JPH07302831A - Sample holder - Google Patents

Abstract

PURPOSE:To process wafers of different sizes and shapes on the same sample holder. CONSTITUTION:A stopper A2 is fixed to a predetermined position of a main body 1 of a sample holder for determining the position of a wafer 6. A stopper B5 is pressed the wafer 5 fixed to a slider 4 and fixes its position. The slider 4 is attached to an arm 7 and moves by following the movement of the arm. A fulcrum 8 and a vacuum movable cylinder 3 are connected to both the ends of the arm 7, and the expansion and contraction of the vacuum movable cylinder are transmitted to the slider 4. Positions of stoppers A and B are changed depending upon the size of wafer. By doing this, various wafers with different sizes to small samples can be held by one holder so that this is very economical and also efficient.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to improvement of a holder for holding a wafer in an apparatus for holding and processing silicon wafers having different sizes such as a focused ion beam apparatus.

[0002]

2. Description of the Related Art Conventionally, when holding silicon wafers having different sizes, another dedicated holder has been used.

[0003]

When using wafers of different sizes or samples of different shapes, such as a focused ion beam apparatus, it is possible to replace the sample holder without changing the sample holder.
Process with the same holder.

[0004]

In order to solve the above problems, in the sample holder of the present invention, a plurality of stoppers which meet the wafer standard are provided on the surface of the holder, and only the stoppers which meet the wafer standard to be held are effective. Then, one of the stoppers has a structure in which the wafer is pressed in the direction of the other stopper by evacuation.

[0005]

The stopper A is fixed to a predetermined position of the sample holder body in advance in order to determine the position of the sample (wafer). The stopper B is fixed to the slider 4 and presses the wafer 6 to fix its position. The slider 4 is rotatably attached to the arm 7 and moves as the arm moves. Arm 7 has fulcrums 8 at both ends,
The vacuum movable cylinder 3 is connected to the slider 4, and the expansion and contraction of the vacuum movable cylinder is transmitted to the slider 4.

The positions of the stoppers A and B are changed according to the size of the wafer.

[0007]

EXAMPLE FIG. 1 shows an example of the present invention. Stoppers A2 are inserted at three points of the sample holder body 1. Two of them are in the orientation flat part and the other one is 90 in the counterclockwise direction.
It is fixed at a position in contact with the outer circumference of the 8-inch wafer. Slider 4 located further 135 degrees from this point
Stopper B5 is located at the upper 8 inch point.
The slider 4 is connected to the end of the arm 7 by a fulcrum which can rotate. A vacuum movable cylinder 3 is rotatably supported at the other end of the arm, and a fulcrum 8 with the main body is attached at an intermediate point of the arm. The vacuum movable cylinder 3 is composed of a bellows, and the other end thereof is rotatably connected to the main body. When the sample holder is introduced into a vacuum with a wafer of 8 inches placed on it, the external pressure of the bellows decreases and the vacuum movable cylinder 3 expands and presses the stopper B5. As a result, the wafer is fixed. When mounting wafers of different sizes, change the position of the stopper. When changing the position of the stopper, see Fig. 2.
This can be done by manually inserting and removing the pin 2 as shown in FIG. For example, when mounting a 6 inch wafer, the stopper A and the stopper B are moved to a 6 inch place. Another method of changing the position of the pin is achieved by pushing down the pin where the wafer 6 is placed as shown in FIG. 3 by the weight of the wafer. Other methods of changing the pin position are to change the position with screws and adjust the height with screws. The vacuum movable cylinder can achieve the same function with a simple spring, but since it is not driven by vacuum, it is necessary to press it in the atmosphere and move the fulcrum 8 to the position 8 '. As described above, if the shared holder of the present invention is used, wafers of different sizes can be held by one holder, which is economical because it is not necessary to prepare many kinds of holders. Also, the processing efficiency of work is improved.

Next, the case of mounting a sample other than a wafer will be described. In this case, the second sample holder 10 shown in FIG. 4 is attached to the location of the 3-inch wafer by the same method. In FIG. 4, the sample A11 and the sample B12 are fixed to the screw A13 and the screw B14, respectively, with an adhesive tape or the like. The height of the sample can be adjusted by rotating the screw. Also, a sample having a special shape can be dealt with by changing the shape of the second sample holder 10 without changing the outer dimensions. By using this holder, not only wafers but also small samples and samples with different heights can be mounted in the same holder.

[0009]

By using the sample holder of the present invention, various wafers of different sizes to small samples can be held by one holder, which is very economical and efficient.

[Brief description of drawings]

FIG. 1 is a plan view of a sample holder of the present invention.

FIG. 2 is a sectional view of a pin portion for explaining replacement of a pin.

FIG. 3 is a sectional view of a pin portion for explaining second pin replacement.

FIG. 4 is a view showing a plane and a cross section of a sample holder for holding a sample having a special shape.

[Explanation of symbols]

1 ... Sample holder body, 2 ... Stopper A, 3 ... Vacuum movable cylinder, 4 ... Slider, 5 ... Stopper B, 6 ...
Wafer, 7 ... arm, 8 ... fulcrum, 9 ... spring, 1
0 ... second sample holder, 11 ... sample A, 12 ... sample B,
13 ... Screw A, 14 ... Screw B.

Claims (4)

[Claims] 1. A stopper A whose height can be varied at a predetermined position on a sample holder, a drive source, a slider which is moved by a force from the drive source, and a plurality of heights arranged on the slider. Equipped with a variable stopper B,
A common sample holder capable of holding a plurality of samples having different sizes according to the position where the height of the pin is increased. 2. The shared sample holder according to claim 1, wherein the means for changing the height of the stopper is implemented by replacing a pin. 3. The shared sample holder according to claim 1, wherein the means for changing the height of the stopper is performed by sinking the pin in the portion where the sample is placed by the weight of the sample. 4. The shared sample holder according to claim 1, further comprising another sample holder fixed in the same manner as the sample, and capable of holding the sample in this sample holder.