the opposite side by adjusting the screw 7 for driving the Y axis. As for the Z motion, the frame 31 can be moved in the Z-axis direction against the force of the spring 22 by rotating the lever 45 about the fulcrum by a motor via a gear.

By rotating the motor 60, the tilt cover 11 is rotated via the worm gear 61 and the frame 62 to rotate the tilt cover 11 around the X axis.
By rotating the magnet 2, the magnet provided in the frame 31 is rotated, thereby rotating the pipe 26. The tilt of the sample around the Y axis is controlled by knob 1.
By rotating the screw 6, the screw 15 is moved back and forth, and the shaft 25 provided in the pipe 26 is moved back and forth.

In this manner, the sample can be moved in a 5-axis eucentric manner in which the X, Y, and Z motions, the tilt around the X axis, and the tilt around the Y axis are performed. Can be carried out while holding.

[0017]

SUMMARY OF THE INVENTION In the ultrahigh vacuum goniometer with a metal seal shown in FIGS.
The conventional type of sample holder structure cannot be used, and it is necessary to set a cradle for receiving the sample holder, to reduce the size of the sample holder, and to make the chip exchangeable. Further, although the conventional sample apparatus can perform sample tilt, it was impossible to rotate the sample.

The present invention has been made to solve the above-mentioned problems, and a sample holder such as an electron microscope which can be rotated and rotated while being transported and mounted in an ultra-high vacuum on a sample holder in a miniaturized and chip-shaped sample holder. It is intended to provide a device.

[0019]

According to the present invention, a hollow frame supported by a spherical bearing and having one end connected to a metal bellow for sealing a sample chamber and the atmosphere is provided on an outer peripheral portion of the hollow frame. A side entry goniometer for driving the hollow frame itself by the driving means and moving the sample by driving the hollow pipe provided in the hollow frame by magnetic coupling, the pusher attached to the tip of the hollow pipe. Lever driven by a rod,
It has a structure that is equipped with a sample mount that is pushed and rotated by a lever, a spring that is connected to the sample mount, and that returns the sample mount that has been rotated, and that can rotate the sample by linear movement of the push rod. Features.

[0020]

According to the present invention, a lever driven by a push rod, a sample mount supported by rollers, and rotated by being pushed by the lever, a spring connected to the sample mount and returning the rotated sample mount, A sample holder composed of electrodes connected to the sample mounting table and capable of absorbing the rotation of the sample mounting table. The sample holder is downsized and chipped so that it can be mounted on the sample receiving table provided at the tip of the goniometer. The sample mounting table supported by the rollers can be rotated by the linear movement of the operating rod. The goniometer is 3
The sample holder can be tilted by 60 °, and after the sample holder is mounted on the sample holder, it is rotated by 90 ° to make the sample surface almost parallel to the electron beam optical axis. In this case, it is possible to see the reflection images from various angles by rotating the sample.

[0021]

1 is an overall view of a sample apparatus according to the present invention, and FIG. 2 is a view showing details of the sample apparatus according to the present invention. In the figure, 29 is a sample receiving table, 71 is an operation rod, 72 is a contact, 74 is a heating lead wire, 80 is a sample holder, 81 is an electrode, 82a, 82
b and 82c are rollers, 83 is a sample mount, 85 is a spring,
86 is a lever, 87 is an insulator, 88 is a sample, 90a, 9
0b is a divided piece, and 91a and 91b are sample holders. FIG. 2A is a plan view when the lid of the sample holder is removed,
FIG. 2B is a cross-sectional view, and FIG. 2C is a rear view.

In FIG. 1, a sample holder 80 is attached to a sample receiving table 29 provided at the tip of a goniometer.
It is configured to be pushed in the X direction by the operation rod 71 connected to the tip of the hollow pipe described in FIGS.
The sample holder 29 is provided with electrical contacts 72 to which heating leads 74 are connected. When the sample holder 80 is mounted on the sample holder 29, the electrodes of the sample holder are connected to these contacts as described later. It is connected so that the sample can be electrically heated.

FIG. 2A shows a state in which the lid of the sample holder 80 is removed, and the circular sample mounting base 83 has three rollers 82.
a, 82b, and 82c, and a split piece 90b integrated with the sample mount 83 by the lever 86 when the operating rod 71 is pressed.
, A rotating force is applied to the sample mounting table, and at the same time, a spring 85 is connected to the sample mounting table so that the sample mounting table can return in a counterclockwise direction. Also, a divided piece 90a integral with the sample mounting table 83
The sample mounting table 83 is capable of absorbing the rotation when the sample mounting table 83 rotates, and as shown in FIG. I have. The split piece 90a is electrically floating on the insulator 87, while the split piece 90b is at the ground level, and the sample is energized and heated through this split piece.

The sample holder having such a structure is miniaturized and formed into a chip, and is attached to the sample receiving table 29. The contacts 72 and 73 of the sample receiving table 29 come into contact with the corrugated electrode 81 with the sample holder set, and the electrode 8
1, the entire sample holder is pressed against the operation rod 71 to prevent the sample holder from rattling.

In such a configuration, when the miniaturized and chipped sample holder 80 is set on the sample receiving table 29, the electrode 81 floating on the insulator 87 comes into contact with the contact 72, and the sample is energized and heated. can do. In addition, it is possible to view the reflection image of the sample surface while rotating the sample by pressing the operation rod 71 while irradiating the sample with the sample in a state where the sample is substantially parallel to the electron beam optical axis by the rotation about the axis described above. is there. Further, since the sample holder is miniaturized and made into a chip, it is possible to transfer the sample holder to the sample chamber simply by setting it on the sample receiving table.

[0026]

As described above, according to the present invention, the sample holder can be reduced in size and formed into chips, which can be transported and mounted on the sample receiving table in an ultra-high vacuum. The sample can be rotated by moving the lever of the sample holder by moving it linearly and rotating the sample mount.

[Brief description of the drawings]

FIG. 1 is an overall view of a sample device of the present invention.

FIG. 2 is a diagram showing details of a sample device of the present invention.

FIG. 3 is a view showing a conventional metal-sealed sample device.

FIG. 4 is a view showing a conventional metal-sealed sample device.

[Explanation of symbols]

29: sample receiving table, 71: operation rod, 72: contact, 74: heating lead, 75: high pressure lead, 80: sample holder, 81: electrode, 82a, 82b, 82c: roller, 8
3 ... Sample mounting table, 85 ... Spring, 86 ... Lever, 87 ... Insulator, 88 ... Sample, 90a, 90b ... Split piece, 91a,
91b: Sample holder.

Claims (1)

(57) [Claims] 1. A hollow frame supported by a spherical bearing and having one end connected to a metal bellow for sealing a sample chamber and the atmosphere, wherein the hollow frame itself is driven by driving means provided on an outer peripheral portion of the hollow frame. A side entry goniometer for driving and moving a sample by driving a hollow pipe provided in a hollow frame by magnetic coupling, wherein the lever is driven by a push rod attached to the tip of the hollow pipe. It has a structure that can be rotated by pushing the sample mounting base, a spring connected to the sample mounting base to return the rotated sample mounting base, and the sample can be rotated by the linear movement of the push rod. A sample device such as an electron microscope.