JPH058516Y2 - - Google Patents
Info
- Publication number
- JPH058516Y2 JPH058516Y2 JP14397187U JP14397187U JPH058516Y2 JP H058516 Y2 JPH058516 Y2 JP H058516Y2 JP 14397187 U JP14397187 U JP 14397187U JP 14397187 U JP14397187 U JP 14397187U JP H058516 Y2 JPH058516 Y2 JP H058516Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- light
- spectrophotometer
- light source
- marker
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003550 marker Substances 0.000 claims description 31
- 238000003384 imaging method Methods 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 3
- 238000005375 photometry Methods 0.000 description 23
- 230000003287 optical effect Effects 0.000 description 12
- 238000005286 illumination Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14397187U JPH058516Y2 (enrdf_load_stackoverflow) | 1987-09-21 | 1987-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14397187U JPH058516Y2 (enrdf_load_stackoverflow) | 1987-09-21 | 1987-09-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6448659U JPS6448659U (enrdf_load_stackoverflow) | 1989-03-27 |
| JPH058516Y2 true JPH058516Y2 (enrdf_load_stackoverflow) | 1993-03-03 |
Family
ID=31411270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14397187U Expired - Lifetime JPH058516Y2 (enrdf_load_stackoverflow) | 1987-09-21 | 1987-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058516Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-09-21 JP JP14397187U patent/JPH058516Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6448659U (enrdf_load_stackoverflow) | 1989-03-27 |
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