JPH0576590B2 - - Google Patents

Info

Publication number
JPH0576590B2
JPH0576590B2 JP4173385A JP4173385A JPH0576590B2 JP H0576590 B2 JPH0576590 B2 JP H0576590B2 JP 4173385 A JP4173385 A JP 4173385A JP 4173385 A JP4173385 A JP 4173385A JP H0576590 B2 JPH0576590 B2 JP H0576590B2
Authority
JP
Japan
Prior art keywords
measurement electrode
vibrator
electrode
substrate
surface electrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4173385A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61200478A (ja
Inventor
Tadashi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP4173385A priority Critical patent/JPS61200478A/ja
Publication of JPS61200478A publication Critical patent/JPS61200478A/ja
Publication of JPH0576590B2 publication Critical patent/JPH0576590B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Current Or Voltage (AREA)
JP4173385A 1985-03-01 1985-03-01 表面電位計 Granted JPS61200478A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4173385A JPS61200478A (ja) 1985-03-01 1985-03-01 表面電位計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4173385A JPS61200478A (ja) 1985-03-01 1985-03-01 表面電位計

Publications (2)

Publication Number Publication Date
JPS61200478A JPS61200478A (ja) 1986-09-05
JPH0576590B2 true JPH0576590B2 (enExample) 1993-10-22

Family

ID=12616620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4173385A Granted JPS61200478A (ja) 1985-03-01 1985-03-01 表面電位計

Country Status (1)

Country Link
JP (1) JPS61200478A (enExample)

Also Published As

Publication number Publication date
JPS61200478A (ja) 1986-09-05

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term