JPH057952B2 - - Google Patents

Info

Publication number
JPH057952B2
JPH057952B2 JP58079411A JP7941183A JPH057952B2 JP H057952 B2 JPH057952 B2 JP H057952B2 JP 58079411 A JP58079411 A JP 58079411A JP 7941183 A JP7941183 A JP 7941183A JP H057952 B2 JPH057952 B2 JP H057952B2
Authority
JP
Japan
Prior art keywords
elastic body
rotor
pressure contact
ultrasonic motor
deposit removing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58079411A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59204480A (ja
Inventor
Tadao Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP58079411A priority Critical patent/JPS59204480A/ja
Publication of JPS59204480A publication Critical patent/JPS59204480A/ja
Publication of JPH057952B2 publication Critical patent/JPH057952B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP58079411A 1983-05-09 1983-05-09 超音波モーター Granted JPS59204480A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58079411A JPS59204480A (ja) 1983-05-09 1983-05-09 超音波モーター

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58079411A JPS59204480A (ja) 1983-05-09 1983-05-09 超音波モーター

Publications (2)

Publication Number Publication Date
JPS59204480A JPS59204480A (ja) 1984-11-19
JPH057952B2 true JPH057952B2 (enExample) 1993-01-29

Family

ID=13689116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58079411A Granted JPS59204480A (ja) 1983-05-09 1983-05-09 超音波モーター

Country Status (1)

Country Link
JP (1) JPS59204480A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0661447B2 (ja) * 1985-01-21 1994-08-17 日立マクセル株式会社 真空槽内駆動装置
EP0383309B1 (en) * 1989-02-14 1997-06-04 Canon Kabushiki Kaisha Vibration wave motor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5326911A (en) * 1976-08-25 1978-03-13 Yokogawa Hokushin Electric Corp Pulse motor
JPS59201685A (ja) * 1983-04-30 1984-11-15 Canon Inc 振動波モ−タ

Also Published As

Publication number Publication date
JPS59204480A (ja) 1984-11-19

Similar Documents

Publication Publication Date Title
US4510411A (en) Drive circuit for surface-wave driven motor utilizing ultrasonic vibration
WO1987005166A1 (en) Ultrasonic motor
JP2638856B2 (ja) 超音波モータ
JPH057952B2 (enExample)
JP4497980B2 (ja) 圧電体およびその分極方法
USRE34409E (en) Drive circuit for surface-wave driven motor utilizing ultrasonic vibration
JP2574284B2 (ja) 超音波モ−タ
JP2002369556A (ja) 電気−機械エネルギー変換素子及び振動波駆動装置
JP2537874B2 (ja) 超音波モ−タ
JP2585583B2 (ja) 超音波モ−タ
JPH0824428B2 (ja) 超音波モータ
JPS63181676A (ja) 超音波回転振動子
JP2537848B2 (ja) 超音波モ−タ
JPH0636674B2 (ja) 超音波モ−タ
JP2523634B2 (ja) 超音波モ−タ
JPH056430B2 (enExample)
JPS6118370A (ja) 圧電モ−タ
JPS63283475A (ja) 超音波モ−タ
JP3120228B2 (ja) 超音波モータ
JPH0640747B2 (ja) 超音波モ−タ
JP2558661B2 (ja) 超音波モ−タ
JP2543144B2 (ja) 超音波モ―タ
JP2669013B2 (ja) 超音波モータの電極構造
JPH0365081A (ja) 静電モータ
JPH057951B2 (enExample)