JPH0577112B2 - - Google Patents

Info

Publication number
JPH0577112B2
JPH0577112B2 JP1127793A JP12779389A JPH0577112B2 JP H0577112 B2 JPH0577112 B2 JP H0577112B2 JP 1127793 A JP1127793 A JP 1127793A JP 12779389 A JP12779389 A JP 12779389A JP H0577112 B2 JPH0577112 B2 JP H0577112B2
Authority
JP
Japan
Prior art keywords
wiring pattern
image signal
inspected
pattern
connection information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1127793A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235576A (ja
Inventor
Takanori Ninomya
Yasuo Nakagawa
Keiya Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1127793A priority Critical patent/JPH0235576A/ja
Publication of JPH0235576A publication Critical patent/JPH0235576A/ja
Publication of JPH0577112B2 publication Critical patent/JPH0577112B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1127793A 1989-05-23 1989-05-23 配線パターン欠陥検出方法及び装置 Granted JPH0235576A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1127793A JPH0235576A (ja) 1989-05-23 1989-05-23 配線パターン欠陥検出方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1127793A JPH0235576A (ja) 1989-05-23 1989-05-23 配線パターン欠陥検出方法及び装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58065659A Division JPS59192945A (ja) 1983-04-15 1983-04-15 配線パターン欠陥検出方法及びその装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2093036A Division JPH02297198A (ja) 1990-04-10 1990-04-10 配線パターン欠陥検出方法及び装置

Publications (2)

Publication Number Publication Date
JPH0235576A JPH0235576A (ja) 1990-02-06
JPH0577112B2 true JPH0577112B2 (OSRAM) 1993-10-26

Family

ID=14968818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1127793A Granted JPH0235576A (ja) 1989-05-23 1989-05-23 配線パターン欠陥検出方法及び装置

Country Status (1)

Country Link
JP (1) JPH0235576A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4854605B2 (ja) * 2007-06-21 2012-01-18 三菱電機株式会社 監視カメラシステム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114130A (en) * 1978-02-27 1979-09-06 Nec Home Electronics Ltd Mark quality deciding method
JPS57106125A (en) * 1980-12-24 1982-07-01 Fujitsu Ltd Inspecting method and device for pattern
JPS58179343A (ja) * 1982-04-14 1983-10-20 Nec Corp 図形検査方法

Also Published As

Publication number Publication date
JPH0235576A (ja) 1990-02-06

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