JPH0610674Y2 - ウエーハ支持装置 - Google Patents

ウエーハ支持装置

Info

Publication number
JPH0610674Y2
JPH0610674Y2 JP1988153488U JP15348888U JPH0610674Y2 JP H0610674 Y2 JPH0610674 Y2 JP H0610674Y2 JP 1988153488 U JP1988153488 U JP 1988153488U JP 15348888 U JP15348888 U JP 15348888U JP H0610674 Y2 JPH0610674 Y2 JP H0610674Y2
Authority
JP
Japan
Prior art keywords
wafer
supporting
fitting
jigs
partitioning member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988153488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0273732U (enExample
Inventor
芳夫 竹間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fukui Shin Etsu Quartz Co Ltd
Original Assignee
Fukui Shin Etsu Quartz Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fukui Shin Etsu Quartz Co Ltd filed Critical Fukui Shin Etsu Quartz Co Ltd
Priority to JP1988153488U priority Critical patent/JPH0610674Y2/ja
Publication of JPH0273732U publication Critical patent/JPH0273732U/ja
Application granted granted Critical
Publication of JPH0610674Y2 publication Critical patent/JPH0610674Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1988153488U 1988-11-28 1988-11-28 ウエーハ支持装置 Expired - Lifetime JPH0610674Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988153488U JPH0610674Y2 (ja) 1988-11-28 1988-11-28 ウエーハ支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988153488U JPH0610674Y2 (ja) 1988-11-28 1988-11-28 ウエーハ支持装置

Publications (2)

Publication Number Publication Date
JPH0273732U JPH0273732U (enExample) 1990-06-05
JPH0610674Y2 true JPH0610674Y2 (ja) 1994-03-16

Family

ID=31429372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988153488U Expired - Lifetime JPH0610674Y2 (ja) 1988-11-28 1988-11-28 ウエーハ支持装置

Country Status (1)

Country Link
JP (1) JPH0610674Y2 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56165317A (en) * 1980-05-26 1981-12-18 Fujitsu Ltd Manufacture of semiconductor device
JPS63161610A (ja) * 1986-12-25 1988-07-05 Toshiba Ceramics Co Ltd ウエ−ハボ−ト
JPS63159821U (enExample) * 1987-04-08 1988-10-19

Also Published As

Publication number Publication date
JPH0273732U (enExample) 1990-06-05

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