JPH057249Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] This invention relates to a film forming apparatus such as a molecular beam epitaxial apparatus (MBE), and in particular to a shutter plate that blocks the molecular beams generated from the molecular beam source. It is about improvement.

[Conventional technology]

This type of molecular beam epitaxial apparatus, which is a conventional film forming apparatus, is equipped with a plurality of crucibles as containers for storing particles, as shown in FIG. 5, for example. In the figure, reference numeral 1 denotes a molecular beam source, that is, a particle generation source, and this particle generation source 1 directs from an opening 4 in front of this opening 4 and generates a relatively low melting point molecular beam such as gallium (Ga). A storage container 3 for the particle body 2 consisting of a crucible that emits particles for film formation, a heater wire 5 for warming the crucible 3, and a thermocouple 6 for sensing and controlling the temperature of the crucible 3;
These crucible 2, heater wire 5 and thermocouple 6
It has a plurality of cylindrical holes for accommodating the cylindrical holes, and the centers of the plurality of cylindrical holes are all directed toward the substrate 7, and the openings 8 of the plurality of cylindrical holes are provided. The liquid nitrogen shroud 10 shown in FIG. 6 has a spherical surface 9. 1
Reference numeral 1 denotes a disc-shaped shutter plate as shown in FIG. 7, which is provided on the particle generation source 1 and blocks particles generated from the particle generation source 1, and 12 supports this shutter plate 11. A rod-shaped support 14 is housed in the cylindrical hole of the liquid nitrogen shroud 10 and opens and closes the shutter plate 11 by a half turn of the rotation introduction terminal 13. A substrate 15 is a heater that heats the substrate 14, which is provided in the direction of gravity and at an angle of 45 degrees with respect to the direction of gravity G.

A conventional film forming apparatus is configured as described above. For example, when evaporating gallium (Ga) and arsenic (As) at the same time, gallium (Ga) and arsenic (As) are placed in different crucibles 3, respectively, and the heater wire is 5
Warm each crucible 3 by
The shutter plate 11 is opened and closed, thereby adjusting the deposition ratio of gallium (Ga) and arsenic (As).

[Problem that the invention attempts to solve]

In the conventional film forming apparatus as described above, when the shutter plate 11 of the crucible 3 is closed while the crucible 1 is warmed, evaporated gallium (Ga) adheres to the back surface of the shutter plate 11. This adhered gallium (Ga) accumulates on the lowest part 15 of the shutter plate, and when the accumulated amount increases, the shutter plate 11
during the opening/closing operation of the crucible 3, falling onto the outer wall of the crucible 3 or falling into the crucible 3, causing a chemical reaction with the outer wall of the crucible 3, shortening the life of the crucible 3, and contaminating the vapor deposition material inside the crucible 3. There are problems,
In addition, in order to avoid this, a support portion of the shutter plate 11 by the support body 12 is provided at the lowest part 15 of the shutter 11, and when an attempt is made to convey this support body 12 to take out the object attached to the shutter plate 11, the support There was a problem in that the deposits falling down the body 12 adhered to the bearings of the rotation introduction terminal 13 at the lower part of the support body 12, and the support body 12 stopped rotating.

This invention was made in view of the above-mentioned problems, and aims to provide a film forming apparatus that can produce a high-quality film with few impurities and that can extend the life of a container that accommodates particles.

[Means for solving problems]

The film forming device according to this invention is provided with a protruding body whose tip is located outside the opening of a container containing particles at the lowest part of the shutter plate, and this tip is located at the lowest position of the protruding body. This is what I did.

[Effect]

In this device, the tip of the protruding body provided at the lowest part of the shutter plate is provided outside the opening of the container containing the particles, so that particles adhering to the back surface of the shutter plate are removed from the protruding body. It is guided to the tip and falls from this tip, and since the container and its opening are not present at this point of fall, it does not damage the container or contaminate the particles inside the container.

〔Example〕

An embodiment of this invention will be described below with reference to the drawings. FIG. 1 is a diagram corresponding to FIG. 7 of the conventional device, and in this diagram, a disc-shaped shutter plate 11
A triangular protrusion 16 with an acute tip is provided at the lowest part 15 of the shutter plate 11, and the tip 17 of the protrusion 16 is placed outside the opening 4 of the container 3 containing the particles 2. It differs from the one shown in FIG. 7 in that the tip 17 is located lower than the lowest portion 15 of the shutter plate 11.

In the film forming apparatus configured as described above, since the tips 17 of the protrusions 16 have an acute triangular shape, particles adhering to the back surface of the shutter plate 11 are efficiently focused on the protrusions 16. At the same time, the focused particles also fall efficiently from the tip 17, and therefore the amount of particles adhering to the back surface of the shutter plate 11 is very small, so when the shutter plate 11 is opened, Shutter plate 1
This reduces the number of particles that solidify while adhering to the shutter plate 1, and prevents the solidified particles from peeling off and falling into the container 13 when the shutter plate 11 is closed again. Furthermore, since there is no container 13 or its opening 4 at this falling point, the container 13 will not be damaged or the particles 2 inside the container 13 will not be contaminated. Furthermore, applying the above-described structure to a particle generation source 1 having a plurality of containers 13 as shown in FIG. , is a very effective means.

In the above embodiment, the protrusion 16 provided at the lowest part 15 of the shutter plate 11 is triangular with an acute angle at the tip, but it may be triangular with an obtuse angle, or it may be rod-shaped. But it's a good one.

Further, in the above embodiment, the shutter plate 11
Although the shutter plate 11 is circular and has a protrusion 16 thereon, it is also possible to provide a triangular protrusion 16 on a semicircular shutter plate 11 as shown in FIG.

Furthermore, in the above embodiment, the shutter plate 11 was opened and closed by rotating the rotation introduction terminal 13 by half a turn, but it is possible to open and close the shutter plate 11 by rotating the rotation introduction terminal 13 by half a turn, but it is possible to open and close the shutter plate 11 by rotating the rotation introduction terminal 13 by half a rotation, but it is also possible to open and close the shutter plate 11 by rotating the rotation introduction terminal 13 by half a turn, but it is also possible to open and close the shutter plate 11 by rotating the rotation introduction terminal 13 by half a turn. It may also be carried out by a front-rear straight movement type using bellows 18 of various types, and the same effect can be obtained even if the protruding body 16 is provided on these bellows 18.

[Effect of idea]

As explained above, this device has the tip of the protruding body provided at the lowest part of the shutter plate located outside the opening of the container containing the particles.
The particles adhering to the back surface of the shutter plate do not fall into the container and into the container, so a high quality film with few impurities can be obtained, and the container containing the particles has the effect of extending the lifespan. .

[Brief explanation of drawings]

Fig. 1 is a perspective view of a shutter plate, a protruding body, a support body, and a container showing a first embodiment of this invention, and Fig. 2 is a perspective view of a shutter plate and a protruding body showing a second embodiment of this invention. , FIGS. 3 and 4 are views showing the opening and closing mechanism of the shutter plate in the third and fourth embodiments of this invention, FIG. 5 is a perspective view of a conventional film forming apparatus, and FIG. FIG. 7 is a perspective view of the liquid nitrogen shroud in the film forming apparatus; FIG. 7 is a perspective view showing the shutter plate, protrusion, support and container in the film forming apparatus. In the figure, 2 is a particle body, 3 is a storage container for the particle body 2, 4 is an opening of this container 3, 7 is a substrate, 11
12 is a shutter plate, 12 is a support, 15 is the lowest part of the shutter plate 11, 16 is a protrusion, 17 is the tip of the protrusion 16, and G is the direction of gravity.
Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

[Claims for Utility Model Registration] (1) A container for containing particles that emits film-forming particles from an opening toward a substrate provided in front of the opening; A shutter plate provided between the shutter plate and tilted in the direction of gravity to block the particles for forming the film, and a support for supporting the shutter plate, the shutter plate being provided between A membrane formation characterized in that a protruding body is provided at the lowest part of the shutter plate such that the tip is located and the tip is lower than the lowest part of the shutter plate which is provided inclined in the direction of gravity. Device. (2) The film forming apparatus according to claim 1, wherein the protrusion has an acute tip. (3) Claim 1 or 2 of the utility model registration claim characterized by having a plurality of storage containers for particle bodies
The film forming apparatus described in .