JPH0583194B2 - - Google Patents
Info
- Publication number
- JPH0583194B2 JPH0583194B2 JP1245104A JP24510489A JPH0583194B2 JP H0583194 B2 JPH0583194 B2 JP H0583194B2 JP 1245104 A JP1245104 A JP 1245104A JP 24510489 A JP24510489 A JP 24510489A JP H0583194 B2 JPH0583194 B2 JP H0583194B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- region
- oxidation
- impurity
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Element Separation (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1245104A JPH02119172A (ja) | 1989-09-22 | 1989-09-22 | 半導体装置の製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1245104A JPH02119172A (ja) | 1989-09-22 | 1989-09-22 | 半導体装置の製法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2049680A Division JPS56118366A (en) | 1980-02-22 | 1980-02-22 | Preparation of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02119172A JPH02119172A (ja) | 1990-05-07 |
| JPH0583194B2 true JPH0583194B2 (enrdf_load_stackoverflow) | 1993-11-25 |
Family
ID=17128674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1245104A Granted JPH02119172A (ja) | 1989-09-22 | 1989-09-22 | 半導体装置の製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02119172A (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE869173A (nl) * | 1978-07-20 | 1978-11-16 | Esso N V Sa | Werkwijze en toestel voor het controleren van de ijking van een op een onder druk staand reservoir gemonteerde inwendige veiligheidsklep |
-
1989
- 1989-09-22 JP JP1245104A patent/JPH02119172A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02119172A (ja) | 1990-05-07 |
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