JPH057860B2 - - Google Patents

Info

Publication number
JPH057860B2
JPH057860B2 JP58107843A JP10784383A JPH057860B2 JP H057860 B2 JPH057860 B2 JP H057860B2 JP 58107843 A JP58107843 A JP 58107843A JP 10784383 A JP10784383 A JP 10784383A JP H057860 B2 JPH057860 B2 JP H057860B2
Authority
JP
Japan
Prior art keywords
wafer
periphery
semiconductor wafer
temperature
lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58107843A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60732A (ja
Inventor
Tatsumi Hiramoto
Tetsuharu Arai
Yoshiki Mimura
Hiroshi Shimizu
Satoru Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP58107843A priority Critical patent/JPS60732A/ja
Publication of JPS60732A publication Critical patent/JPS60732A/ja
Publication of JPH057860B2 publication Critical patent/JPH057860B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P34/422—

Landscapes

  • Recrystallisation Techniques (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP58107843A 1983-06-17 1983-06-17 アニ−ル方法 Granted JPS60732A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58107843A JPS60732A (ja) 1983-06-17 1983-06-17 アニ−ル方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58107843A JPS60732A (ja) 1983-06-17 1983-06-17 アニ−ル方法

Publications (2)

Publication Number Publication Date
JPS60732A JPS60732A (ja) 1985-01-05
JPH057860B2 true JPH057860B2 (en:Method) 1993-01-29

Family

ID=14469463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58107843A Granted JPS60732A (ja) 1983-06-17 1983-06-17 アニ−ル方法

Country Status (1)

Country Link
JP (1) JPS60732A (en:Method)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583325A (ja) * 1981-06-29 1983-01-10 Fujitsu Ltd インバ−タ回路
JP2002141298A (ja) * 2000-11-02 2002-05-17 Toshiba Corp 半導体装置の製造方法
JP4712371B2 (ja) 2004-12-24 2011-06-29 富士通セミコンダクター株式会社 半導体装置の製造方法
JP2008277696A (ja) * 2007-05-07 2008-11-13 Toshiba Corp 半導体装置の製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JAPANESE JOURNAL OF APPLIED PHYSICS=1980 *

Also Published As

Publication number Publication date
JPS60732A (ja) 1985-01-05

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