JPH0574211B2 - - Google Patents
Info
- Publication number
- JPH0574211B2 JPH0574211B2 JP59052129A JP5212984A JPH0574211B2 JP H0574211 B2 JPH0574211 B2 JP H0574211B2 JP 59052129 A JP59052129 A JP 59052129A JP 5212984 A JP5212984 A JP 5212984A JP H0574211 B2 JPH0574211 B2 JP H0574211B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- alignment
- circuit
- alignment mark
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59052129A JPS60196943A (ja) | 1984-03-21 | 1984-03-21 | 位置合せマ−ク検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59052129A JPS60196943A (ja) | 1984-03-21 | 1984-03-21 | 位置合せマ−ク検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60196943A JPS60196943A (ja) | 1985-10-05 |
| JPH0574211B2 true JPH0574211B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-10-18 |
Family
ID=12906258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59052129A Granted JPS60196943A (ja) | 1984-03-21 | 1984-03-21 | 位置合せマ−ク検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60196943A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1984
- 1984-03-21 JP JP59052129A patent/JPS60196943A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60196943A (ja) | 1985-10-05 |
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