JPH059054A - Ferroelectric composite material and its manufacture - Google Patents
Ferroelectric composite material and its manufactureInfo
- Publication number
- JPH059054A JPH059054A JP3252700A JP25270091A JPH059054A JP H059054 A JPH059054 A JP H059054A JP 3252700 A JP3252700 A JP 3252700A JP 25270091 A JP25270091 A JP 25270091A JP H059054 A JPH059054 A JP H059054A
- Authority
- JP
- Japan
- Prior art keywords
- ferroelectric
- composite
- composite material
- ferroelectric material
- dispersed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000463 material Substances 0.000 claims abstract description 61
- 239000006185 dispersion Substances 0.000 claims abstract description 14
- 239000000919 ceramic Substances 0.000 claims abstract description 11
- 238000001354 calcination Methods 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims abstract description 3
- 239000000126 substance Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 4
- 239000011344 liquid material Substances 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 14
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Ceramic Capacitors (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は強誘電性複合材料および
その製造方法に関する。FIELD OF THE INVENTION The present invention relates to a ferroelectric composite material and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】一般に、強誘電性材料はその電気的性質
に着目してコンデンサ等の誘電体として用いられたり、
機械的性質に着目して圧電アクチュエータ等の圧電素子
として用いられている。2. Description of the Related Art Generally, a ferroelectric material is used as a dielectric for a capacitor or the like, paying attention to its electrical properties.
It is used as a piezoelectric element such as a piezoelectric actuator, paying attention to its mechanical properties.
【０００３】このような強誘電性材料をセラミックスに
よって製することが提案されている。この場合、今日に
おいては、強誘電性材料の電気的性質とともに機械的性
質も、更に一層向上することが要望されている。It has been proposed to manufacture such a ferroelectric material from ceramics. In this case, today, it is desired to further improve the electrical properties and mechanical properties of the ferroelectric material.
【０００４】そのため、従来においては、セラミックス
製の強誘電性材料の機械的性質の向上を図るため、セラ
ミックスの微粒子化を行なう等の種々の工夫が為されて
いる。Therefore, in the past, in order to improve the mechanical properties of the ferroelectric material made of ceramics, various measures such as making the ceramics fine particles have been made.
【０００５】例えば、強誘電性材料の１種であるジルコ
ン酸チタン酸鉛（以下、ＰＺＴと称する）にアルミナ繊
維等のセラミックスの繊維を添加することによって、機
械的性質の向上を図っている。For example, mechanical properties are improved by adding ceramic fibers such as alumina fibers to lead zirconate titanate (hereinafter referred to as PZT), which is one type of ferroelectric material.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、前記従
来手段によっては、強誘電性材料の機械的性質は多少の
向上は確認されているけれども、絶縁物の１種であるセ
ラミックスの繊維を添加しているため、電気的性質を示
す誘電率（ε３３／ε０）および誘電損失（ｔａｎδ）
は、図４および図５に示すように、アルミナの添加量の
増加に応じて減少している。However, although it has been confirmed that the mechanical properties of the ferroelectric material are improved to some extent by the above-mentioned conventional means, the addition of ceramic fiber, which is one kind of insulator, Therefore, the dielectric constant (ε 33 / ε 0 ) and the dielectric loss (tan δ) that show the electrical properties
As shown in FIG. 4 and FIG. 5, it decreases as the amount of alumina added increases.
【０００７】このように従来の強誘電性材料には、その
機械的性質が大きく向上しないばかりでなく、その上更
に電気的性質まで低下してしまうという問題点があっ
た。As described above, the conventional ferroelectric material has a problem that not only the mechanical properties thereof are not greatly improved but also the electrical properties thereof are further deteriorated.
【０００８】本発明はこれらの点に鑑みてなされたもの
であり、セラミックスを強誘電体材料の表面より混入さ
せて、強誘電体材料本来の電気的性質を向上させること
ができ、しかも、機械的性質を大きく向上させることの
できる強誘電性複合材料と、これを確実に製造すること
のできる製造方法とを提供することを目的とする。The present invention has been made in view of these points, and ceramics can be mixed from the surface of the ferroelectric material to improve the original electrical properties of the ferroelectric material, and the mechanical properties of the material can be improved. It is an object of the present invention to provide a ferroelectric composite material capable of greatly improving the physical properties and a manufacturing method capable of reliably manufacturing the same.
【０００９】[0009]
【課題を解決するための手段】前記目的を達成するため
に、本発明の強誘電性複合材料は、強誘電体材料の少な
くとも表面部分に、分散材料が分散相として分散させら
れてコンポジット状に形成されていることを特徴とす
る。In order to achieve the above object, the ferroelectric composite material of the present invention has a composite material in which a dispersive material is dispersed as a disperse phase on at least a surface portion of a ferroelectric material. It is characterized by being formed.
【００１０】また、本発明の強誘電性複合材料の製造方
法は、仮焼後粉砕された強誘電体材料を所定の形状に成
形し、その強誘電体材料を熱処理によりセラミックスと
なる液状の物質中に浸漬して、液状の物質を強誘電体材
料中に表面より浸透させ、その後乾燥された強誘電体材
料を焼結して、少なくとも表面部分に前記物質を分散材
料としてコンポジット状に分散させた強誘電性複合材料
を製することを特徴とする。Further, in the method for producing a ferroelectric composite material of the present invention, a liquid substance which becomes a ceramic by heat-treating the ferroelectric material which is calcinated and ground into a predetermined shape, and which is heat-treated. Immersion in the liquid to permeate the liquid substance into the ferroelectric material from the surface, and then sinter the dried ferroelectric material to disperse the substance as a dispersion material in a composite form on at least the surface portion. It is characterized by producing a ferroelectric composite material.
【００１１】[0011]
【作用】本発明の強誘電性複合材料は、所定の形状に成
形された強誘電体材料中に、分散材料が表面側より所定
深さまで分散されたコンポジットであるため、強誘電体
材料の本来の電気的性質を大きく向上させ、更に機械的
性質も大きく向上させたものとなる。The ferroelectric composite material of the present invention is a composite material in which the dispersion material is dispersed to a predetermined depth from the surface side in the ferroelectric material molded into a predetermined shape, and therefore, it is essentially a ferroelectric material. The electrical properties of the are greatly improved, and the mechanical properties are also greatly improved.
【００１２】また、本発明の強誘電性複合材料の製造方
法によれば、分散材料となる液状の物質を強誘電体材料
中にその表面側より浸透させ、これを乾燥後に焼結させ
るようにしているために、前記したような優れた電気的
性質および機械的性質を備えている強誘電性複合材料を
確実に製することができる。Further, according to the method for producing a ferroelectric composite material of the present invention, a liquid substance serving as a dispersion material is permeated into the ferroelectric material from its surface side, and this is dried and then sintered. Therefore, the ferroelectric composite material having the excellent electrical and mechanical properties described above can be reliably manufactured.
【００１３】[0013]
【実施例】以下、本発明の実施例を図１から図３につい
て説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to FIGS.
【００１４】本発明の強誘電性複合材料は、仮焼後粉砕
された強誘電体材料を所定の形状に成形し、その強誘電
体材料を熱処理によりセラミックスとなる液状の物質中
に浸漬して、液状の物質を強誘電体材料中に表面より浸
透させ、その後乾燥された強誘電体材料を焼結して、少
なくとも表面部分に前記物質を分散材料としてコンポジ
ット状に分散させて形成される。The ferroelectric composite material of the present invention is formed by molding a ferroelectric material pulverized after calcination into a predetermined shape, and immersing the ferroelectric material in a liquid substance which becomes a ceramic by heat treatment. It is formed by infiltrating a liquid substance into the ferroelectric material from the surface and then sintering the dried ferroelectric material to disperse the substance in a composite form as a dispersion material on at least the surface portion.
【００１５】更に具体的な実施例を説明する。A more specific embodiment will be described.
【００１６】実施例
本実施例は、母相となる強誘電体材料としてＰＺＴを用
い、分散相となる液状の物質としてアルミナゾルを用い
ている。Example In this example, PZT was used as the ferroelectric material which became the matrix phase, and alumina sol was used as the liquid substance which became the dispersed phase.
【００１７】１） 製造方法
製造工程に従って説明すると、先ず、ＰＺＴ粉末を製す
る。即ち、ＰｂＯ、ＴｉＯ２、ＺｒＯ２、Ｎｂ２Ｏ５、
ＭｇＯ、ＮｉＯ２およびＭｎＯ２の各素材を、組成式
０．４３５ＰｂＴｉＯ３＋０．４４ＰｂＺｒＯ３＋０．
１２５（Ｍｇ１／３Ｎｂ２／３）Ｏ３＋０．５（ｗｔ
％）ＮｉＯ＋０．５（ｗｔ％）ＭｎＯ２に合わせて秤量
し、ポリエチレン製ボールミル内で純水を用いて所定時
間湿式混合を行なう。次にこの混合物を乾燥し、その後
に造粒させてＰＺＴの粉末を製する。1) Manufacturing Method Explaining according to manufacturing steps, first, PZT powder is manufactured. That is, PbO, TiO 2 , ZrO 2 , Nb 2 O 5 ,
Each material of MgO, NiO 2 and MnO 2 has a composition formula of 0.435PbTiO 3 + 0.44PbZrO 3 +0.
125 (Mg 1/3 Nb 2/3 ) O 3 +0.5 (wt
%) NiO + 0.5 (wt%) MnO 2 and weighed, and wet mixing is performed for a predetermined time using pure water in a polyethylene ball mill. The mixture is then dried and then granulated to produce PZT powder.
【００１８】次に、このＰＺＴを仮焼した後に、ウレタ
ンボールミルにより純水を加入して粉砕する。その後に
粉砕したＰＺＴを乾燥させ、ついで再び造粒させる。Next, after calcination of this PZT, pure water is added by an urethane ball mill and crushed. The crushed PZT is then dried and then granulated again.
【００１９】次に、ＰＺＴを冷間等方加工プレス（ＣＩ
Ｐ）によって２５００ｋｇｆ／ｃｍ２の圧力で所定形状
のペレットに成形し、このペレットをアルミナゾル内に
所定時間浸漬する。これにより、成形されたＰＺＴから
なれペレット内に表面側からアルミナゾルを浸透させ
る。Next, the PZT was cold-isotropically pressed (CI).
P) is molded into a pellet having a predetermined shape under a pressure of 2500 kgf / cm 2 , and the pellet is immersed in an alumina sol for a predetermined time. As a result, the alumina sol is permeated into the pellet from the molded PZT from the surface side.
【００２０】その後、アルミナゾルが浸透されたＰＺＴ
を１２０℃で１２時間乾燥させてかた焼結させて、強誘
電体材料であるＰＺＴの少なくとも表面部分に、分散材
料であるアルミナが分散相として分散させられてコンポ
ジット状に形成されている強誘電性複合材料が製造され
る。Thereafter, PZT infiltrated with alumina sol
Is dried at 120 ° C. for 12 hours and sintered, and alumina, which is a dispersion material, is dispersed as a dispersed phase in at least the surface portion of PZT, which is a ferroelectric material, to form a composite. A dielectric composite material is manufactured.
【００２１】次に、このようにして製せられた本実施例
の強誘電性複合材料について説明する。Next, the ferroelectric composite material of this embodiment manufactured as described above will be described.
【００２２】１） 組織
このようにして製造された強誘電性複合材料の試料を鏡
面研磨した後に、その表面に金をスパッタして、走査型
電子顕微鏡（ＳＥＭ）により撮影した組織は、図１から
図３に示すように、ＰＺＴ（写真において白色部分）内
にその表面より約１００μｍの深さまでアルミナ（写真
において黒色部分）が浸透されて、ほぼ均一に分散した
コンポジット状であることが判る。1) Texture The sample of the ferroelectric composite material thus manufactured is mirror-polished, gold is sputtered on the surface, and the texture photographed by a scanning electron microscope (SEM) is shown in FIG. From FIG. 3, it can be seen that alumina (black portion in the photograph) is penetrated into the PZT (white portion in the photograph) to a depth of about 100 μm from the surface of the PZT, and it is found that the PZT is in a substantially uniform composite state.
【００２３】２） 電気的性質と機械的性質
本実施例の強誘電性複合材料とＰＺＴとについて、電気
的性質として誘電率（ε３３／ε０）と誘電損失（ｔａ
ｎδ）を測定し、機械的性質として広がり振動の電気機
械結合係数（Ｋｒ）と機械的品質係数（広がり振動）
（Ｑｍ）を測定した。これらの測定項目は、それぞれ電
子材料工学会標準規格ＥＭＡＳ−６００１に基づいて測
定し、誘電特性および圧電特性は、ベクトルインピーダ
ンスメータを用いて室温で測定した。2) Electrical Properties and Mechanical Properties With respect to the ferroelectric composite material and PZT of this example, as the electrical properties, the dielectric constant (ε 33 / ε 0 ) and the dielectric loss (ta).
nδ) was measured, and as mechanical properties, electromechanical coupling coefficient (Kr) of spreading vibration and mechanical quality coefficient (spreading vibration)
(Qm) was measured. These measurement items were measured based on the Electronic Material Engineering Society standard EMAS-6001, and the dielectric characteristics and piezoelectric characteristics were measured at room temperature using a vector impedance meter.
【００２４】その結果は、表１の通りであった。The results are shown in Table 1.
【００２５】 [0025]
【００２６】電気的性質が重要とされる誘電材料につい
て、前記測定結果に基づいて本実施例を評価すると、誘
電率がＰＺＴ自身の誘電率より増大しており、計算値よ
りはるかに大きいものであり、強誘電性複合材料として
極めて優れたものである。When a dielectric material whose electrical properties are important is evaluated based on the above measurement results, the dielectric constant is higher than that of PZT itself and is much larger than the calculated value. Therefore, it is an extremely excellent ferroelectric composite material.
【００２７】このように誘電率が上昇するのは、ＰＺＴ
の粒子内にアルミナが微小粒子として分散することによ
り、内部応力が変化するためであると考えられる。すな
わち、誘導体には内部応力として圧縮力が作用している
とされている。一方、ＰＺＴの結晶粒子内にＰＺＴより
熱膨張係数の大きいアルミナを分散させてコンポジット
とすることにより、前記圧縮力を相殺する引張力が働く
ためであると考えられる。The rise in the dielectric constant is due to the fact that PZT
It is considered that this is because the internal stress changes due to the dispersion of alumina as fine particles in the particles. That is, it is said that a compressive force acts as an internal stress on the derivative. On the other hand, it is considered that a tensile force that cancels the compression force acts by dispersing alumina having a larger thermal expansion coefficient than PZT in the PZT crystal particles to form a composite.
【００２８】機械的性質が重要とされる圧電材料につい
て、前記測定結果に基づいて本実施例を評価すると、広
がり振動の電気機械結合係数ＫｒがＰＺＴ自身の値より
も増大しており、また、機械的品質係数（広がり振動）
Ｑｍも、ＰＺＴ自身の値よりも増大しているので、強誘
電性複合材料として極めて優れたものである。When a piezoelectric material of which mechanical properties are important is evaluated on the basis of the above measurement results, the electromechanical coupling coefficient Kr of spreading vibration is larger than the value of PZT itself, and Mechanical quality factor (spreading vibration)
Since Qm is also higher than the value of PZT itself, it is an extremely excellent ferroelectric composite material.
【００２９】３） 杭折強度
本実施例の強誘電性複合材料に対して、ＪＩＳ−Ｒ１６
０１に基づいて、島津製作所製ＤＣＳ−５０Ｍを用い
て、スパンを３０ｍｍクロスヘッドスピードを０．５ｍ
ｍ／ｍｉｎの測定条件で、３点曲げ法で行なった結果を
前記表１に示す。3) Pile Folding Strength JIS-R16 was applied to the ferroelectric composite material of this example.
No. 01, Shimadzu DCS-50M is used, the span is 30 mm, the crosshead speed is 0.5 m.
Table 1 shows the results obtained by the three-point bending method under the measurement condition of m / min.
【００３０】表１から明らかなように、本実施例の強誘
電性複合材料は、抗折強度がＰＺＴ自身の値より大きい
ものであり、極めて優れたものである。As is clear from Table 1, the ferroelectric composite material of this example has a flexural strength higher than that of PZT itself, and is extremely excellent.
【００３１】以上説明したように、本発明方法によって
製せられた本発明の強誘電性複合材料は、ＰＺＴの少な
くとも表面部分がアルミナとのコンポジット状に形成さ
れており、そのために電気的性質が大きく向上させられ
たものとなるとともに、機械的性質も大きく向上させら
れたものとなる。As explained above, in the ferroelectric composite material of the present invention produced by the method of the present invention, at least the surface portion of PZT is formed into a composite shape with alumina, and therefore, the electrical property is improved. In addition to being greatly improved, the mechanical properties are also greatly improved.
【００３２】従って、本発明の強誘電性複合材料は、そ
れぞれの優れた性質を利用することにより、各種の用途
に用いられる。Therefore, the ferroelectric composite material of the present invention can be used in various applications by utilizing its excellent properties.
【００３３】例えば、従来の誘電体および圧電素子の用
途に同様にして用いられることは勿論であり、しかも従
来のもの以上の効果を奏するものとなる。For example, it can be used in the same manner as in the conventional uses of dielectrics and piezoelectric elements, and moreover, the effects more than those of the conventional one can be obtained.
【００３４】すなわち、高い誘電率を利用してコンデン
サの誘電体として用いることができ、しかも高い抗折強
度を有することにより、強度も大きいものを得ることが
できる。That is, it can be used as a dielectric of a capacitor by utilizing a high dielectric constant, and also has a high bending strength, so that a high strength can be obtained.
【００３５】また、圧電素子としての優れた特性を利用
して、圧電アクチュエータ、超音波モータの駆動源、圧
電ブザー、圧電フィルタ、加速度センサ、圧電スピー
カ、発振子等に適用して、従来以上の効率等の向上を図
るとよい。前記圧電アクチュエータにおいては、広がり
振動の電気機械結合係数（Ｋｒ）、機械的品質係数（広
がり振動）（Ｑｍ）および杭折強度が上昇している点を
利用して高効率化を図るとよい。超音波モータにおいて
は、クラックの発生防止に効果的な広がり振動の電気機
械結合係数（Ｋｒ）の大きい範囲を利用するとよい。Further, by utilizing the excellent characteristics as a piezoelectric element, it is applied to a piezoelectric actuator, an ultrasonic motor drive source, a piezoelectric buzzer, a piezoelectric filter, an acceleration sensor, a piezoelectric speaker, an oscillator, etc. It is advisable to improve efficiency. In the piezoelectric actuator, it is preferable to improve efficiency by utilizing the fact that the electromechanical coupling coefficient (Kr) of spreading vibration, the mechanical quality factor (spreading vibration) (Qm), and the pile fold strength are increased. In the ultrasonic motor, it is preferable to use a large range of the electromechanical coupling coefficient (Kr) of the spreading vibration that is effective in preventing the occurrence of cracks.
【００３６】また、本発明においては、強誘電体材料中
への分散材料の分散深さや分散濃度を、浸漬時間を変化
させたり、加圧状態で浸漬する場合の加圧力を変化させ
ること等により調整して、設計条件等に応じた特性を得
るようにしてもよい。Further, in the present invention, the dispersion depth and dispersion concentration of the dispersion material in the ferroelectric material are changed by changing the immersion time or the pressure applied when the dispersion material is immersed in a pressurized state. The characteristics may be adjusted to obtain characteristics according to design conditions and the like.
【００３７】なお、母相となる強誘電体材料には、ＰＺ
Ｔ以外の他の素材を用いることができ、分散相となる分
散材料には、アルミナ以外のものを液状化させたシリカ
ゾル、ジルコニアゾル、スピネル等の他の素材を用いる
ことができる。It should be noted that the ferroelectric material forming the matrix phase is PZ.
Other materials other than T can be used, and other materials such as silica sol, zirconia sol, and spinel obtained by liquefying materials other than alumina can be used as the dispersion material serving as the dispersed phase.
【００３８】また、本発明は前記実施例に限定されるも
のでは無く、必要に応じて変更することができる。Further, the present invention is not limited to the above-mentioned embodiment, but can be modified as necessary.
【００３９】[0039]
【発明の効果】このように本発明の強誘電性複合材料お
よびその製造方法は構成され作用するものであるから、
強誘電体材料本来の電気的性質を大きく向上させること
ができ、しかも、機械的性質をも大きく向上させること
ができ、優れた用途を有するものとなり、その製造も簡
単であり、かつ、確実に製造することができ、コストも
低廉となる等の効果を奏する。As described above, since the ferroelectric composite material and the method for producing the same according to the present invention are constituted and operate,
The original electrical properties of the ferroelectric material can be greatly improved, and the mechanical properties can also be greatly improved, and it has excellent applications, and its manufacture is simple and reliable. It can be manufactured, and the cost can be reduced.
【図１】本発明の強誘電性複合材料の表面の金属組織を
示す２００倍の走査型電子顕微鏡写真FIG. 1 is a 200 × scanning electron micrograph showing the metallographic structure of the surface of a ferroelectric composite material of the present invention.
【図２】本発明の強誘電性複合材料の表面の金属組織を
示す４００倍の走査型電子顕微鏡写真FIG. 2 is a 400 × scanning electron micrograph showing the metal structure of the surface of the ferroelectric composite material of the present invention.
【図３】本発明の強誘電性複合材料の表面の金属組織を
示す１０００倍の走査型電子顕微鏡写真FIG. 3 is a scanning electron microscope photograph of 1000 times showing the metal structure of the surface of the ferroelectric composite material of the present invention.
【図４】従来の強誘電性材料のアルミナの混合量と比誘
電率との関係を示す線図FIG. 4 is a graph showing the relationship between the mixing amount of alumina of a conventional ferroelectric material and the relative dielectric constant.
【図５】従来の強誘電性材料のアルミナの混合量と誘電
損失との関係を示す線図FIG. 5 is a graph showing the relationship between the amount of alumina mixed with a conventional ferroelectric material and the dielectric loss.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｌ 41/24 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Internal reference number FI technical display area H01L 41/24
Claims (2)
分散材料が分散相として分散させられてコンポジット状
に形成されていることを特徴とする強誘電性複合材料。1. At least a surface portion of the ferroelectric material,
A ferroelectric composite material in which a dispersed material is dispersed as a dispersed phase to form a composite.
形状に成形し、その強誘電体材料を熱処理によりセラミ
ックスとなる液状の物質中に浸漬して、液状の物質を強
誘電体材料中に表面より浸透させ、その後乾燥された強
誘電体材料を焼結して、少なくとも表面部分に前記物質
を分散材料としてコンポジット状に分散させた強誘電性
複合材料を製することを特徴とする強誘電性複合材料の
製造方法。2. A ferroelectric material crushed after calcination is molded into a predetermined shape, and the ferroelectric material is immersed in a liquid substance that becomes ceramics by heat treatment to change the liquid substance into a ferroelectric substance. A ferroelectric composite material in which the material is made to penetrate into the material from the surface and then the dried ferroelectric material is sintered to disperse the substance in a composite form as a dispersion material on at least the surface portion. Method for manufacturing a ferroelectric composite material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25270091A JP3058490B2 (en) | 1991-06-27 | 1991-06-27 | Ferroelectric composite material and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25270091A JP3058490B2 (en) | 1991-06-27 | 1991-06-27 | Ferroelectric composite material and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH059054A true JPH059054A (en) | 1993-01-19 |
| JP3058490B2 JP3058490B2 (en) | 2000-07-04 |
Family
ID=17241038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25270091A Expired - Fee Related JP3058490B2 (en) | 1991-06-27 | 1991-06-27 | Ferroelectric composite material and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3058490B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012046554A1 (en) * | 2010-10-04 | 2012-04-12 | 株式会社村田製作所 | Laminated ceramic capacitor and method for manufacturing same |
-
1991
- 1991-06-27 JP JP25270091A patent/JP3058490B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012046554A1 (en) * | 2010-10-04 | 2012-04-12 | 株式会社村田製作所 | Laminated ceramic capacitor and method for manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3058490B2 (en) | 2000-07-04 |
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