JPH0577640B2 - - Google Patents
Info
- Publication number
- JPH0577640B2 JPH0577640B2 JP61228355A JP22835586A JPH0577640B2 JP H0577640 B2 JPH0577640 B2 JP H0577640B2 JP 61228355 A JP61228355 A JP 61228355A JP 22835586 A JP22835586 A JP 22835586A JP H0577640 B2 JPH0577640 B2 JP H0577640B2
- Authority
- JP
- Japan
- Prior art keywords
- graphite crucible
- crucible
- graphite
- reaction
- sic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 32
- 229910002804 graphite Inorganic materials 0.000 claims description 31
- 239000010439 graphite Substances 0.000 claims description 31
- 239000013078 crystal Substances 0.000 claims description 9
- 239000010453 quartz Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 230000035699 permeability Effects 0.000 claims description 7
- 230000005484 gravity Effects 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 description 18
- 239000000463 material Substances 0.000 description 13
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 238000005087 graphitization Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000000465 moulding Methods 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000007770 graphite material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002006 petroleum coke Substances 0.000 description 2
- 239000011163 secondary particle Substances 0.000 description 2
- 239000011271 tar pitch Substances 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000010406 interfacial reaction Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000011331 needle coke Substances 0.000 description 1
- 239000011334 petroleum pitch coke Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Landscapes
- Recrystallisation Techniques (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22835586A JPS6385086A (ja) | 1986-09-29 | 1986-09-29 | Si単結晶引上用黒鉛ルツボ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22835586A JPS6385086A (ja) | 1986-09-29 | 1986-09-29 | Si単結晶引上用黒鉛ルツボ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6385086A JPS6385086A (ja) | 1988-04-15 |
JPH0577640B2 true JPH0577640B2 (ko) | 1993-10-27 |
Family
ID=16875158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22835586A Granted JPS6385086A (ja) | 1986-09-29 | 1986-09-29 | Si単結晶引上用黒鉛ルツボ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6385086A (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008290943A (ja) * | 2008-08-04 | 2008-12-04 | Shin Nippon Techno Carbon Kk | シリコン単結晶製造用黒鉛ルツボの製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07187878A (ja) * | 1992-03-24 | 1995-07-25 | Tokai Carbon Co Ltd | シリコン単結晶製造用黒鉛ルツボ |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5755680A (en) * | 1980-09-19 | 1982-04-02 | Matsushita Electric Ind Co Ltd | Television receiver |
JPS59195514A (ja) * | 1983-04-11 | 1984-11-06 | Kobe Steel Ltd | 不透過性炭素成形体及びその製造方法 |
JPS6090805A (ja) * | 1983-10-25 | 1985-05-22 | Kobe Steel Ltd | 不透過性炭素成形体の製造方法 |
-
1986
- 1986-09-29 JP JP22835586A patent/JPS6385086A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5755680A (en) * | 1980-09-19 | 1982-04-02 | Matsushita Electric Ind Co Ltd | Television receiver |
JPS59195514A (ja) * | 1983-04-11 | 1984-11-06 | Kobe Steel Ltd | 不透過性炭素成形体及びその製造方法 |
JPS6090805A (ja) * | 1983-10-25 | 1985-05-22 | Kobe Steel Ltd | 不透過性炭素成形体の製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008290943A (ja) * | 2008-08-04 | 2008-12-04 | Shin Nippon Techno Carbon Kk | シリコン単結晶製造用黒鉛ルツボの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6385086A (ja) | 1988-04-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |