JPH0325405Y2 - - Google Patents

Info

Publication number
JPH0325405Y2
JPH0325405Y2 JP1989000950U JP95089U JPH0325405Y2 JP H0325405 Y2 JPH0325405 Y2 JP H0325405Y2 JP 1989000950 U JP1989000950 U JP 1989000950U JP 95089 U JP95089 U JP 95089U JP H0325405 Y2 JPH0325405 Y2 JP H0325405Y2
Authority
JP
Japan
Prior art keywords
cassette
wafer
wafers
processing
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1989000950U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01121931U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989000950U priority Critical patent/JPH0325405Y2/ja
Publication of JPH01121931U publication Critical patent/JPH01121931U/ja
Application granted granted Critical
Publication of JPH0325405Y2 publication Critical patent/JPH0325405Y2/ja
Expired legal-status Critical Current

Links

JP1989000950U 1989-01-09 1989-01-09 Expired JPH0325405Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989000950U JPH0325405Y2 (enExample) 1989-01-09 1989-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989000950U JPH0325405Y2 (enExample) 1989-01-09 1989-01-09

Publications (2)

Publication Number Publication Date
JPH01121931U JPH01121931U (enExample) 1989-08-18
JPH0325405Y2 true JPH0325405Y2 (enExample) 1991-06-03

Family

ID=31200415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989000950U Expired JPH0325405Y2 (enExample) 1989-01-09 1989-01-09

Country Status (1)

Country Link
JP (1) JPH0325405Y2 (enExample)

Also Published As

Publication number Publication date
JPH01121931U (enExample) 1989-08-18

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