JPH0574211B2 - - Google Patents

Info

Publication number
JPH0574211B2
JPH0574211B2 JP59052129A JP5212984A JPH0574211B2 JP H0574211 B2 JPH0574211 B2 JP H0574211B2 JP 59052129 A JP59052129 A JP 59052129A JP 5212984 A JP5212984 A JP 5212984A JP H0574211 B2 JPH0574211 B2 JP H0574211B2
Authority
JP
Japan
Prior art keywords
wafer
alignment
circuit
alignment mark
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59052129A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60196943A (ja
Inventor
Tetsuzo Tanimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59052129A priority Critical patent/JPS60196943A/ja
Publication of JPS60196943A publication Critical patent/JPS60196943A/ja
Publication of JPH0574211B2 publication Critical patent/JPH0574211B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59052129A 1984-03-21 1984-03-21 位置合せマ−ク検出方法 Granted JPS60196943A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59052129A JPS60196943A (ja) 1984-03-21 1984-03-21 位置合せマ−ク検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59052129A JPS60196943A (ja) 1984-03-21 1984-03-21 位置合せマ−ク検出方法

Publications (2)

Publication Number Publication Date
JPS60196943A JPS60196943A (ja) 1985-10-05
JPH0574211B2 true JPH0574211B2 (enExample) 1993-10-18

Family

ID=12906258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59052129A Granted JPS60196943A (ja) 1984-03-21 1984-03-21 位置合せマ−ク検出方法

Country Status (1)

Country Link
JP (1) JPS60196943A (enExample)

Also Published As

Publication number Publication date
JPS60196943A (ja) 1985-10-05

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