JPH0584896B2 - - Google Patents

Info

Publication number
JPH0584896B2
JPH0584896B2 JP60502023A JP50202385A JPH0584896B2 JP H0584896 B2 JPH0584896 B2 JP H0584896B2 JP 60502023 A JP60502023 A JP 60502023A JP 50202385 A JP50202385 A JP 50202385A JP H0584896 B2 JPH0584896 B2 JP H0584896B2
Authority
JP
Japan
Prior art keywords
formula
substrate
film
region
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60502023A
Other languages
English (en)
Other versions
JPS61502219A (ja
Inventor
Erusa Reichimanisu
Kuretasu Uorutaa Jun Uirukinzu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
American Telephone and Telegraph Co Inc
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Telephone and Telegraph Co Inc, AT&T Corp filed Critical American Telephone and Telegraph Co Inc
Publication of JPS61502219A publication Critical patent/JPS61502219A/ja
Publication of JPH0584896B2 publication Critical patent/JPH0584896B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/094—Multilayer resist systems, e.g. planarising layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/948—Radiation resist
    • Y10S438/95—Multilayer mask including nonradiation sensitive layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Silicon Polymers (AREA)

Description

請求の範囲 １ 基体上に、放射線感受性組成物のフイルムを
含むパターン形成可能な少なくとも１つの領域を
形成する工程、該領域の少なくとも一部にパター
ンを形成する工程、更に該基体を加工する工程か
らなる電子デバイスを作成する方法において、該
フイルムが式
【化】 又は
【化】 又は
【化】 又は
【化】 （式中、ＺはCH2又は
【式】であり、Ｒは 水素又はメチルであり、Ｘは（CyH2ｙ）
SiR′R″R
JP60502023A 1984-05-24 1985-04-29 二層レジスト Granted JPS61502219A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/613,884 US4521274A (en) 1984-05-24 1984-05-24 Bilevel resist
US613884 1984-05-24

Publications (2)

Publication Number Publication Date
JPS61502219A JPS61502219A (ja) 1986-10-02
JPH0584896B2 true JPH0584896B2 (ja) 1993-12-03

Family

ID=24459054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60502023A Granted JPS61502219A (ja) 1984-05-24 1985-04-29 二層レジスト

Country Status (6)

Country Link
US (1) US4521274A (ja)
EP (1) EP0185030B1 (ja)
JP (1) JPS61502219A (ja)
CA (1) CA1248403A (ja)
DE (1) DE3566051D1 (ja)
WO (1) WO1985005470A1 (ja)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4791046A (en) * 1984-04-26 1988-12-13 Oki Electric Industry Co., Ltd. Process for forming mask patterns of positive type resist material with trimethylsilynitrile
US4892617A (en) * 1984-08-22 1990-01-09 American Telephone & Telegraph Company, At&T Bell Laboratories Processes involving lithographic materials
US4981909A (en) * 1985-03-19 1991-01-01 International Business Machines Corporation Plasma-resistant polymeric material, preparation thereof, and use thereof
US4782008A (en) * 1985-03-19 1988-11-01 International Business Machines Corporation Plasma-resistant polymeric material, preparation thereof, and use thereof
US4690833A (en) * 1986-03-28 1987-09-01 International Business Machines Corporation Providing circuit lines on a substrate
US4737425A (en) * 1986-06-10 1988-04-12 International Business Machines Corporation Patterned resist and process
DE3760773D1 (en) * 1986-07-25 1989-11-16 Oki Electric Ind Co Ltd Negative resist material, method for its manufacture and method for using it
JPH0772799B2 (ja) * 1986-08-13 1995-08-02 ソニー株式会社 レジスト材料
US4788127A (en) * 1986-11-17 1988-11-29 Eastman Kodak Company Photoresist composition comprising an interpolymer of a silicon-containing monomer and an hydroxystyrene
US4931351A (en) * 1987-01-12 1990-06-05 Eastman Kodak Company Bilayer lithographic process
DE3702035A1 (de) * 1987-01-24 1988-08-04 Basf Ag Copolymerisate mit o-nitrocarbinolestergruppierungen und verfahren zur herstellung von zweilagenresisten sowie von halbleiterbauelementen
EP0285797A3 (de) * 1987-03-11 1989-01-04 Siemens Aktiengesellschaft Verfahren zur Erzeugung von Resiststrukturen
DE3810247A1 (de) * 1987-03-26 1988-10-06 Toshiba Kawasaki Kk Lichtempfindliche beschichtungsmasse
KR930000293B1 (ko) * 1987-10-26 1993-01-15 마쯔시다덴기산교 가부시기가이샤 미세패턴형성방법
DE3841571A1 (de) * 1987-12-10 1989-06-29 Toshiba Kawasaki Kk Lichtempfindliche masse
US4935094A (en) * 1989-05-26 1990-06-19 At&T Bell Laboratories Negative resist with oxygen plasma resistance
US5166038A (en) * 1989-07-27 1992-11-24 International Business Machines Corporation Etch resistant pattern formation via interfacial silylation process
EP0463870B1 (en) * 1990-06-26 1999-02-24 Fujitsu Limited Method of plasma treating a resist using hydrogen gas
US5264076A (en) * 1992-12-17 1993-11-23 At&T Bell Laboratories Integrated circuit process using a "hard mask"
US5326727A (en) * 1992-12-30 1994-07-05 At&T Bell Laboratories Method for integrated circuit fabrication including linewidth control during etching
KR100447950B1 (ko) * 2001-11-22 2004-09-08 한솔제지주식회사 포지티브형 포토레지스트 조성물
US6844131B2 (en) 2002-01-09 2005-01-18 Clariant Finance (Bvi) Limited Positive-working photoimageable bottom antireflective coating
US7070914B2 (en) * 2002-01-09 2006-07-04 Az Electronic Materials Usa Corp. Process for producing an image using a first minimum bottom antireflective coating composition

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3377597D1 (en) * 1982-04-12 1988-09-08 Nippon Telegraph & Telephone Method for forming micropattern
US4481049A (en) * 1984-03-02 1984-11-06 At&T Bell Laboratories Bilevel resist

Also Published As

Publication number Publication date
JPS61502219A (ja) 1986-10-02
US4521274A (en) 1985-06-04
DE3566051D1 (en) 1988-12-08
EP0185030A1 (ja) 1986-06-25
EP0185030B1 (en) 1988-11-02
CA1248403A (en) 1989-01-10
WO1985005470A1 (en) 1985-12-05

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EXPY Cancellation because of completion of term