JPH0587975B2 - - Google Patents

Info

Publication number
JPH0587975B2
JPH0587975B2 JP59033485A JP3348584A JPH0587975B2 JP H0587975 B2 JPH0587975 B2 JP H0587975B2 JP 59033485 A JP59033485 A JP 59033485A JP 3348584 A JP3348584 A JP 3348584A JP H0587975 B2 JPH0587975 B2 JP H0587975B2
Authority
JP
Japan
Prior art keywords
insulating film
substrate
wiring
forming
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP59033485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60178661A (ja
Inventor
Nobuhiro Endo
Tsuneo Hamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP59033485A priority Critical patent/JPS60178661A/ja
Publication of JPS60178661A publication Critical patent/JPS60178661A/ja
Publication of JPH0587975B2 publication Critical patent/JPH0587975B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Thin Film Transistor (AREA)
JP59033485A 1984-02-24 1984-02-24 半導体装置の製造方法 Granted JPS60178661A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59033485A JPS60178661A (ja) 1984-02-24 1984-02-24 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59033485A JPS60178661A (ja) 1984-02-24 1984-02-24 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60178661A JPS60178661A (ja) 1985-09-12
JPH0587975B2 true JPH0587975B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-12-20

Family

ID=12387852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59033485A Granted JPS60178661A (ja) 1984-02-24 1984-02-24 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60178661A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63308386A (ja) * 1987-01-30 1988-12-15 Sony Corp 半導体装置とその製造方法
JP4606545B2 (ja) 2000-05-02 2011-01-05 イーグル工業株式会社 メカニカルシールによる圧縮機の軸封機構

Also Published As

Publication number Publication date
JPS60178661A (ja) 1985-09-12

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Legal Events

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