JPH0588392B2 - - Google Patents
Info
- Publication number
- JPH0588392B2 JPH0588392B2 JP60060585A JP6058585A JPH0588392B2 JP H0588392 B2 JPH0588392 B2 JP H0588392B2 JP 60060585 A JP60060585 A JP 60060585A JP 6058585 A JP6058585 A JP 6058585A JP H0588392 B2 JPH0588392 B2 JP H0588392B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- rotors
- casing
- working chamber
- male
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 13
- 239000003921 oil Substances 0.000 description 11
- 239000010687 lubricating oil Substances 0.000 description 10
- 238000007789 sealing Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6058585A JPS61223295A (ja) | 1985-03-27 | 1985-03-27 | オイルフリ−スクリユ−真空ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6058585A JPS61223295A (ja) | 1985-03-27 | 1985-03-27 | オイルフリ−スクリユ−真空ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61223295A JPS61223295A (ja) | 1986-10-03 |
| JPH0588392B2 true JPH0588392B2 (US06826419-20041130-M00005.png) | 1993-12-22 |
Family
ID=13146463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6058585A Granted JPS61223295A (ja) | 1985-03-27 | 1985-03-27 | オイルフリ−スクリユ−真空ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61223295A (US06826419-20041130-M00005.png) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2537712B2 (ja) * | 1991-07-10 | 1996-09-25 | 株式会社荏原製作所 | スクリュ―形真空ポンプ |
| JPH0518382A (ja) * | 1991-07-10 | 1993-01-26 | Ebara Corp | スクリユー形真空ポンプ |
| JP2006342754A (ja) * | 2005-06-10 | 2006-12-21 | Hitachi Industrial Equipment Systems Co Ltd | オイルフリースクリュー圧縮機 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5320109A (en) * | 1976-08-07 | 1978-02-24 | Ebara Corp | Rotor and fluid machine utilizing the same |
| JPS55153881A (en) * | 1979-04-24 | 1980-12-01 | Anretsuto:Kk | Helical type double-axle rotary fluid pump |
| JPS5929794A (ja) * | 1982-08-13 | 1984-02-17 | Hitachi Ltd | スクリュー機械のロータ |
| JPS59176489A (ja) * | 1983-03-25 | 1984-10-05 | Hitachi Ltd | スクリユ流体機械 |
-
1985
- 1985-03-27 JP JP6058585A patent/JPS61223295A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5320109A (en) * | 1976-08-07 | 1978-02-24 | Ebara Corp | Rotor and fluid machine utilizing the same |
| JPS55153881A (en) * | 1979-04-24 | 1980-12-01 | Anretsuto:Kk | Helical type double-axle rotary fluid pump |
| JPS5929794A (ja) * | 1982-08-13 | 1984-02-17 | Hitachi Ltd | スクリュー機械のロータ |
| JPS59176489A (ja) * | 1983-03-25 | 1984-10-05 | Hitachi Ltd | スクリユ流体機械 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61223295A (ja) | 1986-10-03 |
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