JPH0574187B2 - - Google Patents

Info

Publication number
JPH0574187B2
JPH0574187B2 JP62106024A JP10602487A JPH0574187B2 JP H0574187 B2 JPH0574187 B2 JP H0574187B2 JP 62106024 A JP62106024 A JP 62106024A JP 10602487 A JP10602487 A JP 10602487A JP H0574187 B2 JPH0574187 B2 JP H0574187B2
Authority
JP
Japan
Prior art keywords
cylindrical
electrode
insulating material
central axis
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62106024A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63271858A (ja
Inventor
Toshimichi Taya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62106024A priority Critical patent/JPS63271858A/ja
Publication of JPS63271858A publication Critical patent/JPS63271858A/ja
Publication of JPH0574187B2 publication Critical patent/JPH0574187B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP62106024A 1987-04-28 1987-04-28 多重電極レンズ系構造 Granted JPS63271858A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62106024A JPS63271858A (ja) 1987-04-28 1987-04-28 多重電極レンズ系構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62106024A JPS63271858A (ja) 1987-04-28 1987-04-28 多重電極レンズ系構造

Publications (2)

Publication Number Publication Date
JPS63271858A JPS63271858A (ja) 1988-11-09
JPH0574187B2 true JPH0574187B2 (en, 2012) 1993-10-15

Family

ID=14423073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62106024A Granted JPS63271858A (ja) 1987-04-28 1987-04-28 多重電極レンズ系構造

Country Status (1)

Country Link
JP (1) JPS63271858A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02260359A (ja) * 1989-03-31 1990-10-23 Ulvac Corp 平行走査用イオン注入装置
US7351962B2 (en) * 2003-10-08 2008-04-01 Varian Australia Pty Ltd Electrode for mass spectrometry

Also Published As

Publication number Publication date
JPS63271858A (ja) 1988-11-09

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