JPH0572097B2 - - Google Patents

Info

Publication number
JPH0572097B2
JPH0572097B2 JP58216136A JP21613683A JPH0572097B2 JP H0572097 B2 JPH0572097 B2 JP H0572097B2 JP 58216136 A JP58216136 A JP 58216136A JP 21613683 A JP21613683 A JP 21613683A JP H0572097 B2 JPH0572097 B2 JP H0572097B2
Authority
JP
Japan
Prior art keywords
plasma
magnetic field
vacuum vessel
generating means
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58216136A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60109232A (ja
Inventor
Noriaki Yamamoto
Fumio Shibata
Tsunehiko Tsubone
Yutaka Kaneko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58216136A priority Critical patent/JPS60109232A/ja
Publication of JPS60109232A publication Critical patent/JPS60109232A/ja
Publication of JPH0572097B2 publication Critical patent/JPH0572097B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
JP58216136A 1983-11-18 1983-11-18 マイクロ波プラズマ処理方法 Granted JPS60109232A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58216136A JPS60109232A (ja) 1983-11-18 1983-11-18 マイクロ波プラズマ処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58216136A JPS60109232A (ja) 1983-11-18 1983-11-18 マイクロ波プラズマ処理方法

Publications (2)

Publication Number Publication Date
JPS60109232A JPS60109232A (ja) 1985-06-14
JPH0572097B2 true JPH0572097B2 (show.php) 1993-10-08

Family

ID=16683827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58216136A Granted JPS60109232A (ja) 1983-11-18 1983-11-18 マイクロ波プラズマ処理方法

Country Status (1)

Country Link
JP (1) JPS60109232A (show.php)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63207131A (ja) * 1987-02-24 1988-08-26 Japan Steel Works Ltd:The プラズマ処理装置
JP2656503B2 (ja) * 1987-09-24 1997-09-24 株式会社日立製作所 マイクロ波プラズマ処理方法
JP2781712B2 (ja) * 1993-03-18 1998-07-30 株式会社日立製作所 プラズマ処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58168230A (ja) * 1982-03-30 1983-10-04 Fujitsu Ltd マイクロ波プラズマ処理方法

Also Published As

Publication number Publication date
JPS60109232A (ja) 1985-06-14

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