JPH0573288B2 - - Google Patents
Info
- Publication number
- JPH0573288B2 JPH0573288B2 JP7134787A JP7134787A JPH0573288B2 JP H0573288 B2 JPH0573288 B2 JP H0573288B2 JP 7134787 A JP7134787 A JP 7134787A JP 7134787 A JP7134787 A JP 7134787A JP H0573288 B2 JPH0573288 B2 JP H0573288B2
- Authority
- JP
- Japan
- Prior art keywords
- anode
- metal film
- center line
- crystal resonator
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 56
- 230000005540 biological transmission Effects 0.000 claims description 19
- 239000010408 film Substances 0.000 description 69
- 239000002184 metal Substances 0.000 description 28
- 229910052751 metal Inorganic materials 0.000 description 28
- 239000010953 base metal Substances 0.000 description 27
- 239000010931 gold Substances 0.000 description 20
- 239000007789 gas Substances 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 230000003628 erosive effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7134787A JPS63240113A (ja) | 1987-03-27 | 1987-03-27 | 水晶振動子の電極形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7134787A JPS63240113A (ja) | 1987-03-27 | 1987-03-27 | 水晶振動子の電極形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63240113A JPS63240113A (ja) | 1988-10-05 |
| JPH0573288B2 true JPH0573288B2 (enrdf_load_stackoverflow) | 1993-10-14 |
Family
ID=13457873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7134787A Granted JPS63240113A (ja) | 1987-03-27 | 1987-03-27 | 水晶振動子の電極形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63240113A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011193288A (ja) * | 2010-03-15 | 2011-09-29 | Seiko Instruments Inc | パターン形成方法、パターン形成装置、圧電振動子、圧電振動子の製造方法、発振器、電子機器および電波時計 |
-
1987
- 1987-03-27 JP JP7134787A patent/JPS63240113A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63240113A (ja) | 1988-10-05 |
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