JPH0573242B2 - - Google Patents
Info
- Publication number
- JPH0573242B2 JPH0573242B2 JP61054054A JP5405486A JPH0573242B2 JP H0573242 B2 JPH0573242 B2 JP H0573242B2 JP 61054054 A JP61054054 A JP 61054054A JP 5405486 A JP5405486 A JP 5405486A JP H0573242 B2 JPH0573242 B2 JP H0573242B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic alloy
- group
- metal selected
- alloy film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000203 mixture Substances 0.000 claims description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 229910045601 alloy Inorganic materials 0.000 claims description 14
- 239000000956 alloy Substances 0.000 claims description 14
- 239000007789 gas Substances 0.000 claims description 14
- 229910001004 magnetic alloy Inorganic materials 0.000 claims description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 10
- 229910052742 iron Inorganic materials 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 229910052748 manganese Inorganic materials 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims 3
- 229910052735 hafnium Inorganic materials 0.000 claims 3
- 150000004767 nitrides Chemical class 0.000 description 15
- 230000005389 magnetism Effects 0.000 description 9
- 230000007423 decrease Effects 0.000 description 7
- 238000005121 nitriding Methods 0.000 description 7
- 239000010410 layer Substances 0.000 description 6
- 229910007744 Zr—N Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910020018 Nb Zr Inorganic materials 0.000 description 4
- 230000005415 magnetization Effects 0.000 description 4
- 230000001771 impaired effect Effects 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 2
- 229910000521 B alloy Inorganic materials 0.000 description 1
- 229910001199 N alloy Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/13—Amorphous metallic alloys, e.g. glassy metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Power Engineering (AREA)
- Nanotechnology (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5405486A JPS62210607A (ja) | 1986-03-12 | 1986-03-12 | 軟磁性合金膜及びその形成法 |
DE19873707522 DE3707522A1 (de) | 1986-03-12 | 1987-03-09 | Magnetischer nitridfilm |
US07/024,141 US4836865A (en) | 1986-03-12 | 1987-03-10 | Magnetic nitride film |
US07/445,105 US5049209A (en) | 1986-03-12 | 1989-12-07 | Magnetic nitride film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5405486A JPS62210607A (ja) | 1986-03-12 | 1986-03-12 | 軟磁性合金膜及びその形成法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13460997A Division JP2856725B2 (ja) | 1997-05-26 | 1997-05-26 | 軟磁性合金膜の形成法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62210607A JPS62210607A (ja) | 1987-09-16 |
JPH0573242B2 true JPH0573242B2 (fr) | 1993-10-14 |
Family
ID=12959899
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5405486A Granted JPS62210607A (ja) | 1986-03-12 | 1986-03-12 | 軟磁性合金膜及びその形成法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62210607A (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2533860B2 (ja) * | 1986-09-24 | 1996-09-11 | 株式会社日立製作所 | 磁性超格子膜およびそれを用いた磁気ヘツド |
JP2790451B2 (ja) * | 1987-04-10 | 1998-08-27 | 松下電器産業株式会社 | 窒素を含む軟磁性合金膜 |
JP2690904B2 (ja) * | 1987-08-10 | 1997-12-17 | 株式会社日立製作所 | 耐熱磁性膜 |
JPH07100835B2 (ja) * | 1987-11-11 | 1995-11-01 | 東北特殊鋼株式会社 | 磁性薄膜及びその製造方法 |
JPH0827897B2 (ja) * | 1988-03-09 | 1996-03-21 | 松下電器産業株式会社 | 磁気ヘッド |
US4969962A (en) * | 1988-08-20 | 1990-11-13 | Victor Company Of Japan, Ltd. | Magnetic alloys for magnetic head |
JPH0744123B2 (ja) * | 1989-02-08 | 1995-05-15 | 富士写真フイルム株式会社 | 軟磁性薄膜の製造方法 |
JPH0744108B2 (ja) * | 1989-01-26 | 1995-05-15 | 富士写真フイルム株式会社 | 軟磁性薄膜 |
JP2839554B2 (ja) * | 1989-06-14 | 1998-12-16 | 株式会社日立製作所 | 磁性膜及びこれを用いた磁気ヘッド |
US5227940A (en) * | 1990-07-13 | 1993-07-13 | Fuji Photo Film Co., Ltd. | Composite magnetic head |
JP2698864B2 (ja) * | 1990-07-26 | 1998-01-19 | 富士写真フイルム株式会社 | 軟磁性薄膜の製造方法 |
US5262915A (en) * | 1990-08-23 | 1993-11-16 | Tdk Corporation | Magnetic head comprising a soft magnetic thin film of FeNiZrN having enhanced (100) orientation |
US5589221A (en) * | 1994-05-16 | 1996-12-31 | Matsushita Electric Industrial Co., Ltd. | Magnetic thin film, and method of manufacturing the same, and magnetic head |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4949803A (fr) * | 1972-09-18 | 1974-05-15 | ||
JPS5494428A (en) * | 1977-12-30 | 1979-07-26 | Ibm | Amorphous metal layer |
JPS5533093A (en) * | 1978-08-28 | 1980-03-08 | Ibm | Thin film magnetic material and method of manufacturing same |
JPS5633453A (en) * | 1979-08-27 | 1981-04-03 | Takeshi Masumoto | Iron-base amorphous alloy having high magnetic flux density and small magnetostriction |
JPS5827941A (ja) * | 1981-08-11 | 1983-02-18 | Hitachi Ltd | 非晶質薄膜の製造方法 |
JPS58147538A (ja) * | 1982-02-25 | 1983-09-02 | Hiroyasu Fujimori | スパツタ非晶質磁性材料及びその製造方法 |
JPS60220913A (ja) * | 1984-04-18 | 1985-11-05 | Sony Corp | 磁性薄膜 |
US5049209A (en) * | 1986-03-12 | 1991-09-17 | Matsushita Electric Industrial Co., Ltd. | Magnetic nitride film |
JPH0456110A (ja) * | 1990-06-22 | 1992-02-24 | Toshiba Corp | 変圧器の外部冷却器 |
-
1986
- 1986-03-12 JP JP5405486A patent/JPS62210607A/ja active Granted
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4949803A (fr) * | 1972-09-18 | 1974-05-15 | ||
JPS5494428A (en) * | 1977-12-30 | 1979-07-26 | Ibm | Amorphous metal layer |
JPS5533093A (en) * | 1978-08-28 | 1980-03-08 | Ibm | Thin film magnetic material and method of manufacturing same |
JPS5633453A (en) * | 1979-08-27 | 1981-04-03 | Takeshi Masumoto | Iron-base amorphous alloy having high magnetic flux density and small magnetostriction |
JPS5827941A (ja) * | 1981-08-11 | 1983-02-18 | Hitachi Ltd | 非晶質薄膜の製造方法 |
JPS58147538A (ja) * | 1982-02-25 | 1983-09-02 | Hiroyasu Fujimori | スパツタ非晶質磁性材料及びその製造方法 |
JPS60220913A (ja) * | 1984-04-18 | 1985-11-05 | Sony Corp | 磁性薄膜 |
US5049209A (en) * | 1986-03-12 | 1991-09-17 | Matsushita Electric Industrial Co., Ltd. | Magnetic nitride film |
JPH0456110A (ja) * | 1990-06-22 | 1992-02-24 | Toshiba Corp | 変圧器の外部冷却器 |
Also Published As
Publication number | Publication date |
---|---|
JPS62210607A (ja) | 1987-09-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |