JPH0570051B2 - - Google Patents
Info
- Publication number
- JPH0570051B2 JPH0570051B2 JP59268370A JP26837084A JPH0570051B2 JP H0570051 B2 JPH0570051 B2 JP H0570051B2 JP 59268370 A JP59268370 A JP 59268370A JP 26837084 A JP26837084 A JP 26837084A JP H0570051 B2 JPH0570051 B2 JP H0570051B2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- blower
- filter
- air outlet
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005192 partition Methods 0.000 claims description 18
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims 1
- 230000003749 cleanliness Effects 0.000 description 7
- 230000000630 rising effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000003915 air pollution Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26837084A JPS61147030A (ja) | 1984-12-21 | 1984-12-21 | 清浄作業台 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26837084A JPS61147030A (ja) | 1984-12-21 | 1984-12-21 | 清浄作業台 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61147030A JPS61147030A (ja) | 1986-07-04 |
JPH0570051B2 true JPH0570051B2 (ro) | 1993-10-04 |
Family
ID=17457558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26837084A Granted JPS61147030A (ja) | 1984-12-21 | 1984-12-21 | 清浄作業台 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61147030A (ro) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4513275B2 (ja) * | 2002-05-07 | 2010-07-28 | セイコーエプソン株式会社 | 清浄作業台 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4532066Y1 (ro) * | 1967-04-27 | 1970-12-08 |
-
1984
- 1984-12-21 JP JP26837084A patent/JPS61147030A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4532066Y1 (ro) * | 1967-04-27 | 1970-12-08 |
Also Published As
Publication number | Publication date |
---|---|
JPS61147030A (ja) | 1986-07-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |