JPH057239Y2 - - Google Patents
Info
- Publication number
- JPH057239Y2 JPH057239Y2 JP1987008306U JP830687U JPH057239Y2 JP H057239 Y2 JPH057239 Y2 JP H057239Y2 JP 1987008306 U JP1987008306 U JP 1987008306U JP 830687 U JP830687 U JP 830687U JP H057239 Y2 JPH057239 Y2 JP H057239Y2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- fluid supply
- quartz tube
- collar
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 26
- 238000007789 sealing Methods 0.000 claims description 20
- 239000010453 quartz Substances 0.000 description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 23
- 238000005452 bending Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 102100026933 Myelin-associated neurite-outgrowth inhibitor Human genes 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- -1 e.g. Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987008306U JPH057239Y2 (is) | 1987-01-23 | 1987-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987008306U JPH057239Y2 (is) | 1987-01-23 | 1987-01-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63119667U JPS63119667U (is) | 1988-08-02 |
| JPH057239Y2 true JPH057239Y2 (is) | 1993-02-24 |
Family
ID=30792564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987008306U Expired - Lifetime JPH057239Y2 (is) | 1987-01-23 | 1987-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057239Y2 (is) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10027461A1 (de) * | 2000-06-02 | 2001-12-06 | Glatt Gmbh | Explosionssichere Behälter |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4855247U (is) * | 1971-10-29 | 1973-07-16 | ||
| JPS48111790U (is) * | 1972-04-01 | 1973-12-21 |
-
1987
- 1987-01-23 JP JP1987008306U patent/JPH057239Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63119667U (is) | 1988-08-02 |
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