JPH0568546B2 - - Google Patents

Info

Publication number
JPH0568546B2
JPH0568546B2 JP60151223A JP15122385A JPH0568546B2 JP H0568546 B2 JPH0568546 B2 JP H0568546B2 JP 60151223 A JP60151223 A JP 60151223A JP 15122385 A JP15122385 A JP 15122385A JP H0568546 B2 JPH0568546 B2 JP H0568546B2
Authority
JP
Japan
Prior art keywords
metal
deposition chamber
metal band
evaporation
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60151223A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6213571A (ja
Inventor
Hiromi Masuhara
Takuya Aiko
Yoshiteru Moryama
Heizaburo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Nisshin Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Nisshin Steel Co Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP15122385A priority Critical patent/JPS6213571A/ja
Publication of JPS6213571A publication Critical patent/JPS6213571A/ja
Publication of JPH0568546B2 publication Critical patent/JPH0568546B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15122385A 1985-07-11 1985-07-11 片面連続真空蒸着方法 Granted JPS6213571A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15122385A JPS6213571A (ja) 1985-07-11 1985-07-11 片面連続真空蒸着方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15122385A JPS6213571A (ja) 1985-07-11 1985-07-11 片面連続真空蒸着方法

Publications (2)

Publication Number Publication Date
JPS6213571A JPS6213571A (ja) 1987-01-22
JPH0568546B2 true JPH0568546B2 (enrdf_load_stackoverflow) 1993-09-29

Family

ID=15513935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15122385A Granted JPS6213571A (ja) 1985-07-11 1985-07-11 片面連続真空蒸着方法

Country Status (1)

Country Link
JP (1) JPS6213571A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0356054U (enrdf_load_stackoverflow) * 1989-09-26 1991-05-29

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330932A (en) * 1976-09-03 1978-03-23 Mitsubishi Heavy Ind Ltd Continuous vacuum deposition zinc plating method
JPS6111225Y2 (enrdf_load_stackoverflow) * 1981-04-01 1986-04-09
JPS5938382A (ja) * 1982-08-26 1984-03-02 Mitsubishi Heavy Ind Ltd 真空蒸着装置
JPS60116787A (ja) * 1983-11-30 1985-06-24 Mitsubishi Heavy Ind Ltd メツキ方法およびその装置

Also Published As

Publication number Publication date
JPS6213571A (ja) 1987-01-22

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