JP2000315471A - Sample holder supporting apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To highly precisely hold the position of a sample while rotating the rotating member of a goniometer. SOLUTION: This sample holder supporting apparatus has a goniometer GM provided with a holder mounting member 23 for detachably supporting a sample holder H, a holder mounting member Y-axial direction position adjusting device Iy having a Y-axial direction position adjusting member 41 adjustable for the position of the holder mounting member 23 in the Y-axial direction, a holder mounting member Z-axial direction position adjusting device Iz having a Z-axial direction position adjusting member (31+34) adjustable for the position of the holder mounting member 23 in the Z-axial direction. The Y-axial direction position adjusting member 41 and the Z-axial direction position adjusting member (31+34) are the sample holder supporting apparatus disposed such that a holder axis Y-axial direction fulcrum Py positioned in the Y-axial direction by the Y-axial direction position adjusting device Iy is placed approximately in the same position as a holder axis Z-axial direction support point Pz positioned in the Z-axial direction by the Z-axial direction position adjusting device Iz.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gonio stage fixed to a column of an electron microscope in which a path of a charged particle beam extending in the vertical direction along the Z axis is formed, and mounted on the gonio stage. More particularly, the present invention relates to a sample holder supporting device having an improved goniometer position adjusting device.

[0002]

2. Description of the Related Art FIG. 7 is a schematic explanatory view of an electron microscope provided with a conventional sample holder supporting device to which the present invention is applied.
In FIG. 7, a transmission electron microscope 01 has a lens barrel 02 whose inside is kept in a vacuum, and an electron gun 03 is provided at the upper end of the lens barrel 02.
Is provided. A Z-axis is provided along the center line of the charged particle beam emitted from the electron gun 03. At the lower end of the lens barrel 02, an observation window 04 and a fluorescent plate 05 movable between an observation position indicated by a solid line and a retracted position indicated by a two-dot chain line are provided. Further, a device for arranging a film F for photographing an electron microscope image at a photographing position is disposed below the fluorescent plate 05. A focusing lens 07 for focusing an electron beam is arranged below the electron gun 03, and an imaging lens 08 for enlarged imaging is arranged above the fluorescent screen 05. And the focusing lens 07
A goniometer GS, a goniometer GM, and a sample holder H are provided between the imaging lens 08 and the imaging lens 08.

FIG. 8 is an enlarged explanatory view of a main part of FIG. 7, and is an enlarged view of a part indicated by an arrow VIII of FIG. FIG.
FIG. 9 is a sectional view taken along line IX-IX of FIG. FIG. 10 is a sectional view taken along line XX of FIG. FIG. 11 shows XI- of FIG.
FIG. 3 is a sectional view taken along line XI. In FIG. 8, a goniometer stage GS fixed to the lens barrel 02 and constituting a part of the lens barrel 02 includes:
A path of the charged particle beam along a Z axis (vertical axis) extending in the vertical direction is formed inside. Goniometer Stage GS
Is a goniometer mounting hole 011 extending in a direction perpendicular to the Z-axis and communicating the inside and the outside of the lens barrel 02, a goniometer mounting surface 012 formed at an outer end of the goniometer mounting hole 011, and a goniometer mounting hole 011. A spherical bearing 013 provided at the inner end. The goniometer stage GS has a holder positioning member mounting hole 014 on the side opposite to the goniometer mounting hole 011.

The goniometer GM has a bearing member 016, and the bearing member 016 has a mounting surface 016a connected to the goniometer mounting surface 012 in a state of being joined thereto and a bearing hole 016b perpendicular to the mounting surface 016a. In FIG. 11, a gear holder 01 is provided on the bearing member 016.
7 is supported, and the worm gear 018 in the gear holder 017 is driven around the X axis by a motor 019 (see FIG. 11).
It rotates by the rotation of. A rotating member 021 rotatably supported by the bearing member 016 has a gear 021a meshed with the worm gear 018 on an outer peripheral portion thereof, and the rotation position can be adjusted by the X-axis driving motor 019. . 8 and 9, a holder mounting member 022 that penetrates through the holder mounting member through hole 021b of the rotating member 021 is a cylindrical member having a holder mounting hole 022a and has a spherical surface 022b at an inner end thereof, and the spherical surface 022b. Is rotatably supported by the spherical bearing 013. The holder mounting hole 022a is a hole in which the sample holder H is mounted. The axis of the holder mounting hole 022a is the same as the holder axis (the axis of the sample holder) Hx, and passes through the center O of the spherical bearing 013. The axis X of the bearing member 016 and the rotating member 021 are coaxial.

In FIG. 10, a Y-axis (left-right axis) perpendicular to the X-axis and the Z-axis is provided at the outer end of the holder mounting member 022.
A projecting member 023 extending in the direction is provided, and a central portion of the upper surface of the projecting member 023 is pressed downward by a Z-axis direction pressing member 024. 10, upper ends of a pair of left and right arms 026a, 026a of a swing member 026 supported by the rotating member 21 so as to swing around a shaft 025 (see FIG. 9) are provided on the lower surfaces of both ends of the projecting member 023. The balls 027 and 027 provided in the above are in contact with each other.

In FIG. 8, the swing member 026 includes:
The tip of a screw 028 supported by the rotating member 021 is in contact with the screw 028 and swings by the forward / backward movement of the screw 028.
The screw 028 is formed integrally with the gear 029,
Vertical movement motor 031 supported by the rotating member 21
Rotates, the gear 032 and the gear 029 and the screw 028 meshing with the gear 032 rotate. At this time, the screw 028 moves forward and backward, and the swing member 0
26 swings, and the holder axis Hx (the axis of the holder mounting member 022 and the sample holder H) Hx tilts up and down. The rocking member 026 and the screw 028 constitute a Z-axis direction position adjusting member (026 + 028).
The holder mounting member 02
2, a holder mounting member Z-axis direction position adjusting device (024 to 032) capable of adjusting the position of the outer end in the Z-axis direction. The holder mounting member Z-axis direction position adjusting device (02
4 to 032), the rotational position of the holder mounting member 022 in the vertical plane (XZ plane) around the center O of the spherical bearing 013 can be adjusted.

In FIG. 9, the outer end of the holder mounting member 022 has one side surface (right side surface) in the Y-axis (left-right axis) direction.
Y-axis direction pressing member 03 supported by the rotating member 21
6, the tip of a screw 037 (Y-axis direction position adjustment member) supported by the rotating member 21 is in contact with the other side surface (left side surface). The holder mounting member 022 swings. The screw 037 is formed integrally with the gear 038, and when the left / right movement motor 039 supported by the rotating member 021 rotates, the gear 040 and the gear 038 and the screw 037 meshing with the gear 040 rotate. At this time, the screw 037 moves forward and backward, and the holder shaft Hx
(Axis of holder mounting member 022 and sample holder H) Hx
Tilts left and right. A holder mounting member Y-axis direction position adjusting device (036 to 040) capable of adjusting the position of the outer end of the holder mounting member 022 in the Y-axis direction by the elements indicated by the reference numerals 036 to 040 is configured. The rotation position of the holder mounting member 022 around the center O of the spherical bearing 013 in the XY plane can be adjusted by the holder mounting member Y-axis direction position adjusting device (036 to 040).

In FIGS. 8 and 9, the tip end of the sample holder H mounted in the holder mounting hole 022a of the holder mounting member 022 is positioned by a holder distal end positioning member 041 mounted in the holder positioning member mounting hole 014. You. A sample (not shown) held by the sample holder H is disposed in the beam path, and an upper magnetic pole 042a and a lower magnetic pole 042b of an electron lens (objective lens) 042 are disposed above and below the sample. The sample needs to be arranged at the converging position (beam focus position) F1 of the charged particle beam.

[0009]

FIG. 12 shows the center O of the spherical bearing 013, the beam focus position F1, and the fulcrum of the holder axis Hx in the Y-axis direction (the position supported by the rotating member 021 so as not to move) Py. FIG. 12A shows O, F1, Py, and Pz on the axis X of the rotating member 211, and the holder axis Hx coincides with the axis X of the rotating member 21. FIG. 12B is a diagram showing a state in which O, F1, Pz are on a straight line different from the X axis (on the holder axis Hx), and Pz, Py are on an X axis. 12C shows a state where the position and inclination of the holder mounting member 022 are adjusted so that the axis X of the rotating member 021 coincides with a straight line (holder axis Hx) passing through O, F1, Pz, and Py in FIG. 12B. FIG.

12A to 12C, a sample is held at a beam focus position F1, the center O of the spherical bearing 013 and the beam focus position F1 are on the holder axis Hx, and the fulcrums Py and Pz are on the X axis. It's above.
As shown in FIG. 12A, the axis X of the rotating member 021 and the holder axis Hx coincide, and O, O on the axes X and Hx.
When there are F1, Py, and Pz, even if the rotating member 021 is rotated around the axis X, the position of the sample held in the sample holder H does not move from the beam focus position F1 but only tilts. . In this case, it is possible to observe the sample while rotating the rotating member 021 about the axis X to tilt the sample.

Goniometer stage GS and goniometer G
M is normally designed to be in the state shown in FIG. 12A, but may be manufactured with the beam focus position F1 shifted upward as shown in FIG. 12B due to a manufacturing error or the like. In FIG. 12B, the goniometer mounting surface 0
Mounting surface 016a of the bearing member 016 to be joined to
When the position of is adjusted, the direction of the X axis cannot be changed, but X
The position of the shaft is adjustable. Then, the X axis is the Pz
Let's consider the case of adjusting to pass through the position.

When the rotating member 21 is rotated with the X axis passing through the position of Pz, the sample holder H also rotates in conjunction with the rotation of the rotating member 21. At this time, FIG.
As far as can be seen, since the positions of the centers O and Pz on the axis of the sample holder H (that is, the axis of the holder mounting member 023) Hx do not move, it seems that the sample arranged at the beam focus position F1 does not move either. However, in practice, high-precision observation is not possible due to the displacement of the sample.

Conventionally, as shown in FIG. 12C, the goniometer mounting surface 012 is shaved and inclined so that the O, F1, Py, and Pz are arranged on the axis X of the rotating member 021. The member 021 was attached obliquely. In this work, the goniometer GM is
For the first time after mounting on S, the eucentric shaft (F1,
Since the inclination angle of the straight line connecting O, Py, and Pz) is known, the work of obliquely processing the goniometer mounting surface 012 occurs thereafter, so that the workability of the final adjustment is very poor.

The inventor of the present invention has described the goniometer mounting surface 012.
Of the rotating member 02 without performing the operation of machining the
A study and an experiment were conducted on a method for maintaining the sample position during one rotation with high accuracy. As a result, it has been found that by arranging Py and Pz in the vicinity of the intersection of the X axis and the holder axis Hx in FIG. 12B, it is possible to maintain the sample position when the rotating member 021 rotates with high accuracy.

The present invention has been made in view of the above circumstances, and has the following content as an object. (O01) A sample position at the time of rotation of a rotating member of a goniometer can be held with high accuracy without performing an operation of processing a goniometer mounting surface of a goniometer at an angle.

[0016]

Next, the present invention devised to solve the above-mentioned problems will be described. Elements of the present invention are used to facilitate correspondence with elements of the embodiments described later. , The reference numerals of the elements of the embodiment are enclosed in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described below is to facilitate understanding of the present invention and not to limit the scope of the present invention to the embodiments.

(The present invention) In order to solve the above problems, the sample holder supporting device of the present invention has the following requirements (A01) to
(A01) fixed to a column (10) of an electron microscope (M) in which a path of a charged particle beam extending along a Z axis extending in a vertical direction is formed. A goniometer stage (GS), a goniometer mounting hole (11a) perpendicular to the Z axis and communicating between the inside and the outside of the lens barrel (10), and a goniometer mounting formed at an outer end of the goniometer mounting hole (11a). A goniometer stage (GS) having a surface (11c) and a goniometer spherical bearing (18) provided at the inner end of the goniometer mounting hole (11a); (A02) the goniometer mounting surface (11
c) and the goniometer mounting surface (1)
A bearing member (17) having a mounting surface (17a) connected in a state adjusted in 1c) and a bearing hole (17b) extending in a direction perpendicular to the mounting surface (17a).
A rotating member (22) rotatably supported by the bearing member (17) and capable of adjusting a rotating position, the rotating member (2) having a holder mounting member through-hole (22a).
2) and a holder mounting member (23) having a holder mounting hole (23a) for detachably supporting the sample holder (H) and penetrating through the holder mounting member through hole (22a), the inner end of which is provided. A spherical surface (23b) rotatably supported by the spherical bearing (18);
A goniometer (GM) having a holder mounting member (23) supported so as to be position-adjustable in the Y-axis direction perpendicular to the X-axis and the Z-axis, which are axes of the rotating member (22), and in the Z-axis direction. ), (A03) the charged particle beam traveling along the Z axis is converted into an XY plane including the X axis and the Y axis and the Z
An electron lens (14 + 15) that converges to a focus position (F1) near the intersection with the axis; (A04) a Y-axis direction pressing member (39) that elastically presses one side surface of the holder mounting member (23) in the Y-axis direction; ) And the holder mounting member (23).
A holder mounting member Y-axis position adjusting device (Iy) having a Y-axis direction position adjusting member (41) capable of abutting against the other side surface of the outer end portion in the Y-axis direction and capable of adjusting the position in the Y-axis direction; A0
5) A Z-axis direction pressing member (29) for elastically pressing one side surface of the holder mounting member (23) in the Z-axis direction, and the other side surface of the outer end portion of the holder mounting member (23) in the Z-axis direction. (A06) The holder mounting member (Iz) having a Z-axis direction position adjusting member (31 + 34) capable of adjusting the position in the Z-axis direction.
The holder axis Y-direction fulcrum (P), which is the position of the holder axis positioned in the Y-axis direction by the axial position adjusting device (Iy).
y) and holder mounting member Z-axis direction position adjustment device (Iz)
The Y is arranged such that the fulcrum (Pz) of the holder axis in the Z-axis direction positioned in the Z-axis direction is substantially at the same position.
An axial position adjusting member (41) and a Z axis direction adjusting member (31 + 34).

(Operation of the present invention) In the sample holder supporting apparatus of the present invention having the above-mentioned features, the gonio stage (GS)
A column (10) of an electron microscope (M) in which a path of a charged particle beam extending along the Z axis extending in the vertical direction is formed.
And has a goniometer mounting hole (11a), a goniometer mounting surface (11c), and a goniometer spherical bearing (18). The goniometer mounting hole (11
a) connects the inside and outside of the lens barrel (10) perpendicularly to the Z axis. Goniometer (GM) bearing member (17)
Has a mounting surface (17a) and a bearing hole (17b),
The mounting surface (17a) is attached to the goniometer mounting surface (1).
1c) and connected with the goniometer mounting surface (11c) adjusted in position. The rotating member (22) of the goniometer (GM) is supported by the bearing member (17) so as to be rotatable and the rotational position can be adjusted. A holder mounting member (23) penetrates through the holder mounting member through hole (22a) of the rotating member (22). The spherical surface (23b) of the inner end of the holder mounting member (23) is rotatably supported by the spherical bearing (18), and the outer end of the holder mounting member (23) is the rotating member (22).
Accordingly, the rotation member (22) is supported so as to be position-adjustable in the Y-axis direction perpendicular to the X-axis and the Z-axis, which are axes of the rotation member (22), and the Z-axis direction. The holder mounting hole (23a) of the holder mounting member (23) detachably supports the sample holder (H).

The electron lens (14 + 15) focuses the charged particle beam traveling along the Z axis on a focus position (F) near the intersection of the XY plane including the X axis and the Y axis with the Z axis.
Converge to 1). The holder mounting member Y-axis direction position adjusting device (Iy) has a Y-axis direction pressing member (39) and a Y-axis direction position adjusting member (41). The Y-axis direction pressing member (39) elastically presses one side surface of the holder mounting member (23) in the Y-axis direction, and the Y-axis direction position adjusting member (4).
1) Positioning is performed by contacting the other end of the outer end of the holder mounting member (23) in the Y-axis direction. The holder mounting member Y-axis direction position adjusting device (Iy) performs positioning of the holder mounting member (23) in the Y-axis direction to thereby adjust the Y of the sample holder (H) mounted on the holder mounting member (23).
Performs axial positioning. That is, the holder axis Y-direction fulcrum (Py), which is the position of the holder axis (Hx) positioned in the Y-axis direction, is positioned by the holder mounting member Y-axis direction position adjusting device (Iy).

[0020] Holder mounting member Z-axis direction position adjusting device (I
z) has a Z-axis direction pressing member (29) and a Z-axis direction position adjusting member (31 + 34). The Z-axis direction pressing member (29) elastically presses one side surface of the holder mounting member (23) in the Z-axis direction, and the Z-axis direction position adjusting member (31).
+34) performs positioning by contacting the other side surface in the Z-axis direction of the outer end of the holder mounting member (23). The holder mounting member Z-axis direction position adjusting device (Iz) performs positioning of the holder mounting member (23) in the Z-axis direction,
Sample holder (H) mounted on holder mounting member (23)
Is performed in the Z-axis direction. That is, the holder axis Z which is the position of the holder axis (Hx) positioned in the Z-axis direction.
The direction fulcrum (Pz) is positioned by the holder mounting member Z-axis direction position adjusting device (Iz). The fulcrum (Py) of the holder axis Y direction and the fulcrum (Pz) of the holder axis Z direction are arranged at substantially the same position.

The position of the fulcrum (Py, Pz) is on the rotation axis (X) of the rotating member (22) and the spherical bearing (1
8) Center of spherical surface (O) and focus position (F1)
The mounting surface (17a) of the bearing member (17) so as to be arranged on a straight line passing through the goniometer mounting surface (11c).
Adjust the position inside and connect. In this case, when the rotating member (22) rotates, the fulcrum (P) on the holder shaft (Hx)
Since the position of (y, Pz) does not change, the center (O) of the spherical surface of the spherical bearing (18) on the holder axis (Hx), the focus position (F1), and the fulcrum (Py, Pz) are aligned with the holder axis (Hy). Hx), but their position does not move in the Y or Z axis direction. That is, the sample position held at the focus position (F1) on the holder axis (Hx) does not change.

[0022]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a sample holder supporting apparatus according to an embodiment of the present invention. To facilitate understanding of the following description, in the drawings, the front-rear direction is the X-axis direction, the right-left direction is the Y-axis direction, the up-down direction is the Z-axis direction, and arrows X, -X, Y, -Y, The directions indicated by Z, -Z or the sides indicated are forward, rearward, rightward, leftward, upward, downward,
Or, the front side, the rear side, the right side, the left side, the upper side, and the lower side.
Also, in the figure, those with “•” in “○” mean arrows pointing from the back of the paper to the front, and those with “x” in “○” indicate the arrow on the paper. From the back to the back.

(Embodiment) FIG. 1 is an enlarged longitudinal sectional view of a main part of an electron microscope provided with a sample holder supporting device according to an embodiment of the present invention. FIG. 2 is a sectional view taken along the line II-II of FIG. FIG. 3 is a sectional view taken along the line III-III of FIG. FIG.
It is an IV-IV line sectional view. FIG. 5 is a sectional view taken along line VV of FIG. In FIG. 1, the transmission electron microscope M has a lens barrel 10 whose inside is kept in a vacuum, and the lens barrel 10 is provided with a gonio stage GS. 1 and 2, the gonio stage GS includes a yoke 11 made of a magnetic material having a cylindrical outer peripheral surface,
1 has a substantially cylindrical sample stage 12 made of a nonmagnetic material and supported inside. The yoke 11 forms a part of the outer wall of the lens barrel 10 of the electron microscope. As shown in FIG. 1, the yoke 11 supports an excitation coil 13, an upper pole piece 14 and a lower pole piece 15 having an electron beam passage hole. The electron lens (14 + 15) is composed of the upper pole piece 14 and the lower pole piece 15 of the electronic lens. The electron lens (14 + 15) converges the charged particle beam traveling along the Z axis to a focus position F1 (see FIG. 2) near the intersection of the XY plane including the X axis and the Y axis with the Z axis.

In FIG. 1, a sample chamber A which is held in a vacuum is formed inside the sample stage 12 and between the upper and lower electron lens magnetic pole pieces 14 and 15. 1 and 2, a goniometer mounting hole 1 for communicating the outside of the yoke 11 and the sample chamber A is provided on the −X side portion (rear side portion) of the yoke 11 and the sample stage 12.
1a and 12a are provided. Holder front end positioning mechanism mounting holes 11b and 12b for communicating the outside of the yoke 11 and the sample chamber A are also provided on the X side (front side) of the yoke 11 and the sample stage 12. Is provided. A goniometer mounting surface 11c is provided at an outer end (rear end, −X end) of the goniometer mounting hole 11a.

Goniometer mounting hole 11 of yoke 11
A part (cylindrical portion) of a cylindrical bearing member 17 is disposed in a, and a goniometer mounting hole 1 of the sample stage 12 is provided.
A spherical bearing (goniometer spherical bearing) 18 is fixedly supported on 2a. A spherical seat 18 a is provided at an inner end of the spherical bearing 18. In FIG. 2, the bearing member 17 has a mounting surface 17a and a bearing hole 17b extending in a direction perpendicular to the mounting surface 17a, and the bearing member 17 is joined to the goniometer mounting surface 11c. The yoke 1 is bolted by the bolt 19 (see FIG. 4) in a state where the position is adjusted in the goniometer mounting surface 11c.
Connected to 1. Due to the position adjustment operation, the bearing member 17 moves in a state where the axis (X axis) of the bearing hole 17b is horizontal (a state intersects vertically with the Z axis extending in the vertical direction). The gonio stage GS is composed of the components indicated by the reference numerals 11 to 15 and 18.

1 and 2, bearings 21 and 21 are mounted on the inner peripheral surface of the bearing hole 17b, and a substantially cylindrical rotating member 22 is formed by the bearings 21 and 21.
Is supported so as to be rotatable about the X axis, and a holder mounting member 23 is provided inside the rotating member 22 with the spherical seat 1.
8a, it is supported so as to be rotatable around the center O of the spherical surface. The holder mounting member 23 is a member that supports a sample holder H extending from the outside of the yoke 11 to the sample chamber A. The sample holder H has a holder grip H1 for operation at an outer end and a sample holder H2 having an elongated shape at an inner end. The sample holding portion H2 is formed with a storage portion H2a (see FIG. 2) for storing a sample (not shown). Further, the sample holder H is provided with an O-ring groove for accommodating the O-ring H3.

1 and 2, the holder mounting member 23 has a holder mounting hole 23a and a spherical surface 23b formed outside the inner end portion. 1 and 2, the spherical surface 23b is rotatably supported around the spherical center O by the spherical seat 18a. The holder mounting hole 23a is a hole for holding the sample holder H. The axis Hx of the holder mounting hole 23a coincides with the X axis at the reference position. However, the holder mounting hole 23
When the position of the sample (not shown) held at the tip of the sample holder H is adjusted in the sample chamber A, the axis Hx of a is in a state where the holder mounting member 23 is rotated around the center O of the spherical surface. It does not match the X axis.

In FIG. 3, the holder mounting member 23
Are ball contact portions 23c, 23c extending at the rear end (-X end) in the Y-axis (left-right axis) direction perpendicular to the X-axis and Z-axis.
As shown in FIG. 3, the lower surfaces of the ball contact portions 23c of the holder mounting member 23 are formed as flat surfaces.

The rotating member 22 has a holder mounting member through hole 22a (see FIGS. 1 and 2). The rear end of the rotating member 22 extends rearward and presses the upper surface of the upper part. A member support portion 22b (see FIGS. 1 and 3) and a swing member support portion 22c (see FIG. 5) on the lower side are formed. The rotating member 22 rotatably supported around the X axis by the bearings 21 and 21 has a gear 2 on its outer periphery.
2d (see FIGS. 1, 2 and 4). 2 and 4, a gear holder 26 is provided at the upper end of the bearing member 17. A worm gear 27 meshing with the gear 22d of the rotating member 22 is provided on the gear holder 26.
(See FIG. 4) is rotatably supported. The worm gear 27 is configured to be rotated by a drive motor 28 (see FIG. 4) around the X axis connected to an outer end of a shaft passing through the gear holder 26. Therefore, by rotating and driving the X-axis driving motor 28, the rotation of the rotating member 22 about the X-axis can be adjusted.

In FIG. 3, an upper surface pressing member support portion 22b of the rotating member 22 accommodates a pressing spring 29a of an upper surface pressing member (Z-axis direction pressing member) 29 and a vertically movable contact member 29b. Also, as shown in FIGS. 1 and 3, the upper surface of the outer end of the holder mounting member 23 is flattened, and the contact member 29b pressed downward by the pressing spring 29a is , Is pressed against the upper flat surface of the holder mounting member 23.

The oscillating member 31 shown in FIGS. 1 and 3 has a horizontal portion 31a (see FIG. 3) extending in the left-right direction (Y-axis direction) and upper projecting portions 31b, 31b provided at both ends thereof. are doing. The upper end portions of the upwardly projecting portions 31b, 31b are respectively connected to the swing member supporting portions 2 of the rotating member 22.
A pair of left and right shafts 32 supported by 2c (see FIGS. 1 and 5)
Are supported so as to be able to swing back and forth. Each of the upwardly projecting portions 31b, 31b is provided with a ball support surface for supporting a contact ball 33 (see FIG. 3) that contacts the lower surface of the ball contact portion 23c, 23c of the holder mounting member 23.

In FIG. 2, a vertical movement adjusting screw 34 is supported by the rotating member 22 so as to face the front side surface (X side surface) of the horizontal portion 31a of the swinging member 31. A gear 35 is provided at the X end (front end) of the vertical movement adjusting screw 34.
Is fixed. The gear 35 is connected to the rotating member 22.
And meshes with an output gear 37 of a vertical rotation motor 36 supported by the motor. Therefore, the vertical rotation motor 36
Is rotated in either the forward or reverse direction, the output gear 3
The vertical movement adjusting screw 34 rotates via the gear 7 and the gear 35, and the vertical movement adjusting screw 34 moves forward and backward with respect to the horizontal portion 31a according to the rotation direction. Since the tip of the vertical movement adjusting screw 34 is in contact with the front side surface (X side) of the horizontal portion 31a of the rocking member 31 (see FIG. 2), the rocking member is moved when the vertical movement adjusting screw 34 moves forward and backward. 31 swings around the axis 32. At this time, the upper surface pressing member 29
The compression spring 29a is contracted or expanded, and the holder mounting member 23 is configured to rotate vertically around the center O of the spherical surface within a small angle range (within a range of 4 to 5 degrees). At this time, the axis H of the holder mounting member 23
x tilts up and down. The Z-axis direction position adjusting member (31 + 3) is formed by the swing member 31 and the vertical movement adjusting screw.
4) is configured. Also, the holder mounting member Z-axis direction position adjusting device I
The holder mounting member 23 is vertically positioned around the spherical center O by the holder mounting member Z-axis direction positioning device Iz.

In FIG. 2, on the right side (Y side) of the rear (-X side) portion of the holder mounting member 23, a contact member 39a supported by the rotating member 22 so as to be movable left and right is a pressing spring 39b. Is imposed by. By the contact member 39a and the pressing spring 39b, the Y-axis direction (left-right direction) around the center O of the spherical surface of the holder mounting member 23.
A left-right pressing member (Y-axis direction pressing member) 39 for determining the rotational position of the shutter is provided.

In FIG. 2, a left / right movement adjusting screw (Y-axis direction position adjusting member) 41 is opposed to the side surface of the holder mounting member 23 opposite to the abutting portion with the abutting member 39a. 22 supported. Like the vertical movement adjusting screw 34, the left-right movement adjusting screw 41 has a gear 4 at the -Y end (left end) of the left-right movement adjusting screw 41.
2. Left and right rotation motor 4 supported by the rotating member 22
The rotation force of the left / right rotation motor 43 is transmitted via the third output gear 44. The horizontal movement adjusting screw 41 is attached to the holder mounting member 2 in accordance with the rotation direction of the horizontal movement adjusting screw 41.
3 moves forward and backward. Since the tip of the lateral movement adjusting screw 41 is in contact with the −Y side surface (left side surface) of the holder mounting member 23, when the lateral movement adjusting screw 41 moves forward and backward, the pressing spring 39b of the lateral pressing member 39 is moved. By contracting or expanding, the holder mounting member 23 is configured to rotate left and right around the spherical center O within a small angle range (within a range of 5 to 6 degrees). At this time, the axis Hx of the holder mounting member 23 is inclined left and right.

In FIG. 2, the screw 41 for adjusting the lateral movement is shown.
The contact point to the holder mounting member 23 is Py ', and the distance between the spherical center O and the contact point Py in FIG. 2 is Ly. In FIG. 1, the contact point of the contact ball 33 of the swing member 31 with the holder mounting member 23 is Pz ', and the distance between the center O of the spherical surface and the contact point Pz' in FIG. 1 is Lz. At this time, the right and left movement adjusting screw 41 and the contact ball 33 of the swing member 31 are arranged so that the distance Ly and the distance Lz are equal (Ly = Lz). Therefore, each intersection point of the arc passing through the contact points Py 'and Pz' around the spherical center O and the holder axis Hx of the holder mounting member 23, that is, the holder axis Y direction fulcrum Py and the holder axis Z The axial fulcrum Pz is at substantially the same position. The elements indicated by reference numerals 39 to 44 constitute a holder mounting member Y-axis direction positioning device Iy.
The goniometer GM is constituted by the elements indicated by the reference numerals 17, 19 to 44, Iy and Iz.

1 and 2, a positioning mechanism support block 46 is inserted into the positioning member mounting hole 11b provided on the left side of the yoke 11, and the positioning mechanism support block 46 is It is fixed by a plurality of bolts 47 screwed into the sample stage 12. The positioning mechanism support block 46 is provided with a slider accommodation hole 48 coaxial with the X axis, and a positioning slider 49 is accommodated in the slider accommodation hole 48 so as to be movable in the X axis direction. At the X end (front end) of the slider housing hole 48 of the positioning mechanism support block 46, a screw hole 51 is provided between the slider housing hole 48 and the outside.

A screw 5 for adjusting the front / rear position is provided in the screw hole 51.
2 are screwed and penetrated. A gear 53 is fixed to the X end (front end) of the front / rear position adjusting screw 52. The gear 53 meshes with an output gear 55 of a front-rear position adjustment motor 54 supported by the positioning mechanism support block 46. Therefore, when the front / rear position adjusting motor 54 is rotated in either forward or reverse direction, the front / rear position adjusting screw 5 is rotated via the output gear 55 and the gear 53.
2 rotates, and the front / rear position adjusting screw 52 moves forward and backward in accordance with the rotation direction.

In the positioning member mounting hole 12b of the sample stage 12, an inner end positioning member 56 with which the inner end of the sample holder H and the inner end of the positioning slider 49 abut, respectively, is arranged. The inner end positioning member 56 is an inner end (front end, ie, X end) of the sample holder H.
And is movably supported by the sample stage 12 via a plurality of springs in a minute range.

The inner end positioning member 56 has a rear end (-X
The end has a sliver-shaped recess, and a ruby ball provided at the inner end (front end) of the sample holder H is in contact with the sliver-shaped recess. The inner end positioning member 56 has a ruby ball at the front end (X end), and the ruby ball is a sliver-shaped inner end (−X end, rear end) of the positioning slider 49. It is in contact with the recess. Therefore, when the holder supporting member 23 supporting the sample holder H rotates around the center O of the spherical surface, the inner end of the sample holder H (front end, X
The ruby ball at the end) slides along the sliver-shaped recess at the inner end (rear end, −X end) of the inner end positioning member 56, and the ruby ball at the outer end (right end) at the inner end positioning member 56 is used for positioning. The slider 49 is configured to slide along the sliver-shaped recess at the inner end (left end). The elements indicated by reference numerals 46 to 56 constitute the holder inner end positioning drive mechanism Dx of this embodiment, and the holder inner end positioning drive mechanism Dx controls the inner end position (front end position) of the sample holder H. ) Can be adjusted for positioning.

(Operation of Embodiment) FIG. 6 is an explanatory view of the operation of the sample holder supporting apparatus according to the embodiment of the present invention. 1 and 2, the mounting surface 17a of the bearing member 17 of the goniometer GM is moved along the mounting surface 17a in a state where the mounting surface 17a is joined to the goniometer mounting surface 11c. Adjust the position. Rotating member 22 supported via bearings 21 and 21 in bearing member 17
Is the same as the axis of the bearing member 17, and by adjusting the position of the axis of the bearing member 17, the position of the axis X of the rotating member 22 is adjusted. Therefore, the fulcrum Py,
Pz is located at the intersection of the axis X and a straight line connecting the spherical center O and the focus position F1.
The position of the shaft of the bearing member 17 is adjusted to
Is fixed to the goniometer mounting surface 11c.

When the rotating member 22 is rotated around the X axis in this state, the fulcrums Py and Pz arranged on the X axis do not move. Therefore, although the straight line (holder axis Hx) connecting the fulcrums Py and Pz with the spherical center O and the focus position F1 rotates, the X direction of the F1 position on the sample holder is
No movement in the Y and Z directions occurs. Therefore, the focus position F1 on the holder axis Hx of the sample holder H
The sample held in, rotates around the holder axis, but in the X direction,
It does not move in the Y and Z directions.

In FIG. 2, the position of the holder mounting member 23 in the Y-axis direction is adjusted by rotating the left / right movement adjusting screw 41 of the holder mounting member Y-axis direction position adjusting device Iy. By this adjustment, the position of the contact point Py 'of the left and right movement adjusting screw 41 to the holder mounting member 23 is adjusted, and the arc passing through the contact point Py' around the spherical center O and the holder mounting member The position of the fulcrum Py (see FIG. 2) in the holder axis Y direction, which is the point of intersection with the holder axis Hx, is adjusted. At this time, the sample held at the focus position F1 can be moved in the Y-axis direction.

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. Modified embodiments of the present invention will be exemplified below. (H01) As a configuration for adjusting the rotating member 22 in the Y-axis direction and the Z-axis direction (a configuration for adjusting the mounting position of the bearing member 17 supporting the rotating member 22), Japanese Patent Application No. 10-278.
980 (Japanese Unexamined Patent Publication No. Hei. 9-980) can be adopted.

[0044]

The sample holder supporting apparatus of the present invention described above is
The following effects can be obtained. (E01) The sample position at the time of rotation of the goniometer rotating member can be held with high precision without performing the work of obliquely processing the goniometer mounting surface of the goniometer stage.

[Brief description of the drawings]

FIG. 1 is an enlarged longitudinal sectional view of a main part of an electron microscope provided with a sample holder supporting device according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is a sectional view taken along line III-III of FIG.

FIG. 4 is a sectional view taken along the line IV-IV of FIG.

FIG. 5 is a sectional view taken along line VV of FIG. 1;

FIG. 6 is an operation explanatory view of the sample holder supporting device according to the embodiment of the present invention.

FIG. 7 is a schematic explanatory view of an electron microscope provided with a conventional sample holder supporting device to which the present invention is applied.

8 is an enlarged longitudinal sectional view of a main part of FIG. 7, and is an enlarged view of a part indicated by an arrow VIII of FIG. 7;

FIG. 9 is a sectional view taken along line IX-IX of FIG.

FIG. 10 is a sectional view taken along line XX of FIG. 8;

FIG. 11 is a sectional view taken along line XI-XI in FIG.

FIG. 12 shows a center O of the spherical bearing 013,
FIG. 9 is an explanatory diagram of a positional relationship among a beam focus position F1, a fulcrum Py in the Y-axis direction of the axis Hx of the holder mounting member 022 (a position supported by the rotating member 021 so as not to move), and a fulcrum Pz in the Z-axis direction. FIG. 12A shows a rotating member 0.
There are O and F1 on the axis X of 21 and the holder mounting member 022
12B is a view showing a state in which the axis Hx coincides with the axis X and the fulcrums Py and Pz of the axis Hx and the O and F1 are on a straight line. FIG. F1 is above the X axis, and the axis Hx of the holder mounting member 022 moves below the axis X, and O, F1, and Pz are on a straight line, but Py is off the straight line. FIG. 12C is a view showing the state, and FIG. 12C shows the rotating member 021 so that O and F1 of FIG. 12B are arranged on the axis X of the rotating member 21.
FIG. 9 is a diagram showing a state in which the position of the holder mounting member 022 is adjusted so that the axis Hx of the holder mounting member 022 coincides with the axis X.

[Explanation of symbols]

F1: Focus position, GS: Goniometer, GM ...
Goniometer, H: Sample holder, Iy: Holder mounting member Y-axis direction position adjustment device, Iz: Holder mounting member Z-axis direction position adjustment device, M: Electron microscope, Py: Holder axis Y direction fulcrum, Pz: Holder axis Z direction Fulcrum, 10 ... lens barrel, 11a ...
Goniometer mounting hole, 11c ... Goniometer mounting surface, 1
7: bearing member, 17a: mounting surface, 17b: bearing hole, 18
... goniometer spherical bearing, 22 ... rotating member, 22a ...
Holder mounting member through hole, 23 ... holder mounting member, 23a
... Holder mounting hole, 23b ... Spherical surface, 29 ... Z axis direction pressing member, 39 ... Y axis direction pressing member, 41 ... Y axis direction position adjusting member, (14 + 15) ... Electronic lens, (31 + 34) ...
Z-axis position adjustment member,

Claims (1)

[Claims] 1. A sample holder supporting apparatus having the following requirements (A01) to (A06): (A01) a path of a charged particle beam extending along a Z-axis extending in a vertical direction is formed therein. A goniometer mounting hole fixed to the lens barrel of the electron microscope, a goniometer mounting hole perpendicular to the Z axis and communicating between the inside and the outside of the lens barrel, and a goniometer mounting surface formed at an outer end of the goniometer mounting hole. A goniometer stage having a goniometer spherical bearing provided at an inner end of the goniometer mounting hole, (A02) being connected to the goniometer mounting surface in a state where it is joined and adjusted in the goniometer mounting surface. A bearing member having a mounting surface and a bearing hole extending in a direction perpendicular to the mounting surface; and a rotatable and rotational position supported by the bearing member. A rotating member having a through hole for a holder mounting member, and a holder mounting member having a holder mounting hole for detachably supporting a sample holder and penetrating through the through hole of the holder mounting member; Has a spherical surface rotatably supported by the spherical bearing, and has outer ends in the Y-axis direction and the Z-axis direction perpendicular to the X-axis and the Z-axis which are axes of the rotating member by the rotating member. (A03) Focusing the charged particle beam traveling along the Z-axis near the intersection of the XY plane including the X-axis and the Y-axis with the Z-axis Electron lens to converge to position, (A04)
A Y-axis direction pressing member that elastically presses one side surface of the holder mounting member in the Y-axis direction, and a position adjustment in the Y-axis direction that abuts on the other side surface of the outer end portion of the holder mounting member in the Y-axis direction. A holder mounting member Y-axis direction position adjusting device having a possible Y-axis direction position adjusting member, (A05) a Z-axis direction pressing member for elastically pressing one side surface of the holder mounting member in the Z-axis direction, and the holder (A06) The holder mounting member Z-axis direction position adjusting device, comprising: a Z-axis direction position adjusting device that is in contact with the other side surface of the outer end portion of the mounting member in the Z-axis direction and is capable of adjusting the position in the Z-axis direction. Holder axis Y-direction fulcrum, which is the position of the holder axis positioned in the Y-axis direction by the mounting member Y-axis direction position adjusting device, and holder axis Z-axis direction, which is positioned in the Z-axis direction by the holder mounting member Z-axis direction position adjusting device. The fulcrum is almost the same The Y arranged so that
An axial position adjusting member and a Z axis position adjusting member.