JPH0584676B2 - - Google Patents
Info
- Publication number
- JPH0584676B2 JPH0584676B2 JP15674085A JP15674085A JPH0584676B2 JP H0584676 B2 JPH0584676 B2 JP H0584676B2 JP 15674085 A JP15674085 A JP 15674085A JP 15674085 A JP15674085 A JP 15674085A JP H0584676 B2 JPH0584676 B2 JP H0584676B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- thin film
- substrate
- insulating substrate
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15674085A JPS6218072A (ja) | 1985-07-16 | 1985-07-16 | 半導体歪検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15674085A JPS6218072A (ja) | 1985-07-16 | 1985-07-16 | 半導体歪検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6218072A JPS6218072A (ja) | 1987-01-27 |
| JPH0584676B2 true JPH0584676B2 (cs) | 1993-12-02 |
Family
ID=15634280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15674085A Granted JPS6218072A (ja) | 1985-07-16 | 1985-07-16 | 半導体歪検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6218072A (cs) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3814348A1 (de) * | 1988-04-28 | 1989-11-09 | Philips Patentverwaltung | Verfahren zur herstellung einer polykristallinen halbleitenden widerstandsschicht aus silicium auf einem siliciumtraeger |
| US5095349A (en) * | 1988-06-08 | 1992-03-10 | Nippondenso Co., Ltd. | Semiconductor pressure sensor and method of manufacturing same |
| US5320705A (en) * | 1988-06-08 | 1994-06-14 | Nippondenso Co., Ltd. | Method of manufacturing a semiconductor pressure sensor |
| USRE34893E (en) * | 1988-06-08 | 1995-04-04 | Nippondenso Co., Ltd. | Semiconductor pressure sensor and method of manufacturing same |
| US5191798A (en) * | 1988-09-30 | 1993-03-09 | Kabushiki Kaisha Komatsu Seisakusho | Pressure sensor |
| JP2769661B2 (ja) * | 1992-09-29 | 1998-06-25 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| JP5158442B2 (ja) | 2009-02-27 | 2013-03-06 | 三菱電機株式会社 | 半導体圧力センサおよびその製造方法 |
-
1985
- 1985-07-16 JP JP15674085A patent/JPS6218072A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6218072A (ja) | 1987-01-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |