JPH0592807A - Chip bar end surface aligning apparatus - Google Patents

Abstract

PURPOSE:To provide an apparatus for aligning chip bars in a fixed direction without damaging the end surfaces of chip bars in a manufacturing process for a semiconductor element. CONSTITUTION:A pair of adsorption nozzles 2 or 3 are brought into contact with each chip bar 5 transported by a transport plate 4, and the direction of the end surface of the chip bar 5 is recognized from the existence/absence of electric continuity between an electrode on the end surface of each chip bar 5 and the paired adsorption nozzles 2 or 3 to move and align the chip bars 5 to a designated place by a driving unit 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chip bar end face aligning device, and more particularly to a chip bar end face aligning device for aligning end faces of a chip bar in a certain direction in a semiconductor device manufacturing process.

[0002]

2. Description of the Related Art In the process of manufacturing a semiconductor device, it is necessary to align the end faces of chip bars that are irregularly supplied in a certain direction. As a conventional chip bar end face aligning device, a device for applying mechanical vibration is used to align the supplied chip bars on the same flat plate and align the end faces. Also, a method of manually rearranging the chip bars one by one has been taken.

[0003]

Since the conventional tip bar end face aligning device is constructed as described above, the end faces of the tip bar are not perfectly aligned, and can be finally aligned manually. There is a problem that the tip bar is broken or chipped due to the necessity of mechanical vibration.

The present invention has been made in order to solve the above-mentioned problems, and it is possible to prevent mechanical vibration.
An object of the present invention is to obtain a chip bar end face aligning device that can align the end faces of the chip bar in a fixed direction without depending on the cross-sectional shape (square or rectangular) of the chip bar.

[0005]

A chip bar end face aligning device according to the present invention is a carrier plate for carrying a chip bar to be aligned, and an electrode of the chip bar carried by the carrier plate on the carrier plate. On the other hand, when it is in the vertical direction, the electrode surface of the chip bar is contacted from the front side and electrical conduction occurs, so that the chip bar is adsorbed and moved horizontally to another predetermined place. When the suction nozzle pair and the electrode of the chip bar conveyed by the conveying plate are in the horizontal direction with respect to the conveying plate, the electrode surface of the chip bar comes into contact with the electrode surface from above and the chip bar is adsorbed. , The second suction nozzle pair that lifts this 90 ° upward, moves horizontally in that state, and moves it to another predetermined place, and the chip bar that the first and second suction nozzle pairs have suctioned. It is arranged to place, in which a movably provided drive unit vertically.

[0006]

The tip bar end face aligning device according to the present invention comprises:
When the first and second suction nozzle pairs are electrodes and these suction nozzle pairs come into contact with the electrodes on the end surface of the chip bar, electrical continuity is generated, so that the directionality of the end surface of the chip bar can be recognized. The end surface of the chip bar can be reliably aligned in a certain direction without damage.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view of a tip bar end surface aligning device according to an embodiment of the present invention as seen from above, and in FIG.
Is a chip bar to be aligned, 6 is an electrode on the end face of the chip bar 5, 4 is a carrier plate for carrying the chip bar 5 to be aligned, 1 is a holding nozzle pair 2 and 3, and these suction nozzle pairs 2 and 3 are held. When the chip bar 5 is sucked by the chip bar 3, the chip bar 5 is driven to dispose the chip bar 5 at a predetermined position. The vertically movable drive unit 2 is the chip bar 5 carried by the carrier plate 4.
When the surface of the electrode 6 is perpendicular to the transport plate 4, the first contact is provided on the surface of the electrode 6 and sucks by contacting the electrode 6 from the front. When the electrode 6 surface of the chip bar 5 transported by the transport plate 4 is in the horizontal direction with respect to the transport plate 4, the suction nozzle pairs 3 are in contact with the electrode 6 surface from above and suction the drive unit 1. A second suction nozzle 3a, 3b provided on the side of the
The suction nozzle pairs 2 and 3 are used as electrodes.

Next, the operation will be described. FIG. 2 is a side view showing a series of operation steps of the tip bar end face aligning device according to one embodiment of the present invention, and the reference numerals in the drawing are the same as those indicated by the reference numerals in FIG.

The chip bar 5 is placed on the conveyor plate 4 and conveyed toward the suction nozzle. At this time, if the electrode on the end surface of the chip bar 5a that has been conveyed is in the direction perpendicular to the conveying plate, the suction nozzle pair 2 (suction nozzles 2a, 2b) will not move to the tip bar as shown in FIG. Electrode 6 of 5a
Contact the a surface from the front. In this way, the suction nozzle pair 2 and the surface of the electrode 6a of the chip bar 5a come into contact with each other, whereby an electric circuit is formed between the suction nozzle 2a, the electrode 6a of the chip bar 5a, and the suction nozzle 2b, and electrical conduction occurs.

When electrical conduction is confirmed in this way, the suction of the chip bar 5a is started by the suction nozzles 2a and 2b. When the suction is completed, the driving unit 1 moves upward to a height sufficient to prevent the chip bar 5a from coming into contact with other obstacles as shown in FIG.
a is conveyed. The drive unit 1 that has finished carrying the chip bar 5a returns to the initial position and carries the next chip bar 5b.

Next, when the surface of the electrode 6b is horizontal to the carrier plate 4 like the chip bar 5b carried by the carrier plate 4, the suction nozzle pair 2 comes into contact with the chip bar 5b from the front. However, at this time, since the suction nozzle pair 2 is not in contact with the surface of the electrode 6b of the chip bar 5b, electrical conduction does not occur between the suction nozzle pair and the chip bar 5b.
Then, as shown in FIG. 2 (c), the drive unit 1 moves downward to the position where the suction nozzle pair 3 contacts the tip bar electrode 6b of the tip bar 5b. It is confirmed whether or not there is electrical conduction between the suction nozzles 3a and 3b.
When it is confirmed that there is electrical conduction among a, the chip bar electrode 6b, and the suction nozzle 3b, suction by the suction nozzle pair 3 is started.

Thereafter, in order to match the orientation with the other end surface of the tip bar, as shown in FIG. 2 (d), the suction nozzle pair 3 is rotated upward by 90 ° with the tip bar 5b being suctioned,
In that state, the chip bar 5b is conveyed to a predetermined place. When the transportation of the chip bar 5b is completed, the driving unit 1 returns to the original height, and the suction nozzle pair 3 also lowers by 90 °.
Return to the initial position.

As described above, in the above embodiment, the directionality of the end face of the chip bar 5 which is irregularly supplied is recognized by the presence or absence of electrical conduction between the suction nozzle pair 2 or 3 and the chip bar 5. By doing so, the end surface of the chip bar 5 can be automatically aligned without damaging the chip bar 5.

[0014]

As described above, according to the tip bar end face aligning apparatus of the present invention, the directionality of the tip bar end face is recognized by detecting the electrical continuity between the suction nozzle and the electrode on the tip bar end face. Since there is no damage to the tip bar, the tip bar end surface can be automatically aligned regardless of the sectional shape of the tip bar.

[Brief description of drawings]

FIG. 1 is a plan view of a tip bar end face aligning device according to an embodiment of the present invention as viewed from above.

FIG. 2 is a side view showing the operation of the tip bar end face aligning device according to the embodiment of the present invention.

[Explanation of symbols]

 1 Drive Unit 2 Adsorption Nozzle (Lower) 3 Adsorption Nozzle (Upper) 4 Conveyor Plate 5 Chip Bar 6 Chip Bar Electrode

Claims (1)

[Claims] 1. A device for aligning end surfaces of chip bars, wherein a carrier plate for carrying the chip bars to be aligned, and electrodes of the chip bars carried by the carrier plate are perpendicular to the carrier plate. In the case of the first direction, the tip bar comes into contact with the electrode surface of the tip bar from the front to cause electrical conduction, and thereby the tip bar is adsorbed, and the tip bar is horizontally moved to another predetermined place. When the nozzle pair and the electrode of the chip bar carried by the carrier plate are in the horizontal direction with respect to the carrier plate, the electrode surface of the chip bar comes into contact with the electrode surface from above to cause electrical conduction. A second suction nozzle pair for adsorbing, advancing it upward by 90 °, moving horizontally in that state, and moving it to another predetermined location, and the first and second suction nozzle pairs. Hold, after the first pair of suction nozzles has sucked the tip bar, or the second
After the suction nozzle pair sucks the chip bar and lifts it up by 90 °, the chip bar sucked by the first and second suction nozzle pairs is placed in another predetermined place, and can be moved up and down. A chip bar end face aligning device, comprising: a drive unit provided.