JPH059575Y2 - - Google Patents
Info
- Publication number
- JPH059575Y2 JPH059575Y2 JP1985132958U JP13295885U JPH059575Y2 JP H059575 Y2 JPH059575 Y2 JP H059575Y2 JP 1985132958 U JP1985132958 U JP 1985132958U JP 13295885 U JP13295885 U JP 13295885U JP H059575 Y2 JPH059575 Y2 JP H059575Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- port
- pistons
- main body
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002184 metal Substances 0.000 claims description 19
- 239000012530 fluid Substances 0.000 claims description 11
- 238000005260 corrosion Methods 0.000 claims description 7
- 230000007797 corrosion Effects 0.000 claims description 7
- 239000007789 gas Substances 0.000 description 10
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 4
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Fluid-Driven Valves (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985132958U JPH059575Y2 (US06566495-20030520-M00011.png) | 1985-08-30 | 1985-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985132958U JPH059575Y2 (US06566495-20030520-M00011.png) | 1985-08-30 | 1985-08-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6240373U JPS6240373U (US06566495-20030520-M00011.png) | 1987-03-10 |
| JPH059575Y2 true JPH059575Y2 (US06566495-20030520-M00011.png) | 1993-03-09 |
Family
ID=31032829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985132958U Expired - Lifetime JPH059575Y2 (US06566495-20030520-M00011.png) | 1985-08-30 | 1985-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH059575Y2 (US06566495-20030520-M00011.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022509669A (ja) * | 2018-12-18 | 2022-01-21 | インテグリス・インコーポレーテッド | 流体の流れを制御するための弁および弁部材 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59189978U (ja) * | 1983-06-03 | 1984-12-17 | ウツエバルブ株式会社 | メタルダイヤフラムシ−ル弁 |
| JPS60126775U (ja) * | 1984-02-01 | 1985-08-26 | アイダエンジニアリング株式会社 | 密閉構造のバルブ |
-
1985
- 1985-08-30 JP JP1985132958U patent/JPH059575Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022509669A (ja) * | 2018-12-18 | 2022-01-21 | インテグリス・インコーポレーテッド | 流体の流れを制御するための弁および弁部材 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6240373U (US06566495-20030520-M00011.png) | 1987-03-10 |
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