JPH02304366A - Manipulator for analyzing device - Google Patents

Abstract

PURPOSE:To arbitrarily and easily control the position and the attitude of a sample stand with a simple mechanism by calculating the spatial coordinate of a connecting point of a link mechanism connected to the sample stand and the supplying quantity of a linear motion leading-in machine and driving the linkage mechanism. CONSTITUTION:Information inputted from an input device 51 refers to the data of present position attitude information stored in a memory device 52 and is transmitted to the calculator 54 of the spatial coordinate of each connecting point. Subsequently, in each value of a parameter for expressing the time series of a moving progress in a process in which an inspection object point moves to a measuring point by receiving a signal from a parameter signal generator 58, the coordinate of the connecting point is calculated. Information of this connecting point is transmitted to an axis length calculator 55 for determining the supplying length of an operating rod of a link mechanism, and driving of linear motors 57a - 57f interlocked with a rod is controlled. In such a manner, the position and the attitude of the sample stand can be controlled arbitrarily and easily by a simple linkage mechanism.

Description

Detailed Description of the Invention (Industrial Field of Application) The present invention involves placing a predetermined target sample on a movable sample stage placed inside a vacuum container sealed from the outside, for example,
The position of this sample stage from outside the container.

This invention relates to a manipulator device that allows a sample to be set in a position and posture suitable for analysis by spatially moving the posture.

(Background of the Invention) Hereinafter, the case of a local surface analysis device to which the device of the present invention is most typically applied and exhibits excellent effects will be described as an example.

In addition to analysis devices using optical microscopes and electron microscopes, local surface analysis devices include, in recent years, irradiation of ultraviolet rays, X-rays, electron beams, ion beams, etc.
Methods for detecting secondary electrons have been developed and are being used.

These devices are known as, for example, ultraviolet photoelectron spectrometers, X-ray photoelectron spectrometers, secondary ion mass spectrometers, and electronic energy loss spectrometers. Because of the usefulness of analytical instruments, there is an increasing demand for improved functionality and easier operation of analytical instruments.

To explain the basic configuration of an example of this analyzer, for example, in an electron energy loss spectrum analyzer, as shown in FIG. 1 for the sample stand 61 on which the sample is placed and held, and the target sample 62 on the sample stand 61.
An electron gun 63 that irradiates an electron beam 66 to an irradiation point 68 at a small angle of around 0 degrees, an energy analyzer 64 arranged opposite to the irradiation point 68, and this energy analyzer 64.
A channeltron 65 detects the electrons passing through the channel, and the information detected as an electrical signal is processed for image display etc. by a necessary electronic device.

In such a device, if the irradiation point 68 of the electron beam 66 deviates from the optical axis 67 of the energy analyzer 64, the efficiency with which scattered electrons pass through the energy analyzer will be significantly reduced, noise will increase, and the accuracy of energy measurement will deteriorate. This will affect the accuracy of the measurement of the electron energy loss spectrum. Therefore, it is necessary to position the inspection target point on the sample surface at the point where the electron beam 66 and the optical axis 67 of the energy analyzer intersect, and in this case, the intersection point becomes the appropriate irradiation point of the electron beam (hereinafter simply (referred to as the "irradiation point").

For this reason, when a relatively wide range of a target sample is to be analyzed, it is necessary to move the sample relative to the irradiation point of the electron beam.

(Prior Art) Therefore, an apparatus having a configuration that enables such movement of a sample has been proposed in the past. In these devices, it is advantageous to move a target sample with a small mass compared to moving something with a large mass such as an electron gun or an energy analyzer, so the sample stage is configured to be movable. It is normal to do so.

As an example of a device that allows the sample stage to be moved within a horizontal plane,
A table that can move in the y-axis (another horizontal axis perpendicular to the There is a type of device.

In addition to this, it is possible to move in two axes (height axis) according to the thickness of the sample, and also to enable rotational movement of the sample in order to measure the angular dependence of analysis data, meeting the above requirements. A corresponding device is being considered in which a target sample placed under vacuum is moved by an external drive device.

(Problem to be Solved by the Invention) In order to specify the inspection target point of a target sample with a certain size and determine its orientation, six degrees of freedom (that is, translational movement in three directions of the x, y, and z axes) are required. , and X.

It is necessary to accurately determine the position and angle of the three rotational movements around the y and z axes, and for this purpose it is necessary to be able to arbitrarily set the six degrees of freedom.

However, in practice, for this purpose, it is necessary to design a device with three degrees of freedom of translational movement and three degrees of freedom of rotational movement, and in particular, it is difficult to configure such a device to be compact and easy to operate. It is extremely difficult.

For this reason, conventional equipment requires highly important degrees of freedom (for example, in the example above, the degrees of freedom required to align the inspection target with the electron beam irradiation point are more important than other degrees of freedom. It is common to design a manipulator by considering only the above-mentioned degrees of freedom (considered as A new manipulator has been proposed. Although such a device has the problem of not being able to adjust the Z-axis position and rotation of a sample placed in a vacuum, it is a device that has solved the problem to a certain extent for the purpose of two-dimensional analysis of the surface. It is.

However, if a manipulator is constructed by ignoring any of the six degrees of freedom in this way, it cannot be adequately used for analysis in applications that have recently come to require increasingly precise analysis.

Therefore, the inventors of the present invention have developed a novel system that solves the above-mentioned problems and allows the position and orientation of a sample to be adjusted in order to perform detailed analysis with high spatial resolution using a simple mechanism and easy operation. The present invention has been accomplished with the aim of providing a manipulator.

(Means for Solving the Problems) The manipulator of the present invention, which has been made for the above purpose, has, for example, a flat sample stand arranged spatially apart from a fixed stand, and different types of It has 6 sets of link mechanisms extending from the position toward the sample stage, and the link-type support device configured by a combination of these 6 independent sets of link mechanisms allows the sample stage to be moved in three dimensions. The first feature is that it is supported so that it can move freely, and these six sets of link mechanisms are
It is connected to a linear motion introduction device (axial drive device) on the fixed pedestal side to increase or decrease the distance between the fixed pedestal and the sample table, and each link mechanism is provided so as to be swingable relative to the fixed pedestal. The second feature is that, for each parameter expressing the time series of the movement progress, the spatial coordinates of the connection points of each link mechanism connected to the sample stage and the amount of delivery of the linear motion introduction device can be calculated. The present invention is equipped with an electronic control device capable of controlling the motion of the six linear motion introduction devices, and drives and controls each of the six linear motion introduction devices so as to follow the time-series feed-out amount of the linear motion introduction devices given by the electronic control device. 3
It is a feature of

The electronic control device is usually composed of a computer. The spatial coordinates of each of the connection points given by this electronic control device are as follows, taking an example in which these connection points are located on, for example, a flat sample stage.

The connection points of each link mechanism connected to this sample stage always exist in the same relative positional relationship. Therefore, for example, in a format in which the sample stage is supported on the fixed pedestal by six sets of link mechanisms that are swingably supported on the fixed pedestal by ball bearings in Example 1, which will be described later, the six sets of links are The positions of the six connection points provided by ball bearings attached to the tips of the links of the mechanism must always maintain a constant spatial relative position even during movement, and the mutual oscillation of the link mechanism must be maintained. A necessary condition is that the link mechanism does not interfere with the forward and backward linear movements in the axial direction.

Further, a specific example will be explained in which the lower surface of the sample stage is flat.

The position and orientation of the sample stage can be determined simply by specifying the coordinates of three connection points (that is, three points) among the six connection points in the above example. However, the position and orientation of the sample stage cannot be specified only by the link lengths of the three link mechanisms. For example, even if the link lengths from the fixed frame of the link mechanism related to three connection points (hereinafter referred to as the previous three connection points) are given as g, x, β, these links are swingably supported by ball bearings, so each tip of these links (that is, the front three connection points) is independently a spherical surface (each with a radius of 121 mm) centered on the ball bearing of the fixed frame. .βz, ff5). There is no unique solution that can position the front three connecting points on the three spherical surfaces and keep the distance between them constant. In other words, the spatial position and orientation of the sample stage is indefinite. The link length of a set of linkages limits one degree of freedom. Therefore, 6
A necessary condition for specifying the position and orientation of the tilt table described above is to restrict the link lengths of the six sets of link mechanisms in order to limit the degrees of freedom of the six sets of link mechanisms. Therefore, for each parameter that expresses the time series of the movement progress, we calculate the six connection points and match the distance between the spatial position of the calculated coordinates and the corresponding ball bearing of the fixed frame of the link mechanism. By driving the linear motion introducing machine of the corresponding link mechanism, the position and orientation of the sample stage can be maintained correctly, and 6.
It is possible to move the set of linkages.

Therefore, by making each of the six link mechanisms extend the links appropriately in order to match the desired position and orientation of the sample stage, the sample stage can be placed on one plane.
It will be supported by several connecting points, and will always be given as one spatial position/attitude. In this case, since the electronic control device only needs to drive and control the linear motion introduction machines for the six link mechanisms, the configuration and control of the entire device can be simple and easy.

In order to determine the functions of the link mechanism during the movement and at the end of the movement of the connection point of the link mechanism by the electronic control device,
All you have to do is input the necessary data into the input device. For example, the destination position and orientation can be specified by the amount of movement relative to the source position and orientation. It is also possible to specify the amount of movement of the sample stage with respect to this home position.

Each of the six link mechanisms that make up the link-type support device of the present invention is required to allow parallel and rotational movement of the sample stage relative to the fixed pedestal, so a portion of the link in the axial direction can swing. It is required that the shaft has a suitable shaft portion.

Specific examples of this include, for example, an example in which a link member is swingably supported by a ball bearing provided on a fixed pedestal, and the swing center of the link member is set on the fixed pedestal, and a link member that extends from the fixed pedestal to the sample stand. Examples of particularly desirable embodiments include an example in which a ball joint is interposed in the middle of the link member (preferably in a position close to the fixed frame) and the swing center of the link member is set in the middle of the link member. I can do it.

The positional relationship between the fixed pedestal and the sample pedestal is generally such that the sample pedestal is placed above the fixed pedestal located below, but is not particularly limited to this. For example, due to the configuration of the device and the layout with other auxiliary devices, etc., the link mechanism may be extended laterally from the side of the fixed pedestal, and the link mechanism may be attached to the vertical wall of the L-shaped sample stand as a connection point. It may also be something else.

Furthermore, the link type support device has a link mechanism extending from different positions of the fixed pedestal toward the sample stage.
Any device that can be connected to the sample stage at three or more points is sufficient. When there are three connection points of the link mechanism to the sample stage, for example, two or three of the six sets of link mechanisms are connected to the sample stage by, for example, ball bearings having a multiple coaxial structure. In this case as well, the spatial position and orientation of the sample stage are uniquely given by these six sets of link mechanisms.

Note that the connection points of the six sets of link mechanisms to the sample stage are not particularly limited, except for cases where the state of support is unstable. The state of support is indefinite, for example, when six connecting points are arranged on a straight line, when six link members are arranged rotationally symmetrically, or when six link members are arranged in parallel This refers to cases where the sample stage is placed on one of two planes, or when each of the six link members is placed on either of two planes. It is necessary to design the device so that an unstable state does not appear even during the movement trajectory, as this may lead to problems such as the device falling over.

(Function) By having the above-described configuration, the present invention can perform
Using this as information, the electronic control unit obtains the spatial coordinates of each connection point for each parameter expressing the time series of movement progress from the movement start point to the movement end point, and based on this, the linear motion introduction machine of each link device The sample stage can be moved and rotated three-dimensionally in any direction simply by driving and controlling the
- the spatial position of the sample stage and
Posture can be determined accurately and easily.

(Example) The present invention will be described below based on embodiments shown in the drawings.

Embodiment 1 FIG. 1 shows an outline of the configuration of a mechanical drive part of a manipulator according to Embodiment 1 of the present invention. A disk-shaped sample stage 7 is also arranged at a distance. Fixed frame 8
is integrally fixed to a fixing member such as a casing (not shown), and these constitute the wall surface of a vacuum container or the like as a whole.

Between the fixed pedestal 8 and the sample stand 7, there are six sets of link mechanisms (hereinafter, each link mechanism is referred to as "r column system", and the six sets are called 2a).
~2f).

Note that 9 is a sample receiver fixed on the sample stage.
The sample 11 is held by fitting a sample holder 10 that holds the sample 11 thereon.

In this example, each of the six sets of link mechanisms 2a to 2f, which are the above-mentioned strut system E, connects one elongated link member 3 (hereinafter referred to as the operating rod 3) to a second link member 3 on its lower end side.
The frame 8 is fixed by the lower ball bearing 4 illustrated in Figure (a).
The assembly is supported by the through hole 8a, and its upper end is
It is connected to a sample stage 7 by an upper ball bearing 6. Note that 4a is a bracket that is fixed integrally with the fixed frame 8 of the ball bearing 4, and a spherical sliding surface 4b is provided in the center part.4c is a ball of the ball bearing. 4d is a bellows for maintaining vacuum.

The lower end of the operating rod 3, which passes through the ball 4c of the lower ball bearing 4, is connected to the linear motion introduction device 1, as shown in FIG. 2(a). This linear motion introduction machine 1 has a linear pulse motor 12 attached to a plate la provided integrally with the ball 4c of the lower ball bearing 4, and a shaft 12a that drives the lower end of the operating rod 3 in a straight line. It consists of: .

This is because, as shown in FIG. 2(b), the spirally grooved rotary drive shaft 13a of the pulse motor 13 is threadedly engaged with the block 13b, converting rotational motion into linear motion. The block 13b may be configured to be connected to the actuating rod 3 for linear movement.

Due to these, in the support system λ which is each link mechanism,
A single rigid operating rod 3 can swing around a ball bearing 4 on the fixed frame side and move in and out.

In this example, a flag 14 is provided on a part of the actuating rod 3 shown in FIG. 2(a) as a reference for controlling the linear momentum of the actuating rod 3, and the flag 14 corresponds to the position of the photointerrupter 15 fixed to the plate 1a. The home position is detected as the home position.

Furthermore, the linear movement of the linear movement rod 3 can also be adjusted by manually operating the micrometer head based on the calculated linear movement.

FIG. 3 shows electronic control for driving the mechanical drive part of the manipulator explained in FIGS. 1 and 2 with a linear pulse smoke 12 (or pulse motor 13) to perform a desired controlled operation. The outline of the device is conceptually shown in a block diagram, and FIGS. 4 and 5 show an example of control performed by this electronic control device.

Note that the following explanation describes the operation for moving the sample stage so that the inspection target point of the sample coincides with the irradiation point and takes a supported posture.

In this embodiment, the following description will be made using a coordinate system in which the irradiation point is the origin, the X and Y axes are horizontal, and the Z axis is vertical.

In FIG. 3, 51 is an input device such as a keyboard, which includes the coordinates of the center of the upper ball bearing of each link mechanism, that is, the connection point at the home position, the position of the inspection target point on the sample (the position of the sample stage 7 moved from the home position), (indicated by the coordinates of the case), and the orientation of the sample stage (X-axis from the home position).

It is used to input information such as rotation angles around the y-axis and Z-axis).

The information inputted by this input device 51 is stored in a storage device 52.
Each connection point (
In other words, a calculator (hereinafter [connection point coordinate calculator 54
'') and receives a signal from the parameter signal generator 58, each connection point is set for each parameter representing the time series of the movement progress of the inspection point in the process of moving to the irradiation point (measurement point). The coordinates of are calculated. Note that the input coordinates of the inspection target point are stored and updated in the storage device 52 in order to be used as current position and orientation information to be used in the next movement operation.

This calculated information regarding each connection point is then calculated based on the length of the operating rod 3 of each link mechanism, that is, the fixed frame 8.
The information is transmitted to the axial length calculator (hereinafter referred to as ``axial length calculator 55'') of the actuating rod, which determines the distance between the Control information for driving the near-palm smoke 12 is determined.

In this way, based on the numerical sequence of the axial lengths of each actuating rod 3 calculated by the axial length calculator 55, the near pulse motors 57a to 57f assembled to the six link mechanisms
It is driven by drivers 56a to 56f. Note that the driving of these drivers 56a to 56f is synchronized by a signal from a synchronization signal generator (not shown).

In the above configuration, the series of processes explained by the connection point coordinate calculator 54 and the axis length calculator 55 are actually performed by a computer that has been programmed in a predetermined manner. An example of the calculation process for calculating the coordinates of each connection point will be explained based on the flowchart of FIG. 4.

The flowchart illustrated in Fig. 4 is for simply explaining the operation of the manipulator of this example, and this flowchart shows that each parameter representing the time series of movement progress is set at a nearly constant rate from the start point to the end point. This is explained as an example of operation when controlling to perform translational movement and rotational movement.

First, initialize the device. In other words, the sample stage 7 is set at the initial position (
home position) and set the coordinates of each connection point at the home position (step a). The coordinates are expressed with the irradiation point as the origin, the X and Y axes in the horizontal plane, and the X axis in the vertical direction. Also, a flag F indicating whether or not the sample stage is located at the home position is set to zero.

For example, if the position of a point to be inspected on a sample is expressed by the coordinates when moving to the home position of the sample stage 7, and the attitude of the sample table is expressed by the rotation angle around the X-axis, y-axis, and X-axis from the home position, then When the sample stage is at the home position, the position of the sample at the irradiation point (the position of the virtual inspection target point on the sample, which may exist outside the sample) is (0, O, O). , the rotation angle is (0,0,0). Also, the coordinates of the center of the ball bearing of each link mechanism, that is, the connection point, are (X J * 'j J + Z J ) (
However, j indicates six connection points (1 to 6).

Next, the position of the inspection target point on the sample stage to be moved and the angle of the sample stage are input using a keyboard (not shown) (step b).

In other words, the position of this inspection target point is (Xn, Y,,Z,)
, input the angle of the sample as (θXn+θWn+θin).

If the flag is O, processing starts from the beginning. On the other hand, if the flag is 1, the process is started midway, and the current position/orientation information is read from the memory 52 and initial values are set (step C).

Next, the sample stage 7 is moved, and the virtual position of the inspection target point and the angle of the sample stage are calculated for each parameter representing the time series of the movement progress of moving the new inspection target point to the irradiation point (step d). That is, the parameter expressing the time series of movement progress is ψx1. ψyll ψZ 1.
4) X 11φ3'll φZ, (0 to 1 respectively,
i is an integer), and the position of the inspection target point to be moved (X J”
+Y jo+z4°) and the angle of the original sample stage (θxo,
θVO+ θto), the position of the virtual inspection point (X+, Yl, Z
l) The rotation angle of the sample stage (θ0.θ, θ81) is
It is given by:

X l =X O+ (X −=X o )・
ψX.

Y+ = Yo + (Yn - Yo) - ψy
1Z l= Zo + (Zn - Zo)'
ψZ +θ. , = θxo + (θ8o - θ engineering.)・φ□θ
yl=θyo+(θyn-θ.)・φy1θ, l=θ
Engineering. + (θ engineering.-02°)・φ□Here, for simplicity, ψXl=ψY+=ψZl=φx1=φyl=φZ+=
ψl (ψ, =O~1, ψ.=O1ψ.=1.i=o~
Consider an example of n).

Therefore, in this process, (X,, Y,, Z,), (θ8°.

θ,. , θ Eng. ), (X,, Y,, Z,), (θX1.
θ one.

,θz+) ,”””',(x,,y,,z, ),(
θ.

, θy1+ 08. ) is obtained.

For the i-th value of the parameter, the position of the virtual inspection target point is (x,,y,,z,), and the i-th angle is (θ1
．． θF++ 08. ), the coordinates of the six connection points are given by:

XJI
XJI XI'1. z=Ωヱplate°Ωy1°ΩxI3'Jl-ylZJI
ZJI
21Here Ω,・Ω21・Ω2. are the X-axis, y-axis, and Z-axis centered at the origin regarding the posture of the sample stage corresponding to the i-th value of the parameter expressing the time series of movement progress.
This is an exchange matrix of the coordinates of each connection point due to rotation around the axis.

The coordinates of the time-series point sequence of each connection point determined by the flowchart shown in FIG. The necessary axial length of each actuating rod 3 is determined.

An example of the arithmetic processing of this axial length calculator 55 will be explained with reference to FIG.

In the flowchart shown in FIG. 5, first, the axial length β+J (i=1 to n, j=1 to 6) of the actuating rod corresponding to each coordinate is calculated using the coordinates of a time series of connection points. ρ+t=! calculated from the following formula! ((XIJ-XJ)” + (yiJVa
)”+ (Z IJ-Z J)2) Here, Xl, y, z are the coordinates of the center of the lower ball bearing of each link mechanism (which is positionally fixed to the fixed frame 8). be.

This calculation is repeated n times for each connection point.

If each J2+) does not exceed the changeable range of each rod length, the calculation is completed, the obtained data is displayed on a display, etc., as necessary, and the process moves to the next step.

If the QIJ exceeds the changeable range of each rod length, the operation is disabled, so you can display a message and return to the beginning, or set multiple intermediate target points between the starting point and the ending point, and The sample stage may be arranged to match the position and orientation of the intermediate target at the intermediate target point, and to reach the final target value in a plurality of steps.

Furthermore, the same applies to the case where the rods interfere with each other.

With the above steps, the calculation processing necessary for moving the sample stage is completed.

The data representing the changes in the axial lengths of the operating rods 3 of the six sets of link mechanisms obtained are the linear motion introduction machine linear pulse motor 12 (indicated by reference numeral 57 in FIG. 3) shown in FIG. Because it shows the conditions for driving the
By driving each linear pulse smoke 12 in accordance with this, the sample stage moves to the target destination while each connection point passes through the coordinates of the point sequence indicating the movement, and the inspection target point of the target sample becomes the irradiation point. It will be matched.

In addition, in the example apparatus shown in FIG. 1, the column systems λ of the six sets of link mechanisms are arranged on the sample stage 7 in a positional relationship such that the three columns 28 to 2c of the column systems are substantially concentrated at one point. Furthermore, it has a structural feature in that it is connected to the sample stage 7 in a positional relationship such that the two support systems 2e and 2f are substantially concentrated at one point. The sixth figure shows these relationships in a two-dimensional manner.
It is a figure (a), and O in a figure shows the connection position with respect to a fixed pedestal, or has shown the connection position with respect to a sample stand. Also, FIG. 6(b) shows a modification of FIG.
A point where a to 2C are substantially centrally connected to the sample stage 7, a point where the two support systems 2e and 2f are substantially centrally connected at one point, and a connection point of the support system 2d to the sample stage. , it can be regarded as an example of a configuration in which three points are connected points.

Example 2 The example shown in Fig. 7 is a support system consisting of each link device.
The operating rod (link member) 23 is connected to the upper rod 23.
1 and the lower rod 232 are connected by a ball joint 30, and the swing with respect to the fixed frame 8 is guaranteed by the ball joint 30. The rest of the structure is generally the same as that of the first embodiment, but the ball joint of the connecting portion of the link mechanism to the fixed frame is omitted.

The structure of the ball joint 30 is shown in FIG. The ball joint 30 may be of any type as long as it has no backlash and allows smooth swinging, and is not limited to a ball joint, but may be a universal joint, for example. This also applies to the ball bearing of Example 1.

Furthermore, in this example, the rod 232 located below the ball joint 30 is assembled to the fixed frame using a bearing 40 that allows linear movement only in the axial direction, as shown in FIG.
You can do it with

Embodiment 3 As can be seen from the illustration, the example shown in FIG. 10 is characterized by the structure of the support system. In other words, the structure of the strut system in this example includes a set of operating rods 43a to 43c of the first strut system consisting of three link mechanisms that operate independently, and two link mechanisms that operate independently.
A set of actuating rods 43e and 43f of the third support system consisting of a book link mechanism has a structure in which one actuating rod is connected to another actuating rod in the middle. Furthermore, the second
The strut system has only one actuating rod 43d. That is, in the first support system, an actuating rod 43a is assembled to the sample stand and the fixed pedestal in the same configuration as in the first embodiment, and an actuating rod 43b is connected to the actuating rod 43b by a ball joint 44 in the middle. An actuating rod 43c is further connected to the actuating rod 43b by a ball joint 45 in the middle. On the other hand, in the support system of the cylinder 3, an actuation rod 43f is connected to an actuation port 43e connecting the sample stage 7 and the fixed pedestal 8 with a ball joint 46 in the middle. Note that the structure of the upper and lower ends of each link mechanism is the same as in the first embodiment.

With such a configuration as well, it is possible to spatially determine the position and orientation of the sample stage.

(Effects of the Invention) As described above, the manipulator for an analyzer according to the present invention utilizes a device such as a pulse motor that can accurately control axial movement, and moreover, only controls its linear momentum. , it is possible to arbitrarily and easily control the position and orientation of the sample stage in each of the six three-dimensional spatial degrees of freedom.

In addition, its structure utilizes a link mechanism, which is relatively simple and has sufficient functionality in terms of strength, so it can last for a long time even in applications where it is used under conditions such as high vacuum or heating. It also has the extremely large effect of realizing stable and highly accurate control.

Furthermore, since the strength of the link mechanism can be increased by using a link member with higher strength if necessary, there is also the effect that it can be suitably used in an analyzer that handles relatively large or heavy samples.

[Brief explanation of drawings]

FIG. 1 is a diagram showing an outline of the configuration of a mechanical drive part of a manipulator according to Embodiment 1 of the present invention, and FIG. 2(a)
, (b) is a cross-sectional view for explaining an example of the configuration of a rectilinear motion guiding machine. FIG. 3 is a block diagram showing the structural concept of the electronic control device of the first embodiment, and FIGS. 4 and 5 are flowcharts showing examples of control of the electronic control device. FIGS. 6(a) and 6(b) are plan views explaining the positional relationship of each actuating rod of the strut system in the first embodiment. FIG. 7 is a diagram showing an outline of the configuration of a manipulator according to a second embodiment of the present invention, FIG. 8 is a diagram showing the configuration of a ball bearing provided in the middle of a link member, and FIG. 9 is a diagram showing a bearing at the lower end of a link member. FIG. FIG. 10 is a diagram showing an outline of the configuration of a manipulator according to Embodiment 3 of the present invention. FIG. 11 is a diagram for explaining the outline of an energy loss spectrum analyzer, which is an example of an analyzer to which the present invention is applied. 1: Linear motion introduction machine λ: Strut system 3: Operating rod 4: Linear motion introduction machine 6: Upper ball bearing 7: Sample stand 8: Fixed mount; Strut system: Strut system 51: Input device 52: Memory device 54: Connection point coordinate calculator 55: Axis length calculator (4 others) Fig. 1 2a 2'b 2c 2d 2e 2f To calculation of transverse length Fig. 6 (a) Fig. 6 (b) Fig. 7 η. Figure 8 Figure 9

Claims (1)

[Claims] A fixed pedestal, a sample pedestal spatially spaced apart from the fixed pedestal, and link members extending from different positions of the fixed pedestal, and provided to be swingable with respect to the fixed pedestal. It consists of six sets of link mechanisms, including a supporting means that supports the sample stage so that it can move three-dimensionally, and a supporting means that supports the sample stage so that it can move in three dimensions, and a support means that supports each link member that extends from the fixed pedestal in the direction of its extension.
A linear motion introducing device assembled to each link mechanism so as to move backward, and the spatial coordinates of the connection point of each link mechanism connected to the sample stage at each value of the parameter expressing the time series of the movement progress, and the linear motion introducing device and an electronic control device that calculates a feed-out amount of the linear motion introduction machine, and the linear motion introduction machine is driven so that each connection point follows the spatial coordinates of each connection point calculated by the electronic control device. Manipulator for analytical equipment.