JP2785273B2 - Position adjusting mechanism, position adjusting method of solid-state imaging device, and method of attaching the same - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a position adjusting mechanism for adjusting a so-called tilt angle of an object to be adjusted. In addition, the present invention relates to a position adjustment method for adjusting a tilt angle of the solid-state imaging device and a method for mounting the solid-state imaging device.

SUMMARY OF THE INVENTION In the present invention, a movable member is provided so as to be movable in two turning directions orthogonal to each other with respect to a fixed member, and an object to be adjusted is arranged at the center of rotation of the movable member, and rotation of the object to be adjusted is performed. In the position adjusting mechanism for adjusting the angle, the opposing surfaces of the fixed member and the movable member are provided on substantially spherical surfaces, respectively, and a ball bearing is arranged between the two substantially spherical surfaces so that the movable member can be moved. With this configuration, the centers of the two radii of curvature for moving the single movable member in the two turning directions orthogonal to each other can be aligned without deviation, and high-precision positioning can be easily performed.

2. Description of the Related Art For example, a color imaging apparatus using a solid-state imaging device needs to accurately perform registration adjustment, that is, so-called registration adjustment, of respective subject images of a plurality of solid-state imaging devices. In particular, in order to increase the resolution by employing the so-called space picture element shifting method, a registration on the order of 0.1 μm must be secured. Therefore, when the solid-state imaging device is mounted, the position of the solid-state imaging device is adjusted with respect to the mounted portion using the position adjustment device. This position adjustment device enables the solid-state imaging device 1 to move in the vertical (X), left / right (Y), front / rear (Z), and rotational (θ, _Rx turning, _Ry turning) directions as shown in FIG. FIG. 4 and FIG. 5 show a conventional position adjusting mechanism for adjusting the tilt angle ( _Rx turning, _Ry turning) of the apparatus.

4 to 6, the position adjustment mechanism includes a fixed member 50 and a movable member 51 that moves with respect to the fixed member 50. The movable member 51 includes an X-direction movable portion 52 and a Y-direction movable portion. Consists of 53. The fixed member 50, the X-direction movable portion 52, and the Y-direction movable portion 53 are arranged so that one surface thereof is in contact with each other in this order. The contact surface between the fixed member 50 and the X-direction movable portion 52 is X
The contact surfaces of the X-direction movable portion 52 and the Y-direction movable portion 53 are configured as Y-direction cylindrical surfaces 52b, 53a having a curvature in the Y-direction. I have. X-direction cylindrical surface 50a, the radius of curvature R _x of 52a the Y-direction cylindrical surface 52 b, is larger than the radius of curvature R _y in 53a, both the radius of curvature R _x, the center position O _x of R _y, O _y three-dimensional Are configured to match each other. Also, two X-direction cylindrical surfaces 50a, 52
a is provided with a dovetail groove 54 on one side and a projection 55 on the other side along the X direction, and the X direction movable section 52 moves in the _Rx turning direction with respect to the fixed member 50 by rotation of the X adjustment knob 56. .
The two Y-direction cylindrical surfaces 52b and 53a are provided with a dovetail groove 57 on one side and a protrusion 58 on the other along the Y direction, and the Y-direction movable section 53 Moves in the _Ry turning direction with respect to. The two adjustment knobs 5
The rotation of 6,59 is changed to linear motion by a worm gear and worm wheel (not shown) and transmitted to each member. Further, a clamp unit 60 is attached to the Y-direction movable unit 53, and the solid-state imaging device 1 as an object to be adjusted is attached to the clamp unit 60.
Is clamped. The center of the clamped solid-state imaging device 1 is disposed at a substantially central position of the curve radii _Rx and _Ry .

Thus, the color separation prism is clamped to another clamp portion, and the emission surface thereof is arranged so as to face the fixed imaging device 1. A test chart or the like is photographed by the color separation prism and the solid-state imaging device 1. The two adjustment knobs 56 and 59 are rotated while observing the output signal, and the X-direction movable portion 52 and the Y-direction movable portion 53 are rotated _Rx and _Ry to adjust the tilt angle.

[Problems to be Solved by the Invention] However, as shown in FIGS. 5 and 6, between the two dovetail grooves 54, 57 and the protrusions 55, 58, the protrusions 55, 58 are provided.
Are formed so that the slidable grooves can slide in the dovetail grooves 54 and 57, and the X-direction movable portion 52 can be moved in the Y-axis direction and the Y-direction movable portion 53 can be moved in the X-axis direction by the clearance lance d. . Accordingly, when the X-direction movable part 52 is turned, the Y-direction movable part 53 is displaced in the X-axis direction due to an external force from the X-direction movable part 52. Similarly, when the Y-direction movable part 53 is turned, the X-direction movable part 52 Axial deviations of both radii of curvature R _x , R
_y of the center position O _x, O _y is displaced. Thus, the X-axis movable section 52
And the Y-axis direction movable part 53 interfere with each other, so that once R _x
Even if the tilt angle in the turning direction or the _Ry turning direction is adjusted, the center positions _Ox and _Oy are displaced. Therefore, it is necessary to adjust the tilt angle again at the displaced center position, and the positioning is troublesome. In particular, it is very difficult to perform highly accurate positioning.

Therefore, an object of the present invention is to provide a position adjusting mechanism capable of easily performing high-precision positioning, a position adjusting method of a solid-state imaging device, and a method of attaching the same.

[Means for Solving the Problems] A position adjusting mechanism according to the present invention for achieving the above object has a fixing member having a concave substantially spherical surface on a surface thereof and a position facing the concave substantially spherical surface and the same. Or a movable member having a convex substantially spherical surface having a close radius of curvature, a ball bearing disposed between the substantially spherical surfaces of the fixed member and the movable member, and moving the movable member in two directions orthogonal to each other. And a movable means, wherein an object to be adjusted is arranged so as to be rotatable together with the movable member at a substantially central position of the radius of curvature of the movable member, and a rotation angle of the object to be adjusted is adjusted.

The configuration of the method for adjusting the position of the solid-state imaging device is such that the solid-state imaging device is arranged as an object to be adjusted, and the moving member is searched for, so that the movable member is moved relative to the fixed member in two directions orthogonal to each other on a spherical surface. The position of the solid-state imaging device with respect to the optical member is adjusted by moving each of them while making the center positions of the turnings in the two directions coincide with each other.

The configuration of the mounting method of mounting the solid-state imaging device to the optical member, by operating the moving means, the movable member with respect to the fixed member in two directions orthogonal to each other on the spherical surface,
After adjusting the position of the solid-state imaging device with respect to the optical member by moving the center position of the rotation in the two directions while always making them coincide with each other, the adjusted solid-state imaging device is fixed to the optical member. It is.

[Operation] By the driving of the moving means, the movable member moves on its spherical surface, turns in two turning directions orthogonal to each other, and adjusts the tilt angle of the object to be adjusted with respect to the two orthogonal angles. here,
Since the radius of curvature of the spherical surface of the movable member is constant in all the turning directions and its center is at one point, there is no need to readjust the center of the radius of curvature, and in principle, the position can be adjusted once in each of the two turning directions. I just need.

Embodiment An embodiment of the present invention will be described below with reference to the drawings.

FIGS. 1 and 2 show a position adjusting mechanism for adjusting a tilt angle when the solid-state imaging device 1 is mounted on a color separation prism (not shown) which is an optical member.

1 and 2, the fixing member 2 is a fixing base 3
And a fixed spherical seat 5 having a lower portion disposed in the groove 4 of the fixed base 3, and the fixed base 3 and the fixed spherical seat 5 are fixed by mounting screws 6. The upper surface of the fixed spherical seat 5 is formed as a concave spherical surface 5a.

The movable member 7 includes a movable base 8 and a movable spherical seat 10 having an upper portion disposed in a groove 9 of the movable base 8.
And the movable spherical seat 10 are fixed by mounting screws 11. The lower surface of the movable spherical seat 10 is formed as a convex spherical surface 10a,
The spherical surface 10a of the movable spherical seat 10 is the spherical surface 5 of the fixed spherical seat 5.
It faces a at a certain distance from a. Spherical surface 1 of movable spherical seat 10
0a has a smaller radius of curvature R than the spherical surface 5a of the fixed spherical seat 5, and the center O of the radius of curvature of the two spherical surfaces 10a, 5a.
Are configured to match. In this embodiment, both the radii of curvature are configured as described above, but it is sufficient that both radii of curvature are the same or approximate.

Further, spring insertion holes 5b and 10b are formed at the center of the fixed spherical seat 5 and the movable spherical seat 10. These spring insertion holes 5b, 10b
The coil spring 12 is inserted into the
Are locked to a locking plate 13. The two locking plates 13 are respectively locked by spring receiving portions 3a, 8a of the fixed base 3 and the movable base 8, and the movable member 7 is mounted on the fixed member 2 by the ball bearing 14 by the spring force of the coil spring 12. Is pressed through.

The ball bearing 14 is interposed between both the spherical surfaces 5a, 10a of the fixed spherical seat 5 and the movable spherical seat 10. A plurality of the ball bearings 14 are arranged at regular intervals on the same circumference centered on the centers of the spherical surfaces 5a and 10a.

The moving means 17 is configured to move the movable member 7 in the X direction and the Y direction orthogonal to each other when the X axis and the Y axis are specified as shown in FIG. That is, as shown in detail in FIG. 1, a rotating body 19 is press-fitted into a rotating shaft 18 a of the motor 18, and the tip of the rotating body 19 is inserted into the feed member 20. A male screw and a female screw are formed on the rotating body 19 and the feed member 20, respectively, to constitute a screw feed mechanism 21.
A ball holding member 22 is fixed to the feed member 20, and a ball 23 is rotatably supported by the ball holding member 22 at two places by pins 24. These two balls 23 are in contact with the rollers 25 of the movable base 8. The roller 25 is rotatably supported on the movable base 8 by a shaft 26, and the ball 23 is
Point contact. On the other hand, a spring receiving portion 27 is attached to the opposite side of the movable base 8 with which the ball 23 contacts, and one end of a spring 28 contacts the spring receiving portion 27. This spring
The other end of 28 abuts a spring holding portion 29 fixed to the fixed base 3,
The movable base 8 is pressed against the ball 23 by the spring force of the spring 28. Thus, when the ball 23 moves in the X direction, the movable member 7 is moved against the spring force of the spring 28 or by the spring force.
Moves in the X direction following the ball 23. As shown in FIG. 2, another motor 30 is juxtaposed near the motor 18, and a rotating body 31 is press-fitted into a rotating shaft 30a of the motor 30. A rod 32 is inserted into the tip of the rotating body 31, and a female screw and a male screw are formed on the rotating body 31 and the rod 32, respectively, to form a screw feed mechanism 33. The rod 32 is slidably disposed in a slide hole 34a of a case 34, and a sphere 35 is fixed to a tip of the rod 32. The spherical body 35 is arranged in the spherical groove 36a of the ball holding member 36, and the spherical body 35 and the spherical groove 36a form a ball joint. The ball holding member 36 is rotatably supported by the case 34 with pins 37, and a ball 38 is rotatably supported by pins 39 on the movable base 8 side of the ball holding member 36. The ball 38 is in contact with a roller 25 provided on an adjacent side surface of the movable base 8 to which the ball 23 contacts. A spring receiving portion 27, a spring 28, and the like are also provided on the opposite side of the movable base 8 with which the ball 38 abuts in the same manner as described above. When 38 moves in the Y direction, the movable member 7 moves in the Y direction against or by the spring force.

As shown in FIG. 3, the movable unit 7 has a side surface parallel to the Y axis abutting on the ball 23 at two points, and a side surface parallel to the X axis abuts the ball 28 at one point. The movable member 7 moves along an auxiliary line c connecting the contact points t of the two balls 23 when moving in the Y direction, and also presses in the X direction when moving in the X direction.
Go to Therefore, the pressing direction a in the X direction is changed to the auxiliary line c.
As long as the direction is set at a right angle to the direction, even if the pressing direction b in the Y direction deviates from the true direction (the direction perpendicular to the auxiliary line c), it moves along the auxiliary line c. Is maintained with high accuracy. In this embodiment, X
In order to maintain the orthogonal accuracy between the direction and the Y direction, the Y direction is pressed by rotational movement and two motors 18, 30 are arranged side by side to reduce the size of the apparatus. May be performed by linear movement.

As shown in FIG. 2, a clamp unit 40 is fixed to the upper surface of the movable base 8, and the solid-state imaging device 1 as an object to be adjusted is clamped to the clamp unit 40. At the center of the clamped solid-state imaging device 1, a movable spherical seat 10 is provided.
Is located at the center position O of the radius of curvature R of the spherical surface 10a.

 Hereinafter, the operation of the above configuration will be described.

The solid-state image pickup device 1 is clamped to the clamp unit 40, and the color separation prism (not shown) is clamped by another clamp unit (not shown) so that the emission surface of the color separation prism faces the solid-state image pickup device 1. I do. A test chart or the like is photographed by the color separation prism and the solid-state imaging device 1, and the position is adjusted in the Z direction, the Y direction, the X direction, and the θ direction in this order by another position adjustment mechanism (not shown) while observing the output signal. . After completing these adjustments, _Rx turning direction and _Ry
Adjust the position in the turning direction.

Adjustment of the _Rx turning direction is performed by rotating the motor
19 rotates, and the ball holding member 22 moves in the X ⁺ direction or the X ^- direction by the screw feed mechanism 21. Then, the movable member 7 is
The spherical surface 10a of the movable member 7 moves on the ball bearing 14 along the spherical surface 5a of the fixed member 2 in order to follow the movement of the ball 23 by the spring force of or against the spring force. The movable member 7 turns _Rx around the center position O of the radius of curvature R,
While observing the output signal, the position of the solid-state imaging device 1 in the _Rx turning direction, that is, the so-called tilt angle is adjusted.

Adjustment of the _Ry turning direction is performed by rotating the motor 30 when the motor 30 is driven.
31 rotates and the rod 32 moves in the X direction by the screw feed mechanism 33. The movement of the rod 32 rotates the ball holding member 36, and the ball 38 moves in the substantially Y ⁺ direction or the substantially Y ^- direction. Then, similarly to the above, the movable member 7 attempts to follow the movement of the ball 38 by the spring force of the spring 28 or against the spring force, so that the spherical surface 10a of the movable member 7 moves along the spherical surface 5a of the fixed member 2. It moves on the ball bearing 14. The movable member 7 has a radius of curvature R
And R _y turning center position O as the center of the position of the R _y turning direction of the solid-state imaging device 1 while viewing the output signal, adjusts the so-called tilt angle.

Here, the movable member 7 moves on the spherical surface 10a, and the radius of curvature R of the spherical surface 10a is determined in all the turning directions ( _Rx turning direction, _Ry
Including turning direction. ) And its center position O
Is specified at one point. Therefore, it is sufficient to adjust the position once in principle for each of the _Rx turning direction and the _Ry turning direction, and the position adjustment in the turning direction can be easily performed,
Also, highly accurate positioning can be easily performed.

When all the position adjustments are completed as described above, the four corners of the holder plate (not shown) on the solid-state imaging device 1 side and the holder plate (not shown) on the color division prism side which is the optical member side in the clamped state. Is fixed by soldering.

[Effects of the Invention] As described above, according to the first to third aspects of the present invention, the opposing surfaces of the fixed member and the movable member are provided on substantially spherical surfaces, respectively, and between the opposing surfaces. Since the movable member is moved in two directions orthogonal to each other with a ball bearing interposed therebetween, the center positions of the two orthogonal turning directions (curvature radii) always coincide with each other. It is advantageous in that the position of the tilt angle can be easily and easily adjusted and high-precision positioning can be easily performed.

Further, since the radii of curvature in the two turning directions of the movable member are the same, the turning angle of the movable member with respect to the stroke amount for moving the movable member in the two turning directions is the same, and adjustment is easy.

Further, since a single movable member is moved in two turning directions, the structure is simple and the device can be downsized.

[Brief description of the drawings]

1 to 3 show an embodiment of the present invention. FIG. 1 is a sectional view taken along line AA of FIG. 2, FIG. 2 is a partially broken plan view of a position adjusting mechanism, and FIG. 4 to 6 show a conventional example, FIG. 4 is a perspective view of a position adjusting mechanism, FIG. 5 is a side view of the position adjusting mechanism, FIG. FIG. 6 is a plan view of the position adjusting mechanism. 1 ... solid-state imaging device (object to be adjusted), 2,50 ... fixed member,
7,51 movable member, 14 ball bearing, 17 moving means.

Continued on the front page (58) Fields surveyed (Int.Cl. ⁶ , DB name) H04N 5/225-5/232 H04N 5/335 H04N 9/09-9/097

Claims (3)

(57) [Claims] A fixing member having a concave substantially spherical surface on the surface;
A movable member having a convex substantially spherical surface having a curvature radius equal to or close to the concave substantially spherical surface and a ball bearing disposed between the substantially spherical surfaces of the fixed member and the movable member; Moving means capable of moving the movable member in two directions orthogonal to each other, wherein the object to be adjusted is rotatably disposed together with the movable member at a substantially central position of the radius of curvature of the movable member. A position adjustment mechanism wherein the rotation angle of an object can be adjusted. 2. A method for adjusting the position of a solid-state imaging device, comprising: arranging a solid-state imaging device as an object to be adjusted, and operating a moving unit to move a movable member relative to a fixed member in two directions orthogonal to each other on a spherical surface. Wherein the position of the solid-state imaging device with respect to the optical member is adjusted by moving each of them while always keeping the center position of the turning in the two directions. 3. A mounting method for attaching a solid-state imaging device to an optical member, wherein a movable member is operated to move a movable member relative to a fixed member in two directions orthogonal to each other on a spherical surface in the two directions. The solid-state imaging device is characterized in that, after adjusting the position of the solid-state imaging device with respect to the optical member by moving each of them while always keeping the center position of the rotation coincident, the adjusted solid-state imaging device is fixed to the optical member. How to mount the element.