JPH059078Y2 - - Google Patents
Info
- Publication number
- JPH059078Y2 JPH059078Y2 JP8490088U JP8490088U JPH059078Y2 JP H059078 Y2 JPH059078 Y2 JP H059078Y2 JP 8490088 U JP8490088 U JP 8490088U JP 8490088 U JP8490088 U JP 8490088U JP H059078 Y2 JPH059078 Y2 JP H059078Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- processing chamber
- chamber
- clean
- workbench
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012545 processing Methods 0.000 claims description 26
- 239000007789 gas Substances 0.000 description 7
- 238000012423 maintenance Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000011045 prefiltration Methods 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000004887 air purification Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8490088U JPH059078Y2 (en, 2012) | 1988-06-27 | 1988-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8490088U JPH059078Y2 (en, 2012) | 1988-06-27 | 1988-06-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH028541U JPH028541U (en, 2012) | 1990-01-19 |
| JPH059078Y2 true JPH059078Y2 (en, 2012) | 1993-03-05 |
Family
ID=31309581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8490088U Expired - Lifetime JPH059078Y2 (en, 2012) | 1988-06-27 | 1988-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH059078Y2 (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5842027B2 (ja) * | 2014-04-07 | 2016-01-13 | 株式会社日立産機システム | 安全キャビネット |
-
1988
- 1988-06-27 JP JP8490088U patent/JPH059078Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH028541U (en, 2012) | 1990-01-19 |
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