JPH0588500B2 - - Google Patents

Info

Publication number
JPH0588500B2
JPH0588500B2 JP60260309A JP26030985A JPH0588500B2 JP H0588500 B2 JPH0588500 B2 JP H0588500B2 JP 60260309 A JP60260309 A JP 60260309A JP 26030985 A JP26030985 A JP 26030985A JP H0588500 B2 JPH0588500 B2 JP H0588500B2
Authority
JP
Japan
Prior art keywords
electrostatic deflector
electrodes
deflector
flat
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60260309A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62119845A (ja
Inventor
Akio Ito
Yoshiaki Goto
Kazuyuki Ozaki
Kazuo Ookubo
Toshihiro Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60260309A priority Critical patent/JPS62119845A/ja
Publication of JPS62119845A publication Critical patent/JPS62119845A/ja
Publication of JPH0588500B2 publication Critical patent/JPH0588500B2/ja
Granted legal-status Critical Current

Links

JP60260309A 1985-11-20 1985-11-20 静電偏向器 Granted JPS62119845A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60260309A JPS62119845A (ja) 1985-11-20 1985-11-20 静電偏向器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60260309A JPS62119845A (ja) 1985-11-20 1985-11-20 静電偏向器

Publications (2)

Publication Number Publication Date
JPS62119845A JPS62119845A (ja) 1987-06-01
JPH0588500B2 true JPH0588500B2 (enExample) 1993-12-22

Family

ID=17346236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60260309A Granted JPS62119845A (ja) 1985-11-20 1985-11-20 静電偏向器

Country Status (1)

Country Link
JP (1) JPS62119845A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5152339A (en) * 1990-04-03 1992-10-06 Thermal Components, Inc. Manifold assembly for a parallel flow heat exchanger
JP4908800B2 (ja) * 2005-08-08 2012-04-04 株式会社ニューフレアテクノロジー 電子ビーム装置
JP4908799B2 (ja) * 2005-08-08 2012-04-04 株式会社ニューフレアテクノロジー 電子ビーム装置
JP4621621B2 (ja) 2006-03-31 2011-01-26 株式会社東芝 荷電ビーム描画装置
JP2009238780A (ja) * 2008-03-25 2009-10-15 Toshiba Corp 荷電ビーム描画装置

Also Published As

Publication number Publication date
JPS62119845A (ja) 1987-06-01

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