JPH06111306A - Apparatus for production of magnetic recording medium - Google Patents

Abstract

PURPOSE:To execute diagonal vapor deposition with drastically lessened influence of heat by disposing a cylindrical cooling can, which has a surface area to be wound with a material for vapor deposition in plural turns without overlaps, diagonally with an evaporating source. CONSTITUTION:A magnetic metal 10 is irradiated with a beam 32 by an electron gun 11. This metal 10 evaporates and a tape 5 entering the evaporation region rotates circumferentially on the cooling can 8 while this tape is subjected to diagonal vapor deposition. The tape is then emitted from the evaporation region. The diagonal magnetic film is formed on the tape 5 during this time. Further, the tape 5 is supplied with O2 from a pipe (not shown in Fig.) upstream of a take-up roll 7, by which an oxidized film is formed as a protective film. The traveling speed of the tape is made higher by winding the tape in plural turns than by winding in single turn. The influence of the heat on the material for vapor deposition is thus lessened and the magnetic recording medium having good quality is obtd. In addition, the magnetic material is saved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a vapor-deposited magnetic recording medium in which vapor of a magnetic material is vapor-deposited to form a magnetic layer.

[0002]

2. Description of the Related Art A conventional manufacturing apparatus of this type is disclosed in, for example, Japanese Patent Publication No. 4-18372.
This is shown in FIG. In the figure, a material to be vapor-deposited 23 is provided in a vacuum container 21. The vapor-deposited material 23 is made of a synthetic resin tape and runs around the cooling can 22 as it rotates. This evaporated material 2
An evaporation source 27, which is a crucible containing the magnetic material 26, is installed immediately below the reference numeral 3. Further, a horizontal deposition preventive plate 28 having a transmission hole 29 in the center is arranged near the vapor deposition target material running on the lower end surface of the cooling can 22. The electron beam E generated by the electron beam generator 20 is applied to the magnetic material 2
6 is made incident, and the vaporized vapor is vapor-deposited on the vapor deposition target material 23.

[0003]

By the way, when forming a magnetic layer by vapor deposition, placing a material to be vapor-deposited (polymer film) in a high-temperature vapor of molten metal for a long time may cause thermal influence on the polymer film. Is not desirable,
The time should be as short as possible.

In the above conventional apparatus, the vapor deposition material is vaporized only once when the vapor deposition material travels in the circumferential direction along the cooling can and passes through the evaporation region of the magnetic material. In order to form the magnetic layer by this single vapor deposition, the vapor deposition target material is exposed to high temperature steam for a long time. Therefore, the material to be vapor-deposited may be greatly affected by heat and may be deformed or deteriorated.

In addition, one strip of material to be vapor-deposited is wound around one side of the cooling can, and the remaining portion of the surface of the cooling can is exposed. Therefore, vapor adheres to the surface of the cooling can other than the material to be vapor-deposited. , Productivity was very bad. In particular, since Co-Ni-Cr used as a magnetic material is very expensive, it is very disadvantageous in terms of cost.

Therefore, it is an object of the present invention to provide a novel apparatus for manufacturing a magnetic recording medium which solves the problems of the prior art.

[0007]

A magnetic recording medium manufacturing apparatus according to the present invention comprises a vacuum container, a traveling device for traveling a series of materials to be vapor-deposited disposed in the vacuum container, and a device below the material to be vapor-deposited. In a magnetic recording medium manufacturing apparatus including an evaporation source arranged to accommodate a magnetic material, and an electron beam generator for irradiating the magnetic material of the evaporation source with an electron beam, the traveling device has a cylindrical cooling can. The cooling can has a surface area that allows the vapor deposition material to be wound around a plurality of strips without overlapping, and is inclined with respect to the evaporation source so that vapor of the magnetic material is obliquely incident on the vapor deposition material. It is characterized by being arranged.

Further, it is preferable that the cooling can has a guide pin for guiding the material to be vapor-deposited.

It is also possible to provide a refrigerant inlet on the lower side of the cooling can and provide a refrigerant outlet on the upper side.

Further, it is also preferable to include an oxidizing gas supply pipe arranged to supply an oxidizing gas when the magnetic film is formed.

In the present invention, the traveling device includes a cylindrical cooling can, and the cooling can has a surface area capable of winding the vapor-deposited material around a plurality of strips without overlapping.

By winding the vapor deposition material around a plurality of strips, the vapor deposition material is vapor deposited a plurality of times.
That is, the material to be vaporized runs spirally on the cooling can,
While rotating in the circumferential direction, the magnetic material evaporates in and out of the evaporation region (indicated by reference numeral 31 in FIG. 1), and moves in the axial direction while repeating this process a plurality of times, and the vapor deposition material is the evaporation region of the magnetic material. The vapor deposition is performed every time the inside is entered. For example, when the material to be vapor-deposited is wound around five strips, the thickness of the film formed per one time is approximately one fifth.

When the conventional apparatus and the apparatus of the present invention are compared, and the vapor deposition time T is the same (in the conventional apparatus, the material to be vapor-deposited in the circumferential direction enters the evaporation region of the magnetic material and passes there). (Time until the material evaporates in the circumferential direction in the apparatus of the present invention enters the evaporation region of the magnetic material and moves axially on the cooling can in the apparatus of the present invention to exit there)), 5 The running speed of the filament winding is about 5 times that of the above-described conventional 1-filament winding (the traveling distance is 5 times, the speed is also 5 times), and the vapor deposition material is within the evaporation region of the magnetic material. The time to stay is greatly reduced. Further, the material to be vapor-deposited does not always exist in the vaporization area, but moves in and out of the vaporization area, so that the actual vapor deposition time T ′ becomes shorter than T. As described above, in the apparatus of the present invention, the time of exposure to the high temperature magnetic material vapor is significantly reduced, and as a result, the influence of heat on the material to be vapor-deposited is significantly reduced.

Further, by winding the vapor deposition material around a plurality of strips, the surface of the cooling can is covered with the vapor deposition material, and vapor of the magnetic material is prevented from adhering to the surface of the cooling can other than the vapor deposition material. The property is improved and the magnetic material can be saved.

Further, in the present invention, the cooling can is arranged so as to be inclined with respect to the evaporation source so that the vapor of the magnetic material is obliquely incident on the material to be vapor-deposited. By doing so, the magnetic properties, especially the coercive force, can be made extremely large (this is disclosed in Japanese Patent Publication No. 41-19389).

The guide pin of the cooling can guides the vapor-deposited materials so that they can travel on the cooling can without overlapping with each other.

A refrigerant having a lower temperature is introduced from the lower side to the inlet of the refrigerant provided on the lower side of the cooling can, the refrigerant gradually moves upward, and an outlet of the refrigerant provided on the upper side has a higher temperature. The refrigerant that has risen is discharged, thereby effectively and efficiently cooling the material to be vapor-deposited on the cooling can.

Further, the oxidizing gas supply pipe serves to supply the oxidizing gas when the magnetic film is formed and to form a protective layer made of the oxide film on the magnetic film.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a block diagram of an apparatus for manufacturing a magnetic recording medium according to the present invention. This device includes a vacuum container 1, a traveling device 2, an evaporation source 3, and an electron beam generator 4. The vacuum container 1 is connected to a vacuum pump (not shown), and a traveling device 2 for traveling a series of materials to be vapor-deposited, that is, a synthetic resin tape 5, is arranged in the vacuum container. The traveling device 2 includes a feed roll 6 and a winding roll 7.
And a cooling can 8 described later. The evaporation source 3 is composed of a crucible 9 disposed below the synthetic resin tape 5, and the crucible 9 accommodates the magnetic metal 10 in a recess formed on the upper surface thereof. The electron beam generator 4 is equipped with an electron gun 11, which emits an electron beam 32, and the electron beam is emitted from the magnetic metal 1 of the crucible 9.
It is designed to irradiate 0.

A shielding plate 12 having a central hole 13 is horizontally arranged below the cooling can 8, and shielding plates 14 are horizontally arranged below the feed roll 6 and the take-up roll 7, respectively.

The cooling can 8 has a hollow cylindrical shape, and the cylindrical cooling can 8 has a surface area such that the tapes 5 can be wound around a plurality of strips without overlapping. In the drawing, the tape 5 is wound around five threads, and a series of tapes 5 travels in the vacuum container 1 at a predetermined speed by the operation of the travel device 2. Further, a plurality of guide pins 19 are arranged on the outer peripheral surface of the cooling can along the traveling direction of the tape 5, and the guide pins 19 guide the tape 5.
It is possible to travel spirally on the cooling can without overlapping with each other, that is, while rotating in the circumferential direction and shifting in the axial direction.

Further, the cooling can 8 is arranged so as to be inclined with respect to the crucible 9. This inclination is due to the feed roll 6
The portion on the side is low, and the portion on the winding roll 7 side is high. Since the cooling can 8 is inclined with respect to the crucible 9, the vapor of the magnetic metal 10 in the crucible obliquely enters the tape 5.

The cooling can 8 has a cooling water inlet 16 on its lower end surface 15 and a cooling water outlet 18 on its upper end surface 17. The cooling water enters the cooling can through the inlet 16, gradually rises while cooling the tape 5 wound on the surface, and the cooling water warmed by cooling the tape 5 is sequentially extruded through the outlet 18.

An oxidizing gas supply pipe 30 is arranged in the vacuum container 1 so as to supply the oxidizing gas when the magnetic film is formed. The gas supply pipe 30 has a T-shape, and has a large number of gas ejection holes at the tip thereof so that the tape 5 flows (runs).
With respect to the above, it is located on the upstream side of the winding roll 7.

In order that the tape 5 wound around the five threads is entirely in the evaporation area 31 of the magnetic metal 10, for example, the position of the shield plate 12, the size of the central hole 13 thereof, or the crucible 9 is set. The inclination angle of the cooling can 8 and the distance between the crucible and the cooling can can be adjusted.

In the apparatus of the present invention thus configured, when the electron beam 32 is directed toward the magnetic metal 10 by the electron gun 11, the magnetic metal 10 is irradiated with the electron beam to melt and continue to evaporate. The tape 5 delivered from the feed roll 6 and entering the evaporation region rotates in the circumferential direction on the cooling can while receiving the oblique deposition of the magnetic metal vapor, and also exits the evaporation region and repeats this. The tape gradually moves in the axial direction, during which an orthorhombic magnetic film is formed on the tape. Further, the tape 5 is supplied with oxygen by the oxidizing gas supply pipe 20 on the upstream side of the winding roll 7, whereby an oxide film is formed as a protective film on the oblique magnetic film, and the tape 5 is wound by the winding roll 7. Taken.

By the way, in the magnetic layer of the magnetic recording medium, it is generally said that the portion actually used is about a quarter of the recorded wavelength. For example, 4MH
It can be said that a magnetic layer thickness of 0.25 μm is sufficient for the wavelength of z. According to the apparatus of the present invention, the magnetic layer having an arbitrary thickness can be formed on the tape by changing the number of tapes and by changing the running speed of the tape.

(Experimental Example 1) The following experimental results were obtained by using the device of the present invention thus constructed under the following conditions.

Conditions: the number of threads wound around the cooling can: 5 magnetic metal Co—Ni alloy (80−
20 wt%) Thickness of magnetic film 1500 angstrom Width of tape 10 cm Tape running speed 50 m / min Electron gun output 100 kw Cooling can temperature 20 ° C. Result: Magnetic property Coercive force (Hc) was 900 (Oe).

(Experimental Example 2) Next, as a comparative example, an experiment was conducted to form a magnetic film having the same thickness (1500 angstroms) with one winding on the cooling can, and the following results were obtained. Got

Condition: Magnetic metal Same as above Tape width Same as above Electron gun output Same as above Cooling can temperature Same as above Result: In order to form a magnetic film of the same thickness with one tape, the tape running speed is 10 m / min. And Experimental Example 1
I had to make it one-fifth of that. As a result, the wrinkles of once or twice entered the tape while traveling 200 m.

(Experimental Example 3) Further, as a comparative example, when the cooling can was made horizontal without inclination and the other conditions were the same as in Experimental Example 1, an experiment was conducted, and the following results were obtained.

Results: Magnetic properties Coercive force (Hc) is 540
(Oe), which was 40% less than in Experimental Example 1.

[0035]

Since the present invention is constructed as described above, it has the following effects.

When a magnetic film having the same thickness is formed, it is possible to increase the traveling speed of the material to be vapor-deposited in accordance with the number of windings by using a plurality of windings, as compared with the case of forming a single winding. The time during which the material stays in the evaporation region of the magnetic material is greatly reduced, and therefore the thermal effect on the material to be vapor-deposited can be significantly reduced, and as a result, a good quality magnetic recording medium can be realized.

Further, by forming a plurality of windings, the surface of the cooling can is covered with the material to be evaporated, vapor of the magnetic material is prevented from adhering to the surface of the cooling can other than the material to be evaporated, and the productivity is improved. In addition, the magnetic material can be saved.

Further, by tilting the cooling can, it is possible to easily form an oblique vapor deposition film having excellent magnetic characteristics.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an apparatus for manufacturing a vapor-deposited magnetic recording medium according to the present invention.

FIG. 2 is a configuration diagram of a conventional vapor deposition type magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1 Vacuum Container 2 Traveling Device 3 Evaporation Source 4 Electron Beam Generator 5 Tape (Material to be Evaporated) 8 Cooling Can 10 Magnetic Metal

Claims (4)

[Claims] 1. A vacuum container, a traveling device disposed in the vacuum container for traveling a series of materials to be vapor-deposited, an evaporation source disposed below the material to be vapor-deposited for accommodating a magnetic material, and the evaporation source. A magnetic recording medium manufacturing apparatus including an electron beam generator for irradiating the magnetic material with an electron beam, wherein the traveling device includes a cylindrical cooling can, and the cooling can includes a plurality of materials to be vapor-deposited without overlapping. Manufacture of a magnetic recording medium having a surface area capable of being wound around a strip and arranged so as to be inclined with respect to the evaporation source so that vapor of a magnetic material is obliquely incident on a material to be deposited. apparatus. 2. The apparatus for manufacturing a magnetic recording medium according to claim 1, wherein the cooling can includes a guide pin that guides a material to be vapor-deposited. 3. A cooling medium inlet is provided on the lower side of the cooling can,
3. The magnetic recording medium manufacturing apparatus according to claim 1, further comprising an outlet for the refrigerant on the upper side. 4. The apparatus for manufacturing a magnetic recording medium according to claim 1, further comprising an oxidizing gas supply pipe arranged to supply an oxidizing gas when forming the magnetic film.