JPH0571294B2 - - Google Patents
Info
- Publication number
- JPH0571294B2 JPH0571294B2 JP10024586A JP10024586A JPH0571294B2 JP H0571294 B2 JPH0571294 B2 JP H0571294B2 JP 10024586 A JP10024586 A JP 10024586A JP 10024586 A JP10024586 A JP 10024586A JP H0571294 B2 JPH0571294 B2 JP H0571294B2
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical resonator
- plasma
- rectangular waveguide
- substrate
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Drying Of Semiconductors (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61100245A JPS62254834A (ja) | 1986-04-30 | 1986-04-30 | プラズマ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61100245A JPS62254834A (ja) | 1986-04-30 | 1986-04-30 | プラズマ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62254834A JPS62254834A (ja) | 1987-11-06 |
| JPH0571294B2 true JPH0571294B2 (enrdf_load_stackoverflow) | 1993-10-06 |
Family
ID=14268857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61100245A Granted JPS62254834A (ja) | 1986-04-30 | 1986-04-30 | プラズマ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62254834A (enrdf_load_stackoverflow) |
-
1986
- 1986-04-30 JP JP61100245A patent/JPS62254834A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62254834A (ja) | 1987-11-06 |
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