JPH0577307B2 - - Google Patents

Info

Publication number
JPH0577307B2
JPH0577307B2 JP6488087A JP6488087A JPH0577307B2 JP H0577307 B2 JPH0577307 B2 JP H0577307B2 JP 6488087 A JP6488087 A JP 6488087A JP 6488087 A JP6488087 A JP 6488087A JP H0577307 B2 JPH0577307 B2 JP H0577307B2
Authority
JP
Japan
Prior art keywords
insulating material
bonding
anode
liquid
anodic bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6488087A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63229865A (ja
Inventor
Shigeo Oohashi
Takeshi Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ishizuka Glass Co Ltd
Original Assignee
Ishizuka Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishizuka Glass Co Ltd filed Critical Ishizuka Glass Co Ltd
Priority to JP6488087A priority Critical patent/JPS63229865A/ja
Publication of JPS63229865A publication Critical patent/JPS63229865A/ja
Publication of JPH0577307B2 publication Critical patent/JPH0577307B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Ceramic Products (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Pressure Sensors (AREA)
JP6488087A 1987-03-19 1987-03-19 陽極接合方法 Granted JPS63229865A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6488087A JPS63229865A (ja) 1987-03-19 1987-03-19 陽極接合方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6488087A JPS63229865A (ja) 1987-03-19 1987-03-19 陽極接合方法

Publications (2)

Publication Number Publication Date
JPS63229865A JPS63229865A (ja) 1988-09-26
JPH0577307B2 true JPH0577307B2 (pt) 1993-10-26

Family

ID=13270873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6488087A Granted JPS63229865A (ja) 1987-03-19 1987-03-19 陽極接合方法

Country Status (1)

Country Link
JP (1) JPS63229865A (pt)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03233429A (ja) * 1990-02-08 1991-10-17 Mitsubishi Electric Corp 液晶表示素子の製造方法
JP2519635B2 (ja) * 1992-08-20 1996-07-31 石塚硝子株式会社 陽極接合方法

Also Published As

Publication number Publication date
JPS63229865A (ja) 1988-09-26

Similar Documents

Publication Publication Date Title
US3943323A (en) Bonding apparatus
JPH0577307B2 (pt)
JPS63229863A (ja) 陽極接合方法
GB1459912A (en) Method of fabricating an insulator part
JPS5886428A (ja) 金属管封入型温度センサの製造法
JPH0235438U (pt)
JP2870822B2 (ja) シリコンとガラスとの接合方法
JPH07263527A (ja) 静電吸着装置
JPH02141442A (ja) シリコンウエハとガラス基板の陽極接合法
JP3110178B2 (ja) 半導体基板の作製方法及び陽極化成装置
NL7406783A (nl) Werkwijze voor het aanbrengen van een draad- verbinding aan een halfgeleiderinrichting.
JPH097910A (ja) 陽極接合装置と陽極接合方法および加速度センサの製造方法
JPH0577306B2 (pt)
JPH0479272A (ja) 陽極接合装置
JPH0263541U (pt)
JPH07105505B2 (ja) 陽極接合方法
JPS62259476A (ja) 半導体圧力センサ用台座
EP1217099A3 (de) Mikroreaktor für elektrochemische Umsetzungen
JP2624832B2 (ja) 陽極接合装置
JPS6246277Y2 (pt)
JPH0383870A (ja) 金属Ｓｉ含有炭化ケイ素セラミックスの電気接合方法
JPH07130591A (ja) ウエハの製作方法
JPH01176282A (ja) セラミックスの電気接合方法
JPH0276237A (ja) シリコンウェハとガラス基板の陽極接合法
JPH02120831U (pt)