JPH0570514B2 - - Google Patents

Info

Publication number
JPH0570514B2
JPH0570514B2 JP1024390A JP1024390A JPH0570514B2 JP H0570514 B2 JPH0570514 B2 JP H0570514B2 JP 1024390 A JP1024390 A JP 1024390A JP 1024390 A JP1024390 A JP 1024390A JP H0570514 B2 JPH0570514 B2 JP H0570514B2
Authority
JP
Japan
Prior art keywords
introduction
liquid
solvent
chamber
recovery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1024390A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03217283A (ja
Inventor
Masahide Uchino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Field Co Ltd
Original Assignee
Japan Field Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Field Co Ltd filed Critical Japan Field Co Ltd
Priority to JP1024390A priority Critical patent/JPH03217283A/ja
Publication of JPH03217283A publication Critical patent/JPH03217283A/ja
Publication of JPH0570514B2 publication Critical patent/JPH0570514B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1024390A 1990-01-19 1990-01-19 洗浄時に発生する微粒子の回収装置 Granted JPH03217283A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1024390A JPH03217283A (ja) 1990-01-19 1990-01-19 洗浄時に発生する微粒子の回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1024390A JPH03217283A (ja) 1990-01-19 1990-01-19 洗浄時に発生する微粒子の回収装置

Publications (2)

Publication Number Publication Date
JPH03217283A JPH03217283A (ja) 1991-09-25
JPH0570514B2 true JPH0570514B2 (enExample) 1993-10-05

Family

ID=11744867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1024390A Granted JPH03217283A (ja) 1990-01-19 1990-01-19 洗浄時に発生する微粒子の回収装置

Country Status (1)

Country Link
JP (1) JPH03217283A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5268462B2 (ja) * 2008-07-15 2013-08-21 新オオツカ株式会社 被処理物洗浄装置

Also Published As

Publication number Publication date
JPH03217283A (ja) 1991-09-25

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